CV/MVGQ

A34 A44 B59W G59 G5P K59 G39 K39 G59W G5PW K59W G59F 100 V Relay, PLC PLC Yes Yes Relay, PLC 100 V, 200 V 12 V Terminal conduit PLC 24 V 2-wire 100 V 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) 24 V 5 V,12 V IC circuit 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 5 V 12 V 12 V 5 V, 12 V 2-wire IC circuit Terminal conduit

Slider Type Ball Screw Drive/11-LEFS Series

Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Manufacturable stroke range [mm] 11-LEFS16 V V V V V V V V V V 50 to 500 11-LEFS25 V V V V V V V V V V V V 50 to 600 11-LEFS32 V V V V V V V V V V V V V V V V 50 to 800 11-LEFS40 V V V V V V V V V V V V V V V V V V 150 to 1000 * Please consult with SMC for

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

W W W Dynamic Moment Moment generated by the load equivalent to impact at the stroke end Guide central axis We = WV V = 1.4 Va Average load coefficient Pitch moment Me1 = 1/3. We L Yaw moment Me3 = 1/3.

10

v 25A CG1 v v MBlR V CG3 v v v v v v 10v 20JMB v v XAl MB MB v v v v v v v XB5 v v v v v XB6 MB1 v v v v v XB13 CA2 v v XC3 v XC4 CS1 v v v v v XC5 CS2 v XC6 Note 8) Note 8) v XC7 v v v XC8 v v v XC9 v v XC10 Note 4) Note 4) v v v v v XC11 v v v v v XC12 v v XC14 Note 3) v v v v v XC22 XC26 v v XC27 v v v v XC29 XC30 v v XC35 v XC65 XC68 XC88 XC89 XC91 Dv v v

Integrated Controller

[kg] Work load: W [kg] 5000 mm/s2 10 mm/s2 0 0 Speed: V [mm/s] 200 400 600 800 1000 1200 Speed: V [mm/s] EQFS32HA/Ball Screw Drive Horizontal/Lead 16 Vertical/Lead 16 60 55 50 45 40 35 30 25 20 15 10 5 0 15 Work load: W [kg] Work load: W [kg] 3000 mm/s2 10 3000 mm/s2 5 5000 mm/s2 10 mm/s2 0 0 Speed: V [mm/s] 100 200 300 400 500 600 700 800 0 Speed: V [mm/s] 100 200 300 400 500 600 700 800

Cylinder with Lock

Mounting Rod Nil Single rod W Double rod Symbol Description Single rod Double rod B Basic v v L Axial foot v v F Rod flange v v G Head flange v v C Single clevis v D Double clevis v Number of auto switches Pivot bracket Nil No bracket N Pivot bracket Cylinder stroke [mm] Refer to page 10 for standard strokes.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

L21 Motor Connector: CNP3 Accessory U Terminal name Function Function details Servo motor power (U) Servo motor power (V) U V V Connect to motor cable (U, V, W) Servo motor power (W) W W 101 Series LECSA Series LECSB Control Signal Wiring Example: LECSA LECSAPLC 2 m or less Note 5) FX3U-MT/ES (Manufactured by Mitsubishi Electric) S/S LECSA 24V 0V Note 4) Note 4) CN1 CN1 L Sequencer power

Environment

1200 Speed: V [mm/s] Speed: V [mm/s] LEFS40/Ball Screw Drive Horizontal Vertical 70 Lead B 60 30 Work load: W [kg] Work load: W [kg] 50 Lead B Lead A 40 20 30 Lead H 20 10 Lead A/Lead H 10 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] 39 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication For the LECP6/LECP1/ LECPMJ

MY1

(L) 5 (Z) Z76 Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN equivalent) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire Reed switch IC circuit 5 V Yes Yes Grommet Relay, PLC 12 V 100 V 24 V Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V Solid state switch Relay, PLC 12 V Grommet 24 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V

Aluminum High Vacuum Angle Valve

XLC(V) XLD(V) XLH XLF(V) XLG(V) Exterior seal e Exterior seal e Valve seal w Standard Special XL XL Standard Special XLQ Standard Common Special XLD50-2-9-1A AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A

&snac

, v i t h 6 p c s ' o f s c r e t v s . p r o p e r t Y @ N o t e : E n s u r e t h e p r o t r u s i o n a t b o d v f i x a t s L o t o f M e m b r a n e m o d u l e ' l n s t a I L n e w o r i n s a t b e l o w o f m o d u l e ' T h e n , i n s e r t c o v e r a n d f a s t e n i t w i t n 4 @ S C T E W S f r o m t h e b e t o w o f c o v e [ . @ u n s c r e w t n e c o v e r .

Cylinder with Lock

K39 5 V, 12 V Solid state auto switch 3-wire (NPN) 5 V, 12 V M9NW V V V v v IC circuit 3-wire (PNP) M9PW V V V v v 2-wire 12 V M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC Yes 3-wire (NPN) 5 V, 12 V M9NA1 v v V v v IC circuit 3-wire (PNP) M9PA1 v v V v v 2-wire 12 V M9BA1 v v V v v 24 V Water-resistant (2-color indicator) Grommet With diagnostic output (2-color

MB

24 V 100 V, 200 V Relay PLC DIN terminal Diagnostic indication (2-color indication) A59W Grommet Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW G39 K39 3-wire (NPN) 3-wire (PNP) 5 V, 12 V 24 V IC circuit Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) 2-wire 5 V, 12 V Terminal conduit 12 V Relay PLC 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 5 V, 12 V

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

teaching Acceleration/ Deceleration Acceleration/deceleration during movement V V V Set in units of 1 mm/s2 Select from 16-level Select from 16-level Pushing force Rate of force during pushing operation V V V Set in units of 1% Set in units of 1% Select from 3-level (weak, medium, strong) Step data setting (Excerpt) Trigger LV Target force during pushing operation V V Set in units of 1%

C95

switch Grommet Diagnostic indication (2-color) Z76 Z73 Z80 F59 F5P J51 J59 F59W F5PW J59W F5BAL IC IC 3-wire 5 V Yes AC 100 100 V or less 12 V 5 V, 12 V Relay, PLC No PLC 24 V 2-wire Terminal conduit 12 V Yes 100 V, 200 V Relay, PLC DIN terminal 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC 24 V 100 V, 200 V 2-wire 12 V 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC Diagnostic indication (2

Step Motor Controller

Control circuit power supply (24 V) L11 Control circuit power supply (0 V) L21 Motor Connector: CNP3 Accessory U Terminal name Function Function details Servo motor power (U) Servo motor power (V) Servo motor power (W) Connect to motor cable (U, V , W) U V W V W 60 Series LECSA Series LECSB Control Signal Wiring Example: LECSA LECSAm-m 2 m or less Note 5) PLC FX3U-mmMT/ES (Manufactured by

CRB2/CRBU2/CRB1

The angle is 69 when any of the following auto switches are used: D-S99(V), D-T99(V), and D-S9P(V) 3.

CA2

Reed switch Solid state switch 5 V IC circuit Z76 Grommet Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V 12 V Yes Relay, PLC 24 V 2-wire 100 V, 200 V Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V 100 V, 200 V 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2

Speed Controller: Standard Type Series AS In-line Push Locking Type 1

Needle Valve/Flow Characteristics AS3500 Inlet pressure: 0.5 MPa Flow rate (/min (ANR)) Effective area (mm2) Metal handle Resin handle Number of needle rotations JIS Symbol How to Order 02 AS3500 Thread type Material for handle Nil N F Resin Metal Nil 2 Rc NPT G Port size 1/4 3/8 02 03 Caution Be sure to read before handling.

Metering Valve with Silencer Series ASN2 1

Description Material PBT Brass Brass Note) Handle Needle Lock nut Needle guide Washer O-ring Silencer Silencer cover Body B Gasket q w e r t y u i o !