SI unit for DeviceNet TM

Instance common service Service code Service name 0Eh Get_Attribute_Single 10h Set_Attribute_Single 05h Reset 6. Discrete Output Point Object (Class ID: 09h) 6-1. Class attribute ID Access rule Description Value 6-2. Class common service Service code Service name -20No.EX-OMO0004-D 6-3.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

IDX-OM-V022

of the ventilation grille . 5-2 5.2.2 Auto drain maintenance . 5-2 Chapter 6 Troubleshooting . 6-1 6.1 TROUBLESHOOTING . 6-1 6.2 RESET THE THERMAL RELAY AND HIGH PRESSURE SWITCH. 6-4 IDF60/70/80/90 Series IDX-OM-V022 Contents Chapter 7 Documents . 7-1 7.1 SPECIFICATIONS . 7-1 7.2 REFRIGERANT AND GWP VALUE . 7-2 7.3 DIMENSIONS . 7-3 7.4 ELECTRIC CIRCUIT . 7-4 7.5 AIR/ REFRIGERANT CIRCUIT

IDX-OM-V024

of the ventilation grille . 5-2 5.2.2 Auto drain maintenance . 5-2 Chapter 6 Troubleshooting . 6-1 6.1 TROUBLESHOOTING . 6-1 6.2 RESET THE THERMAL RELAY AND HIGH PRESSURE SWITCH. 6-4 IDFB60/70/80/90 Series IDX-OM-V024 Contents Chapter 7 Documents . 7-1 7.1 SPECIFICATIONS . 7-1 7.2 REFRIGERANT AND GWP VALUE . 7-2 7.3 DIMENSIONS . 7-3 7.4 ELECTRIC CIRCUIT . 7-4 7.5 AIR/ REFRIGERANT CIRCUIT

JCRB-OM00003

Mount the stopper seals (6) into the stopper (4). 3. Mount the stoppers (4) into the body B (2). (Note) The stopper has the specified position for mounting. 4. Insert the vane shaft (3) into the body A (1). 5. Tighten the body A (1) and body B (2) with the hexagon socket head cap screws (10). (Refer to table 1.) A B 6.

Direct Solenoid

AXT336-5j Ti+ RodsIndudes (2) M6X25 screws pr rod 2 NXT336-4-' Conduitcover Note: Not reouired it usino ME401 SLR end olates I AXT 3(]6-6 Gallrv blockino Disc AXT33G7A Blankslationkit AXT 3S5 Slop Valve (SV-1) sP0100 Inlerface Soeed Conlrol (use adder'M') AXT622-5A TminalBlock Manifolds Part No.

Fieldbus system CC-Link compatible SI unit

the selection of accessories, refer to the catalog. (1)Valve plate EX600-ZMV1 Enclosed parts: Round head screw (M4 x 6), 2 pcs.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

position single 2 position double PR R PR R 3 5 1 4 2 4 2 5 1 A B A B 7 7 R1 P R2 R1 P R2 6 3 position closed center/exhaust center/pressure center 3 position closed center A B 4 2 5 1 PR2 R A 3 position exhaust center A B B PR R 3 position pressure center A B 7 R1 P R2 PR R (This construction shows closed center type.)

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

2 !4 L-Bracket !5 !5 w e r !2 !4 q !3 !3 !6 !6 t t !1 Component Parts !1 No. Description Material 1 Bracket Steel strip DIN Rail Mounting Bracket q w e q o !0 i y u q o !0 i y Component Parts No.

1

n Auto switch model Different surfaces Same surface Different surfaces Same surface D-M9m 25 25 40 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mW 25 25 40 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mA 25 25 40 25 + 35 (n 2) 2 (n = 2, 4, 6)*1 60 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mV 25 25 35 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 35 + 35 (n 2) (

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Dimensions [mm] Model L A B n D E G LEKFS32mm-100m 295 106 230 4 130 LEKFS32mm-200m 395 206 330 6 2 300 280 LEKFS32mm-300m 495 306 430 6 2 300 280 LEKFS32mm-400m 595 406 530 8 3 450 430 LEKFS32mm-500m 695 506 630 10 4 600 580 18 LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: Motor Parallel LEKFS40R 24 Motor option: With lock 153 Cable length 250 20 Motor cable 15 65

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

Electromagnetic Digital Flow Switch

1*2 gal/min 6*1*2 V V gal/min 7*1*2 V gal/min Port size Symbol Port size Applicable model LFE1 LFE2 LFE3 3 3/8 V 4 1/2 V 6 3/4 V 8 1 V *1 Options 4, 5, 6, and 7, which are not in SI units, are not for use in Japan due to the New Measurement Law. *2 Options 4, 5, 6, and 7 cannot be selected when the output specification is J or K.

CJ2X/CUX/CQSX/CQ2X/CM2X

Model AS1001FM AS2051FM RS Q G Metric size 8 3.2, 4, 6 6 6 4 Tubing O.D. 1/8", 5/32", 3/16" 1/4" Inch size 1/4", 5/16" 3/16", 1/4" 3/16" 5/32" RS H A Air flow (l/min (ANR)) 12 7 38 Controlled flow 0.2 0.1 Effective area (mm2) 0.6 RZQ 100 Flow rate (l/min (ANR)) 460 230 290 130 Free flow MI W S 1.5 Effective area (mm2) 7 3.5 4.5 2 Note) Supply pressure: 0.5 MPa, Temperature: 20C CEP1 Elbow

CJ2X/CUX/CQSX/CQ2X/CM2X

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com In-line Type RHC Air Flow/Effective Area MK(2) AS2001FM Model AS1001FM AS2051FM RS Q G Metric size 8 3.2, 4, 6 6 6 4 Tubing O.D. 1/8", 5/32", 3/16" 1/4" Inch size 1/4", 5/16" 3/16", 1/4" 3/16" 5/32" RS H A Air flow (l/min (ANR)) 12 7 38 Controlled flow 0.2 0.1 Effective area

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

6 !5 r o e y !6 !5 q AS-FG AS-FP AS-FM AS-FM AS-D AS-T ASP !9 !1 q !2 t !0 !1 u !2 t !0 i ASN AQ Component Parts Component Parts Material Description Note Description No. Note Material No.

IDX-OM-V020

of the ventilation grille . 5-2 5.2.2 Auto drain maintenance . 5-2 Chapter 6 Troubleshooting . 6-1 6.1 TROUBLESHOOTING . 6-1 6.2 RESET THE THERMAL RELAY AND HIGH PRESSURE SWITCH. 6-4 IDFA60/70/80/90 Series IDX-OM-V020 Contents Chapter 7 Documents . 7-1 7.1 SPECIFICATIONS . 7-1 7.2 REFRIGERANT AND GWP VALUE . 7-2 7.3 DIMENSIONS . 7-3 7.4 ELECTRIC CIRCUIT . 7-4 7.5 AIR/ REFRIGERANT CIRCUIT

EX600-DX_DY_DM_eng

EX600-DM E EX600-DM F EX600-DY B EX600-DY E EX600-DY F EX600-DX B EX600-DX C EX600-DX D EX600-DX E EX600-DX F 1 1 2 1 1 Description Function 6 6 6 6 2 3 2 3 Displays the status of the unit. 2 2 5 5 5 5 3 3 4 4 1 1 2 1 1 6 6 6 6 2 3 2 3 2 3 5 5 5 5 3 4 4 Valve plate mounting groove 1 1 6 6 Valve plate (EX600-ZMV ) 1 5 2 2 3 5 5 3 Direct mounting (1)When joining six or more units, fix the middle

MU

8 10 11 14 LD 5.5 6.6 9 11 13.5 LS 79 90 96 116 123 LX 11 12 15 18 22 X 12 16 18 21 24 Model MUL25 MUL32 MUL40 MUL50 MUL63 LH 29 37 46 57 67 LT 3.2 4.5 4.5 5 6 LZ 23 27 31 37 48 Axial foot MUL25SMU25, #2 (#1+#2+#11) MUL32SMU32, #2 (#1+#2+#11) MUL40SMU40, #2 (#1+#2+#11) MUL50SMU50, #2 (#1+#2+#11) MUL63SMU63, #2 (#1+#2+#11) CU CQS CQ2 MU (mm) ZZ 99 106 114 139 145 FZ 24 28 32 39 50 FY 66 82

Slide Tables MX Series

Press down lock piston 2. Slide the table forward. 2 B Always detect ON Adjust the switch position according to loads or speed. (Unit:mm) B A 2 2.5 4 5 5.5 10 Model MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 1 3 17 MXF Series Low Profile Slide Table Operation Guide Slide table mounting Cautions on use The table is supported by precision bearings.