SZ3000

0 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 4(A) 2(B) 5(EA) 1(P) 3(EB) i JIS symbol 2 position double 2 position double (A) 4 (B) 2 w e q r t y u o !0 5 (EA) 1 (P) 3 (EB) 4(A) JIS symbol 3 position closed center (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i 3 position exhaust center (A) 4 (B) 2 3 position closed center/exhaust center/pressure center 5 (EA) 1 (P) 3 (EB) w e q r t y u o !

Vacuum Equipment

Series ZR100 13-3-32 Other Equipment Work Application Description Page Direct operated vacuum pressure adjustment valve that regulates the vacuum pressure. Vacuum regulator 13-14-2 Series IRV 13-14-3 Controls the vacuum pressure in accordance with external electric signals.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Grommet: VKF334-G-01 DIN terminal: VKF334-D-01 Base mounted type 33.5 16.7 26 4 Manual override (non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 Max. 10 2-4.3 (mounting holes) Applicable cord O.D. 4 to 6.5 48.5 Approx. 300 (lead wire length) 26 4 Pg.7 3 27 Manual override (non-locking) A 20.5 18.5 3 32 59 68 78 70.5 43.5 12 7.5 P R 13.5 11 33.5 7.5 12 43.5 P R 3-Rc(PT) 1/8 (ports P, A, R) 13.5

Programless controller Step motor (servo 24 VDC)

A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m Shield Cable color Terminal no.

LEC-T1_C

- (2-3-1) LECPA . 32 (2-3-2) LECPA . 32 (2-3-3) LECPA . 34 5.4 .36 5.4.1 .36 (1) .36 (2) .38 5.4.2 .40 (1) .40 (2) .41 6. .42 6.1 .42 (1) .42 (2) .44 (2-1) LECPLECA .44 (2-2) LECPLECA .45 (2-3) LECPA .46 6.2 .47 (1) .47 (2) .47 (3) .48 (4) .50 (5) .51 (6) .52 (7) .54 (8) .54 6.3 .56 (1) .56 (2) .56 (2-1) .56 (2-2) .56 (3) .57 (3-1) .57 (3-1-a) TB Ver1.**. 57 (3-1-b) TB Ver2.**. 58 (3-2) .59

Rotary Clamp Cylinder: Standard ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 MK Series

12 V 5 V, 3-wire (NPN) IC circuit Relay, PLC Diagnostic indication (2-color indicator) 3-wire (PNP) 12 V Yes Grommet 24 V 2-wire 12 V 3-wire (NPN) 5 V, Water resistant (2-color indicator) IC circuit M9PAV1 M9PA1 3-wire (PNP) 12 V M9BAV1 M9BA1 2-wire 12 V P3DWA Magnetic field resistant (2-color indicator) 2-wire (Non-polar) A96 A93 A90 A96V A93V2 Yes Grommet 5 V IC circuit 3-wire

Electric Actuator with Integrated Guide

Contact pin (preassembled) N 3 Terminal Pin no.

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

Inch size 3/8" 5/16" 1/4" 5/16" 1/4" 5/32" 1/8" Flow rate l/min (ANR) 1000 680 440 480 420 210 150 INOUT Effective area mm 15.2 10.4 6.7 7.3 6.4 3.2 2.3 Note 1) Flow rate values are at a pressure of 0.5MPa and temperature of 20C.

VCL

Series 2 3 4 Class 2 Class 3 Class 4 VXD OUT port size VXZ Port size 1/8 (6A) 1/4 (8A) All IN ports are 3/8.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

202 holes drill and cbore NH cap screw tap NT-UNC Data (in) Bore size (in) MM KK NT XA NH YE WF TN NE EA EE DD A AA B CA D E NA 075 (3/4") 10-32 UNF 0.625 0.75 1.12 0.38 0.88 0.34 0.62 0.81 0.12 1.00 1/8 1.00 0.093 0.22 1/4-28 10-32 UNF 1/4-20 0.250 106 (1 1/16") 10-32 UNF 0.750 0.75 1.47 0.62 1.22 0.47 0.81 0.24 1.12 1.25 1/8 1.25 0.093 0.25 3/16-24 10-32 UNF 1/4-20 0.312 150 (1 1/2") 1

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M L1 = 5. Q2 = M 6.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Refer to page 11-7-3 for other specifications.

SMC Pneumatic Clean Series

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

LEC-OM038xx

LED display.32 10. 1 LED display.32 10. 2 Controller IF communication status and LED display.33 11. Mode.34 11. 1 Outline.34 11. 2. Step data input mode .34 11. 3. Numerical data input mode.34 11. 4. Data writing mode.36 12.

CEx-OMQ0013

F.G. 4. 1. 1. 2. 2. 3. 1. 1. 2. 2 3. 2. 1.52 4. 5. 1. 1ISO VG32 1. 2. 1. 2. 3. 1. 2. 1. 2. 14.5mT CE2 3. 15,000 18cm 4. 3. 4. IP65 5. (DC1224V) 1. 1-1 CEU2 1 2 32 32 1 16 P1 P2 P3 . P16 s1 s1 s1 s1 s2 s2 s2 s2 ... ... ... ... s32 s32 s32 s32 0.5mm) 1 2 , 2. 30mm 30mm 3.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

CY1F

(mm) D-A90V D-A96V D-A93V 22 Bore size D-F9V D-F9WV D-F9 D-F9W D-A90 D-A96 D-A93 (mm) 32 20 Mounting patternq, w 32 35 Mounting patterne 20 12 Auto Switch Mounting As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries. Insert the auto switch into the switch groove.

MHZ2/MHZJ2

No setting 1 4 2 5 7 2 5 3 2 2 3 5 3 1 MHZ2-16 No setting 3 2 4 1 MHZ2-20 MHZ2-25 MHZJ2-10 No setting No setting MHZJ2-16 No setting No setting 3 2 1 MHZJ2-20 MHZJ2-25 Note) "" in the table indicates a skip with no dimension.

OMR0031

An example is shown below. +3 +3 +3 +3 direction + direction direction + direction 0 5 10 0 5 10 2 8 [mm] 2 8 [mm] This example shows the Target Position set at +3 mm. The table moves +3 mm from the current position.