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Hardware failure) 1 24 V (Output) 1 24 V (Output) HUNGARY (36) 23 513 000 OFF PROFINET communication is established. 2 0 V (Output) 2 0 V (Output) Torbgy u. 15-19, 2045 Trkblint, Hungary 3 2 PROFINETcontroller settings and EX600 configuration data do not match. 24 V (Control and input) 24 V (Control and input) 1 2 Red LED flashes. 3 3 4 5 4 1 Red LED is ON.

For example, when analogue output is 1 to 5 V, F.S.=5[V] 1[V]=4[V]. (Reference: 1%F.S. = 4[V] 1% = 0.04[V]) F F.S. (full span / full scale) H Hysteresis The difference between ON and OFF points used to prevent chattering.

110 VAC [115 VAC] VFN 220 VAC [230 VAC] Electrical entry Manual override 24 V, 12 V, 6 V, 5 V, 3 VDC/100 V, 110 V, 200 V, 220 VAC Grommet L plug connector M plug connector Nil: Non-locking push type D: Push-turn locking slotted type G: 300 mm lead wire L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire L P B: Locking slotted type E: Push-turn locking

l xDiinensiom:With Sp*r 2 Nllt $enies I Indluifrnl Unll/ llalu (Dimensions in millimeters Valve: Applicable valve / NVJ300 (N.O. type) Nzxi-v@K38@@@ Spacer 2 Gor side Srf,f,r,r 2,/ZX1-s,2 Ak supply passur port Exterml vacuum rreestxe aoat Valve: Appllcable valve /Air operatd Nar-v@K6 Ak opEted EXrA) GXr A) M3XO,5 r ^ T ul . oi : l f r l | t M5xO.8 c (PV pdt) Air supply Exthal v Nol6) XDi.nensidrstFo

Note2) Fixed units: Instantaneous flow rate: L/min Accumulated flow: L Connectable remote type sensor unit is PF2W5--1 (with analog output 1 to 5 V).

l xDiinensiom:With Sp*r 2 Nllt $enies I Indluifrnl Unll/ llalu (Dimensions in millimeters Valve: Applicable valve / NVJ300 (N.O. type) Nzxi-v@K38@@@ Spacer 2 Gor side Srf,f,r,r 2,/ZX1-s,2 Ak supply passur port Exterml vacuum rreestxe aoat Valve: Appllcable valve /Air operatd Nar-v@K6 Ak opEted EXrA) GXr A) M3XO,5 r ^ T ul . oi : l f r l | t M5xO.8 c (PV pdt) Air supply Exthal v Nol6) XDi.nensidrstFo

Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1002F V V V V V V AS2002F V V V V AS2052F V V V V AS3002F V V V V V V V AS4002F V V V V 1 Use caution at the max. operating pressure when using soft nylon or polyurethane tubing. (Refer to the Web Catalog for details.)

Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1002FS V V V V V V AS2002FS V V V V AS2052FS V V V V AS3002FS V V V V V V V AS4002FS V V V V 1 Use caution at the max. operating pressure when using soft nylon or polyurethane tubing. (Refer to the Web Catalog for details.)

circuit 5 V, 12 V 5 V With diagnostic output (2-color indicator) 100 V Grommet IC circuit 100 V or less B54 B64 100 V, 200 V Relay, PLC 12 V 2-wire 24 V 200 V or less C73C C80C Connector IC circuit 24 V or less B59W Grommet Diagnostic indication (2-color indicator) 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance

Magnetic field resistant (2-color indication) 2-wire (Non-polar) 3-wire (NPN equivalent) A96 A96V IC circuit 5 V A72 A72H 200V 100V Grommet Reed switch A93 A90 A93V A90V 12 V 100 V or less Relay, PLC IC circuit 5 V,12 V 12 V 2-wire A73C A80C A79W 24 V Connector 24 V or less 5 V,12 V IC circuit Diagnostic indication (2-color indication) Grommet Solid state auto switches marked with

Perform an inspection to check that it is working properly because it can cause possible injuries. +24 V +24 V Power supply for output Power supply for output 0 V 0 V Power supply for input and for the control unit of the Gateway Power supply for input and for the control unit of the Gateway 24 V 24 V 97 Series S0700 Specific Product Precautions 7 Be sure to read before handling.

+24V 2 SV0 V 0 V 3 SI24 V +24 V 4 SI0 V 0 V 5 M12 SPEEDCON SPEEDCON SPEEDCON 1/2 SPEEDCON M12 -13No.EX-OMP0004CN-I SV SI DC24 V /28 SV DC24V SI DC24V A.

Internal voltage drop: 1 V or less (with load current of 80 mA) PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA) Switch output Note 4) Output specifications NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulse ON time per pulse width: 50 msec Accumulated Note 4) pulse output Output voltage: 1 to 5 V; Load

AL-183H-V AL-162H-V FKM or EPDM Element opening 10 to 16 AL-181H-V AL-184H-V AL-163H-V Band Element w 20 to 24 AL-182H-V AL-185H-V AL-164H-V Case Note 1) The material of seals (AL-162H-V to AL-164H-V and AL-180H-V to AL182H-V) is EPDM.

Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors +24 V +24 V Power supply for output Power supply for output 0 V 0 V Power supply for control/input +24 V Power supply for control/input 24 V 4. Do not install a unit in a place where it can be used as a foothold.

) V V CC-LINK V D side U side 1 2 3 Stations SI Unit Part No.

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106

For example, when analogue output is 1 to 5 V, F.S. = 5[V] 1[V] = 4[V], (ref. 1%F.S. = 4[V] x 1% = 0.04[V]) F.S. (Full span, Full scale) H Hysteresis The difference between ON and OFF points used to prevent chattering. Hysteresis can be effective in avoiding the effects of pulsation.

Analogue output 1 to 5 V Output impedance 1 K Max.28 V, 80 mA Internal voltage drop 1 V max.