Multistage Ejector Series ZL112/212 1

12 V 6 V 5 V 3 V 5 6 V S R Lead wire length 0.5 (2.9) m NPN output Analog output PNP output 27 26 67 Lead wire length 0.5 (2.9) m Lead wire length 0.5 (2.9) m Not required for Nil, vacuum adapter (GN) and vacuum pressure gauge (G).

SFOD-OMT0012

[How to JOG] a) Change the mode to Remote mode in the main window. b) From the main window select View (V), select the Teaching window and select the JOG tab. Refer to section "4.1 (1-1-2) View (V)" for how to display the Teaching window.

PSxx-OMU0002CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -19No.PS-OMU0002CN-D Z/ISE20A(F)-S/-R () DC(+) NPN 2 Max.28 V80 mA 1 V R15 V OUT1 1 k OUT2 S420 mA DC(-) 12 V 300 24 V 600 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -20No.PS-OMU0002CN-D -V/-T () DC(+) PNP 2 Max.80 mA 1 V T15 V OUT1 1 k OUT2 V420 mA DC(

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

110 V [115 V] 200 V 220 V [230 V] (R1)5 1 (P) 3(R2) 1 (P) (R)3 AC Apparent power (VA) 2 position double 2 position double 2(B) (A)4 4(A) (B)2 Diode (DIN terminal, Varistor when non-polar types) LED (Neon light when AC with DIN terminal) Surge voltage suppressor Indicator light (R1)5 1 (P) 3(R2) (R)3 1 (P) Common between 110 VAC and 115 VAC, and between 220 VAC and 230 VAC.

Possible to transfer a workpiece at low-speed.

12 V Reed auto switch Solid state auto switch 12 V IC circuit Diagnostic indication (2-color indicator) 5 V, 12 V Relay, PLC Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equiv.)

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

A96V A96 5 V Grommet Yes 12 V A93 A93V 24 V 100 V Relay, PLC 2-wire 3-wire (NPN) M9N M9NV IC circuit 5 V, 12 V M9P M9PV 3-wire (PNP) M9B M9BV 2-wire 12 V F9NW F9NWV Relay, PLC 3-wire (NPN) Diagnostic indication IC circuit 5 V, 12 V 24 V Grommet Yes 3-wire (PNP) F9PW F9PWV (2-color display) F9BW F9BWV Improved water resistance (2-color display) 2-wire 12 V F9BA Though it is possible

MK

A72H A73H F79 F7P J79 F79W F7PW J79W F7BA F79F P5DW 200 V A72 A73 A73C A79W F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV Grommet Yes 100 V 12 V Relay, PLC 2-wire 24 V Connector 12 V Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Grommet 2-wire 12 V Connector Relay, PLC Yes 24 V 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic output

CQM

IC circuit 5 V A76H A96V A96 Yes No A72 A73 A80 A72H A73H A80H 200 V Solid state switch Reed switch Grommet 100 V 12 V IC circuit A90V A93V A90 A93 5 V, 12 V 12 V 12 V Relay, PLC 2-wire No Yes 24 V A73C A80C A79W F7NV F7PV F7BV J79C F7NWV Connector IC circuit 5 V, 12 V Grommet Diagnostic indication (2-color indication) Yes 3-wire (NPN) 3-wire (PNP) F79 F7P J79 M9NV M9PV M9BV M9N M9P M9B 5

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Yes Yes Grommet Relay, PLC 12 V 100 V 24 V IC circuit 5 V, 12 V Solid state switch Relay PLC 12 V Grommet 24 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V For 25, 32, 40, 50, 63 Lead wire length (m) Load voltage Electrical entry Auto switch model Pre-wire connector Applicable load Perpendicular (1) In-line Special function Wiring (Output) Type 0.5 (Nil) 3 (L) 5 (Z

SFOD-OMT0011CN

(3) Para protec a) Profaile View (V) 4.1 (1-1-2) View (V) Profaile b) Para protec Edit c) OK d) Download , e) 32 No.SFOD-OMT0011CN-A 4.3 PLC (: (1) 2 1-11-2 (1-1) a) View (V) 4.1 (1-1-2) View (V) b) Step No.Movement mode , Movement mode c) (0,0) (No.

SI Unit for Vacuum Manifold

Designation Content 1 SV24 V (PWR(V)) +24 V for valves 2 SV0 V (PWR(V)) 0 V for valves 3 SI24 V (PWR) +24 V for logic/sensors 4 SI0 V (PWR) 0 V for logic/sensors Fig. 2-4 Pin allocation of M12 4 pin plug A-coded connector Power-supply line for valves and power-supply line for logic/sensors operation are isolated. Be sure to supply power respectively.

EX600-AX_AY_AM_eng

Pin number Output (-) Output (+) Mark C on the unit Mark B at cable end Mark A at cable end 3 1 5 4 2 Output 2: Input (+) Output 2: Input (+) (1) Short circuit Short circuit 24 V 1: 24 V (Control and input) 24 V 1: 24 V (Control and input) 24 V 1: 24 V (Control and input) 0 V 0 V FE 4: Input (-) FE 4: Input (-) FE 4: Input (-) 24 V (control and input) 0 V (control and input) Analog input

PSxx-OMG0001CN

(A/D ) ( ) 6 2030 20 80 mA (Er1,2) () ( (Er4,6,7,8) ) DC1224 V DC1224 V Er1,2) Er4,6,7,8) 7 (HHH) "HHH" "LLL" Er3) (LLL) (Er3) 7F.S. -27No.PS-OMG0001CN-H No. DC1224 V DC1224 V 8 DC(+) DC(-) DC1224 V DC1224 V DC(+) 9 DC(-) / / 10 ( ) 11 / 5m / 12 2030 20 -28No.PS-OMG0001CN-H No.

PFxx-OMJ0005CN

NPN(1 )(15 V) PFM7--CNPN(1 )(420 mA) PFM7--DDC(+) OUT1 DC(-) Max.28 V80 mA 1 V C15 V 1 k D420 mA 600 50 NPN(1 ) PFM7--GDC(+) OUT1 DC(-) Max.28 V80 mA 1 V ()30 ms -18No.PF-OMJ0005CN-I PNP(2 ) PFM7--BDC(+) OUT1 OUT2 DC(-) Max.80 mA 1.5 V PNP(1 )(15 V) PFM7--EPNP(1 )(420 mA) PFM7--FDC(+) OUT1 DC(-) Max.80 mA 1.5 V E15 V 1 k F420 mA 600 50 PNP(1 ) PFM7--HDC(+) OUT1 DC(-) Max.80 mA

Fieldbus system PROFINET compatible SI Unit

Power connectors Pin Remarks 1 24 V (US1) 2 0 V (US1) 3 24 V (US2) 4 0 V (US2) 5 FE View of Push Pull connector (XD1/XD2) Fig. 3-6 Pin allocation of Push Pull connector (24 Volt) for EX245-SPN1A/SPN2A Pin Remarks 1 0 V (US2) 2 0 V (US1) 3 FE 4 24 V (US1) 5 24 V (US2) View of 7/8 inch 5 pins plug connector (XD1) View of 7/8 inch 5 pins socket connector (XD2) Fig. 3-7 Pin allocation of 7/8

CY1

Static moment Investigate Me1, Me3 Memax is the allowable moment for V 3 = Me/Memax 3.

EX510-GDN1.eng

DC-DC converter (isolated) Pin #1: Brown wire FG +24 V TD+ TD0 V Power supply for output INPUT OUTPUT +24 V 0 V COM D +24 V 0 V +24 V RD+ RD0 V Power supply for input and controlling GW 2 13 12 Wiring (continued) Press fitting Press the cover to the body with plier etc. Confirmation It is completed with a check on 4 latches engaging. 3 NOTE 1.

Thermo-chiller/Rack Mount Type

not be detected v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Item Unit Standard value Influence Free carbon (CO2) [mg/L] 4.0 or less v Corrosion Scale generation *1 In the case of [Mcm], it will be 0.003 to 0.01.

CE2

Relay, PLC 100 V Reed switch Solid state switch PLC 100 V, 200 V Relay, PLC 12 V Yes Yes 24 V 2-wire Terminal conduit PLC 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) 5 V, 12 V 24 V IC circuit Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) 2-wire Terminal conduit 5 V, 12 V Relay, PLC 12 V 3-wire (NPN

3

wire (NPN equivalent) 100 V 12 V Relay, PLC 2-wire 24 V A90V No IC circuit 5 V,12 V 100 V or less 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.