AME

BM51 BM52 BM53 BM54 BM55 BM56 BM57 How to Order AME 250 03 R B Option R INOUT reversal Body size HAl Accessories (Options) 150 250 350 450 550 650 850 1/8 1/4 3/8 1/2 3/4 None B AT With bracket IDl Port size 1/8B 01 02 03 04 06 10 14 20 2B 1 Thread 1/4B AMG 11/2 3/8B Rc(PT) F G(PF) N NPT 1/2B AFF 3/4B 1B AMl 11/2B Symbol Related poroducts AME Note) Refer to p.4.7-7 for "How to Order" case

AMF

AMF850 Symbol BM51 BM52 BM53 BM54 BM55 BM56 BM57 spring washer With cap bolt, AMF Refer to ''Precautions" on p.4.6-33. 4.6-27 Odor Removal Filter Series AMF AMF150 to AMF850 How to Order AMF 250 03 R B Option R IN, OUT reversal Body size Accessories (Optional) 150 1 8 250 1 4 350 3 8 450 1 2 550 3 4 650 1 850 11 2 1 4 3 8 04 1 2 06 10 14 None B With bracket Port size (Dimension B) 01 B 1 8 02

AMG

AFF Port size 3/4B 1/8B 01 02 03 06 10 14 AMl 1B 1/4B Note) Please refer to p.4.7-7 about "How to Order" case assembly. 3/8B 11/2B Related products 2B 20 04 1/2B Option combinations Available Not available D J R AMG150 AMG250 AMG350 AMG450 Applicable model Accessories Options C C D J R Accessories/Optional specification AMG550 AMG650 AMG850 Symbol N.C. auto drain N.O. auto drain Drain guide

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Thread Rc(PT) Table: Accessory/Option combinations Depends on model l Not available Available F G(PF) N NPT Accessories Options C C D -J -R D J T AMH150 R AMH250 AMH350 AMH450 Applicable models Port size Accessories Options AMH550 AMH650 AMH850 B 01 B 06 10 14 1 8 3 4 1B N.C. auto drain N.O. auto drain Drain guide 1/4B IN/OUT reversal -T Element service indicator Accessories 02 03 1 4 3

Stations: 4 Stations, Port Size: 02 (1/4), Thread: N (NPT), S Kit: SEA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Polarity: Positive Common, Option: S (Direct Exhaust)

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 02 (Rc1/4), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: 02 (Rc1/4), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: S (Bracket for w/Flow Adjustment Valve)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: 02 (Rc1/4), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: S (Bracket for w/Flow Adjustment Valve)

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE RUN TEE S/S, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, CX, KQ(X23) 4MM, .02526 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type4R 1/4KGY04-02

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE CONNECTOR S/S, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, JH, KQ(X23) 10MM, .05538 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type10R 1/4KGH10-02

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE ELBOW S/S, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, CG, KQ(X23) 4MM, .04534 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type4R 1/4KGL04-02

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE RUN TEE S/S, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, CX, KQ(X23) 4MM, .04409 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type4R 1/4KGY04-02

3 Port Solenoid Valve

Flow characteristics C[dm3 (s )] 0.034 b 0.019 Cv 0.007 Series V100 5 Port Solenoid Valve 5 Port Solenoid Valve Achieves power consumption of 0.1W/0.35W with use of Series V100 as the pilot valve.

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Indicator light and surge voltage suppressor Coil voltage None With surge voltage suppressor With indicator light and surge voltage suppressor S Z 100V AC(50/60 Hz) 200V AC 110V AC 24V DC 12V DC Others voltages 1 2 3 5 6 Note) Coil voltage 100V AC: With surge voltage suppressor. Note) "YOZ" is not available. 9(1) Note 1) Contact SMC for other voltages.

VY511, VYU5

300 900 285 800 System Silencer: AN200 Tube size (Nylon tube): T1075 (10) Fittings (4 pcs.): DL10-02 P 250 700 200 600 176 Conditions Supply air pressure: 0.5MPa Load ratio: 50% 90 elbow: 4 pcs.

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

How to Order VFN212 02 N 5 F D Z CE marking NAMUR Interface Nil Q CE marked product Voltage Thread type 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz Nil Rc (PT) F G (PF) N NPT Electrical entry Solenoid G Grommet E Grommet terminal T Conduit terminal D DIN terminal Nil Single solenoid D Double solenoid Manual

AP3100

Manually operated type (For high pressure and high flow) Diaphragm Valve for Ultra High Purity Series AP3100 Suitable for UHP gas supply line Body material: 316L SS secondary remelt High pressure type: 20.7 MPa and 9 MPa Designed for bulk specialty gas (BSGS) delivery LOTO standard with AP3157, optional AP3125 How to Order (Inlet) (Outlet) AP31 00 2PW MV8 MV8 S Model Ports Cv 0.7 1.3 1.0

AZ1000

Single Stage Regulator for Ultra High Purity Low to intermediate flow Series AZ1000 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Delivery pressure 1 to

Thermo-chiller

Tap water: Standard of The Japan Refrigeration And Air Conditioning Industry Association (JRA GL-02-1994) Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) 2 q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: CH1 20C/CH2 25C, r Circulating uid ow rate: Rated ow, t Power supply: 200 VAC 3 q Ambient temperature

Series VP300/500/700 Rubber Seal 3 Port/Pilot Poppet Type Body Ported/Single Unit

DC 5 6 24 VDC 12 VDC Port size AC (50/60 Hz) Symbol Port size VP300 1/8 1/4 3/8 1/2 VP500 VP700 1 2 3 4 7 B 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 240 VAC 24 VAC 01 02 03 04 Made to Order Nil Electrical entry Pilot exhaust port with piping thread (M3) specification (Refer to page 24).