5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Mounting bolts and gaskets are not included. 3 8 VQ7 Piping port 03 04 06 1 2 3 4 1299 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 r u e t r u q o e !0 q i i w y PE 5(EA) 4(A) 1(P) 2(B) 3(EB) Bleed PE 5(EA) 4(A) 1(P) 2(B) 3(EB) PE 5 1 3 3 position closed center/exhaust center/pressure center !

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance.

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance.

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance.

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance.

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance.

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance.

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance.

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance.

e

of intermediate 3 positioning Completion of external input stop OUT2 q OUT3 q OUT4 q q q IN2 q IN3 q q q Load Motor side actuation instruction End side actuation instruction Intermediate actuation instruction 1 Intermediate actuation instruction 2 Intermediate actuation instruction 3 External input stop instruction q q q q q q Load Green OUT5 q q Purple IN1 q q q q Gray IN2

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Q P R O D U C T S Q Q Q Q Q Q 3 Q Q 3 Port 100/200/300 Series VQZ Base Mounted & Body Ported High speed and Long life. Response time Life VQZ100 10ms VQZ200 12ms 200 million cycles VQZ300 15ms Dispersion accuracy 2ms * Life: Metal seal type * Response time: Metal seal, single solenoid with light and surge voltage supressor.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(For details, refer to page 610.) 605 3 Port Pilot Solenoid Valve 10-SYJ300 Construction 2(A) 2(A) Directional Control Valves Air Grippers Modular F. R. Fittings & Tubing Air Cylinders Rotary Actuators N.C. N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.

Stability of suction position,

Arrival time to stable Pv 95% after adsorption [sec] QL : Leakage volume during workpiece adsorption [L/min (ANR)] Note 1) Q = + QL T1 T2 = 3 x T1 Max. suction flow rate Qmax = (2 to 3) x Q [L/min (ANR)] Ejector Select the ejector with the greater maximum suction flow rate from the Qmax indicated above.

Series AP500

Number Port No code MPA w q AP1410T e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 3) Pressure gauge unit MPa or psig/bar selectable.

VFR

1, Metal joint q, w, Gasket A e, Guard !3 !1 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 Non plug-in type (For 10) (3) Plug-in type With terminal block (3) For 01T 01T1 AXT625-3A-20 End plate (D side) assembly End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball !2 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

VFS

1, Metal joint q, w, Gasket A e, Guard !3 End plate (U side) assembly !1 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !

AZ1000

Porting Configuration Ports Seat material Ports 2 ports 3 ports 4 ports Code r Code Material PCTFE (Standard) Vespel 2PW 3PW 4PW No code VS w q w q Pressure gauge unit 3) 2PW 3PW 2) Refer to gauge guide (P.94) for gauge specifications.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

IO-Link port No. 0 1 1 2 2 3 3 4 Precautions for handling Be sure to fit a seal cap on any unused connectors. Proper use of the seal cap enables the enclosure to achieve IP67 specification. -41No.EX-OMX1011 LED display The LED displays the status of Pin No.4 (C/Q) and Pin No.2 (I/Q or P24) of each IO-Link port of the SI unit. The figures below show the status of each port.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

1, Metal joint q, w, Gasket A e, Guard !3 End plate (U side) assembly 11 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly 12 AXT625-3A-20 End plate (D) !

Series AK1000

Pressure gauge unit 3) 2P 3P Unit psig/bar MPa Code Gauge port (Extra bottom outlete, Inletr, Outlett) No code MPA t r t Pressure gauge 2) w w q q 3) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.