HRX-OM-O021

Table 3-1 Amount of radiation and required ventilation Required ventilation amount m3/min Differential temp. of 3 oC Heat Differential temp. of 6 oC Radiated between inside and Model between inside and outside kW outside of installation of installation area area HRS050-A-20 Approx.10 140 70 The water-refrigerated thermo-cooler discharges heat by using facility water.

HRX-OM-R005

Table 3-1 Amount of radiation and required ventilation Required ventilation amount m3/min Differential temp. of 3 oC Heat Differential temp. of 6 oC Radiated between inside and Model between inside and outside kW outside of installation of installation area area HRS060-A-20 Approx.12 200 100 The water-refrigerated thermo-cooler discharges heat by using facility water.

DOC1001322

Table 3.2-1 Amount of radiation and required ventilation Required ventilation amount (m3/min) Heat Differential temp. of Differential temp. of Model radiation 3 oC between inside and 6 oC between inside and (kW) outside of installation outside of installation area area HRS400-A-46Approx.52 865 435 Installation environment specifications Sound noise: HRS400-A-46 : 71 dB(A) Front 1m, height

HRX-OM-W060

Table 3.2-1 Amount of radiation and required ventilation Required ventilation amount (m3/min) Heat Differential temp. of Differential temp. of Model radiation 3 oC between inside and 6 oC between inside and (kW) outside of installation outside of installation area area HRL100-A-20 Approx.18 305 155 HRL200-A-20 Approx.35 590 295 HRL300-A-20 Approx.45 760 380 Installation environment specifications

HRX-OM-Y098

Table 3.2-1 Amount of radiation and required ventilation Required ventilation amount (m3/min) Heat Differential temp. of Differential temp. of Model radiation 3 oC between inside and 6 oC between inside and (kW) outside of installation outside of installation area area HRL100-A-20 Approx.18 305 155 HRL200-A-20 Approx.35 590 295 HRL300-A-20 Approx.45 760 380 Installation environment specifications

HRX-OM-X037

Table 3.2-1 Amount of radiation and required ventilation Required ventilation amount (m3/min) Heat Differential temp. of Differential temp. of Model radiation 3 oC between inside and 6 oC between inside and (kW) outside of installation outside of installation area area HRL100-A-40 Approx.18 305 155 HRL200-A-40 Approx.35 590 295 HRL300-A-40 Approx.45 760 380 3.2 Installation HRL Series 3-6

HRX-OM-Z002

Table 3-1 Amount of heat radiation and required ventilation Required amount of ventilation [m3/min] Model No.

HRX-OM-X071

Table 3-1 Amount of radiation and required ventilation Required ventilation amount (m3/min) Heat Differential temp. of 3 C between inside Differential temp. of 6 C between inside radiation Model (kW) and outside of and outside of installation area installation area HRR050-A-20/40Approx.10 140 70 3.2 Installation HRR Series 3-4 HRX-OM-X071 Chapter 3 Transport and Setting Up The water cooled

HRX-OM-T004

HRS090 Series 2.1 Precautions for communication 2-1 HRX-OM-T004 Chapter 2 Contact input/output communication 2.2 Communication specification Table 2.2-1 DIO Communication specification Item Specification Connector type M3 terminal block Contact input Insulation method Photo coupler signal Rated input voltage DC24V Input voltage range DC 21.6V to 26.4V Rated input current 5mA TYP Input impedance

HRX-OM-R028

HRSH Series 2.1 Precautions for communication 2-1 HRX-OM-R028 Chapter 2 Contact input/output communication 2.2 Communication specification Table 2.2-1 DIO Communication specification Item Specification Connector type M3 terminal block Contact input signal Insulation method Photo coupler Rated input voltage DC24V Input voltage range DC 21.6V to 26.4V Rated input current 5mA TYP Input impedance

HEC-OM-Y008

Attach the included filter cover and air filter (hook the protruding part of the filter cover on the product) and tighten screws to the required torque (M3: 0.63Nm). [] key (UP key) Increases set data. [MODE] key Used to change screens and modes.

XMH/XYH Series

XMH-16 XMH-25 XYH-25 XMH-40 XYH-40 XMH-50 XYH-50 Flange (valve) size 16,CF034 25 40,CF070 50 Actuating type Manual Fluid Inactive gas under vacuum Operating temperature oC 5 to 150 Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 2 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pa m3

CYV_EN

Table 4 Inner cover fixing screw tightening torque[Nm] Model Screw size Tightening torque CYV15 M3 x 0.5 0.3 CYV32 M6 x 1 2.45 Sine suction mechanism is installed as a standard specification. However, cushion effect adjustment is not available. 7. Maintenance (1) Do not disassemble the cylinder tube, linear guide, slide table and other components.

CM2x-OM0230Q

. <> () () 6080 D-M9A(V) M3M3 0.6 0.7Nm (M2.5) (M2.5)0.050.1Nm 56mm 1) (M2.5) 2) M3 BM5 12 - 13 - 3. 14 - 1) 2)1 (30) * *(NC=b )(D-M9E(V)) 15 - / 16 - 3. CM2-*Z 3-1. a) b GR-S-010(10g )GR-S-020(20g ) P18, 4.

CRBB-OM00004

Size 10 Size 15 P211070-10 P211090-10 Stainless Hexagon socket set screw Stainless 3 Hexagon nut steel 1 M3 3 steel 1 M33L Cross recessed round head screw Stainless Cross recessed round head screw Stainless 2 steel 2 M34L 2 steel 3 M312L Stainless Aluminum steel 1 1 Joint alloy 1 Chromated 1 Joint No. Description Material Qty Note No.

Rotary Table

Bolt size for mounting on axial direction Bolt Size Mounting on the top Mounting at bottom Bolt Tap depth When using body tap When using body through hole 1 M30.5 3.5 M40.7 M3 2 3 M50.8 M4 7 M40.7 4.5 Table 6.

MHx-OMU0057

MHZ2-25 M61 5.9 10 MHZ2-32 M61 5.9 10 MHZ2-40 M81.25 13.7 13 Nm Lmm MHZ2-10 M30.5 0.69 5 MHZ2-16 M40.7 2.1 8 MHZ2-20 M50.8 4.3 10 MHZ2-25 M61 7.3 12 MHZ2-32 M61 7.9 13 MHZ2-40 M81.25 17.7 16 Nm MHZ2-10 M2.50.45 0.49 MHZ2-16 M30.5 0.88 MHZ2-20 M40.7 2.1 MHZ2-25 M50.8 4.3 MHZ2-32 M50.8 4.3 MHZ2-40 M61 7.3 D-Y59 D-Y69 D-Y7P 7 - 1. 2. 1. 2. 3. 8 - 3. 4. 10 2 16 2 1 <> : AS1211F-M3

MHx-OMY0005

. <> AS1211F-M3 AS1201F-M5 AS1000 AS1002F 2-4. 1. 2. 2. 4. 1. () 2. 5 3. 4. 5 10 2-5 1.

Air Gripper Unit for Collaborative Robots

Model Bolt Max.tightening Torgue (Nm) JMHZ2-16D M3 x 0.5 0.59 Attachment 16 - How to Mount Air Gripper Adjust the robot arm position before mounting so that the mounting is easy. (1) Mounting to the robot arm (2) Mounting of the cover Take care not to get the switch cable Caught when mounting the cover.

MHx-OMZ0003

H 9 - 3-5. () P13P14P15 5 4 M6 85.8L 4 4 4 M3 27 17 10 - 3-6. M8 8 P .18 M8 8 () NPN PIN 1 +24V DC24V 2 3 4 5 ON/OFF 6 ON/OFF 7 8 GND DC0V M8 2 M8 1 11 - 3-7. Z Y Y X Z Z X X Y Z -0.4 -0.8 48.4 12 - 4 (www.smcworld.com) 4-1.