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.: IZ-OMR0035 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved 36

Polyurethane tube: +0.15mm or -0.2 at max. disconnects. 7 - 6 Construction AS1002F, AS2002F, AS2052F AS1002F-02 AS3002F, AS4002F 8 - S Revision history A : Added the Safety Instructions sentences and Recommended Piping Conditions Table. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject

[July 2018] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2018 SMC Corporation All Rights Reserved No.PF-OMN0010-J

Refer to Auto Switch Mounting on page 10 3-3-2 for details. 28/28 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

Leakage due to deterioration of the rubber part. 7Troubleshooting 1 Reduction of the set pressure There is leakage from the ports other than the bonnet breathing hole and exhaust port. 4 Increased leakage from the bonnet breathing hole and exhaust port 3 Slow response 9 -12- 8 Dimensions -13- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +

Appropriate tightening torque 0.8 to 1.0Nm 63 No.SQ1000V-OMQ0002-B Revision Specific Product Precautions Manifold Options 2020.7 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation

Trouble with the electrical specification Check there is no trouble with the electrical specification. 36 - Revision history A:Corrected to the latest format 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

With floating joint 13 Internal Construction and Parts List A 14 Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

Unlocked Locked (2) Lock mechanism (7) (3) Product no. display (6) Body Element (4) (5) Cover Raised part of the cover 12 - Revision history Rev.A: The ZFC1series and ZFC3 series added. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

No.LEP-OM00203 Oct / 2013 Revision No.LEP-OM00204 Jan / 2015 Revision Change of specification No.LEP-OM00205 Mar / 2016 Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2016 SMC Corporation All

Detailed content of the failure Operating cycle Operating fluid Machine used Operating temperature Fluid pressure Pilot pressure 9 VN-OMA0002-D B Renewal PS Revision history C Renewal RP D Renewal RY 1st printing: 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior

.: GR-S-010 (10 g) H = With hose nipple, K = With One-touch fitting, M = With M3 port, E = Side ported The end boss assembly other than type E should be mounted on the special body. 16 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice

The procedure 4 can be done easily and accurately. 12 XL*-OMI0013-B Revision B RENEWAL 2018.9 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved XL*-OMI0013-B

[June 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. EtherNet/IPTM is a trademark of ODVA. 2012-2022 SMC Corporation All Rights Reserved No.EX-OMP0013-E

A Thd B Thd C Dia Part No. 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 M8x1.25 M8x1.25 M8x1.25 M8x1.25 M8x1.25 M8x1.25 M8x1.25 M6x1 M6x1 M6x1 M6x1 M6x1 M6x1 M6x1 M5x0.8 M5x0.8 M5x0.8 M5x0.8 M5x0.8 M5x0.8 M5x0.8 1/8 NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/8 NPT M8x1.25 M6x1 M5x0.8 M3x0.5 1/4-28 10-32 1/8 NPT M8x1.25

B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 A 3 4 5 6 B 5.7 7 9 12 A 3 4 5 6 Model MHZL2-101 MHZL2-161 MHZL2-201 MHZL2-251 Model MHZL2-102 MHZL2-162 MHZL2-202 MHZL2-252 MHY MHW MRHQ Flat Type Fingers [3] Misc.

Application Example Aligning different sizes of packages on conveyor: MPC Series Specifications Specifications Table Supply Exhaust 1/4 OD ports 40mm 25mm Bore Vent 100mm 50mm Stroke 16mm 12mm Rod diameter Extend 880 N (199 lbf) 344 N (78 lbf) M12 Pin Callout Thrust at 80psi (theoretical) Retract 739 N (166 lbf) 264 N (59 lbf) Power (BRN) 0.7 Mpa (101 psi) Maximum pressure 1 Input signal

Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

tapped hole, drilled hole and pin hole additionally -XC79 -XB13 Low speed cylinder (5 to 50 mm/s) Theoretical Output -XC3 Special port location (N) -XC19 Intermediate stroke (Spacer type) Piston area (mm2) Operating pressure (MPa) Rod size (mm) Bore size (mm) Operating direction -XC22 Fluororubber seal 0.3 0.5 0.7 19 14 8 OUT 28 6 3 14 10 6 IN 21 55 39 23 OUT 78 10 4 46 33 19 IN 66 141 101

0.5 Vacuum suction port Z Max. 9.5 (Rubber stopper) 2.4 depth 2 2.5 3.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL Without magnet and switch rail 2 2-M2 x 0.4 depth 2.2 12 Metal stopper 11-/22-MXP6-10 Max. 10.5 F 4-M3 x 0.5 depth 3 12 2-M2 x 0.4 depth 3 (mm) E F H J M Q QL S W Y Z AA Model 23 25 38 33.5 37 28 8 5 42 22 45 2 11-/22-MXP6-51 30 35 42 48.5 47 37 11 10 53 27.5 60 9.5 11-/22-MXP6-10 101