Electric Actuator / Slider Type 《 AC Servo Motor 》

Table4-1.

asilltr

1 .30 1.42 1.54 250 1 . 1 2 1 . 1 6 '1.18 1 . 2 1 1.24 1 . 2 7 1.30 1 .33 '1.40 1.46 1.53 1 .59 '1.72 1.84 2.O9 2.22 300 1 .58 1.63 1 .66 1 . 7 0 1 . 7 4 1 .78 1.82 1.86 r.95 2.03 2 . 1 2 2.2\ 2.38 2.55 2.84 3.01 400 3.10 3.16 3.20 3.26 3.32 3.44 3.50 \r.o I 3.73 3.97 4.20 4.44 4.67 5 . 1 9 Weight sw Dtype {rbs) 056 0.099 0.104 0 . 1 1 0 0.1 17 0.1230.1300.1340.141 0.154 0 . 1 6 3o.172 0.185

Process Pump

(Inch) 1/8" x 0.086" 1/8" 1/8" x 1/16" 3/16" 3/16" x 1/8" 1/2" 1/2" x 3/8" 3/8" 3/8" x 1/4" 1/4" 1/4" x 5/32" Refer to Best Pneumatics No. 7 for further details. 13 Series PB Applicable Fluids Material and Fluid Compatibility Check List for Process Pumps The data below is prepared based on data provided by the material manufacturers.

SI unit for DeviceNet TM

No.1 No.2 No.3 No.4 No.5 No.6 1 2 4 8 16 32 0 0 0 0 0 0 0 1 1 0 0 0 0 0 MAC ID 2 0 1 0 0 0 0 62 0 1 1 1 1 1 63 1 1 1 1 1 1 Communication speed setting (switches No. 7 to 8) Set the DeviceNetTM communication speed with a binary code of 125 kbps or 250 kbps or 500 kbps.

80

110 VAC 1.6 D 200 VAC K L M N P Q R S T U V W 1.6 E 230 VAC 2.3 M5 Z Other voltages 3.2 Brass 1.6 2.3 1/8 For other special options, refer to page 462.

Pressure Switch Pressure Switch with T-Spacer Pressure Switch with L-Piping Adapter Pressure Switch with Piping Adapter

Recommended tightening torque Unit: N m Thread size 18 14 38 12 34 1 1 1/4 1 1/2 Torque 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 40 to 42 48 to 50 (4) Do not apply a spanner to the pressure switch body during piping. Otherwise, the product may be damaged. (5) Do not apply torsion or bending moment other than the weight of the product itself.

EXxx-OMV0017-D

software again. 1.

EXxx-OMN0035CN

EX600-DX B M12 (5 )4 8 C M8 (3 )8 8 P PNP C1 M8 (3 )8 8 N NPN D M12 (5 )8 16 E D-sub (25 ) 16 F (32 ) 16 M12 (4 ) EX600-DXB No. 1 LED 2 () 3 4 5 () -17No.EX-OMN0035CN-A EX600-DXC No. 1 LED 2 () 3 4 5 () EX600-DXD No. 1 LED 2 () 3 4 5 () -18No.EX-OMN0035CN-A EX600-DXE No. 1 LED 2 () 3 4 D-sub (No.4-40 UNC) 5 6 () EX600-DXF No. 1 LED

LFE-OMZ0011

Close proximity setting (Normal flow) Pressed for 1 sec. Pressed for 1 sec. Pressed for 1 sec. Pressed for 1 sec. Initial setting Setting1 Setting2 Setting3 Close proximity setting (Reverse flow) Pressed for 1 sec. Pressed for 1 sec. Pressed for 1 sec. Pressed for 1 sec.

Clean Regulator/Fluororesin Type

Body size 1 3 5 Nil X401 Standard Rotating the mounting hole 90 Pilot port thread type Integrated fittings (LQ2) Nil N Rc 1/8 NPT 1/8 Applicable tubing size (O.D. x I.D.)

Power Valve: Economy Valve Series VEX5

N Port 2 (A),1 (P) Port size A Model E F G H I J L M P R T U B C D K N O Q S Port 3 (R) VEX5510 VEX5511 160 50 25 10 7 25 173 80 60 98 Center 1 2 3 4 , , 1 1 2 3 4 60 150 79 70 53 13 18 100 2 x M6 Thread depth 9 116.5 , ,1 25 VEX5710 VEX5711 177.5 167.5 84.5 90 60 30 15 7 190.5 54.5 100 60 13 105.5 103.5 18 4 x M6 Thread depth 6 136.5 17 82 1 4 1 4 1,1 1 c Bracket mounting dimensions g Grommet

Process Valve

2.5 2.6 1 4 1 5.7 5.8 32 Symbol Valve type Type 4.1 4.2 1 2 1 N.C.

IDX-OM-V022

IDX-OM-V022 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 BEFORE USING AIR DRYER. 1-1 1.1.1 Danger, Warning and Caution . 1-1 1.2 HAZARD CLASSIFICATIONS/ HAZARD WARNING LABELS . 1-2 1.2.1 Hazard of Electricity . 1-2 1.2.2 Hazard of Hot Surface . 1-2 1.2.3 Danger of Compressed Air Circuit . 1-2 1.2.4 Positions of Hazard Warning labels . 1-3 1.2.5 Product label . 1-4 1.3 WASTE DISPOSAL

ZSE F/ISE

High Suction Vacuum Work 1 Work 2 Work n Max.A ON point OFF point Min.B Not adsorption Work 1 Work 2 Work n Atmosphere A B 4 A B 4 = A ON point Max.A: Maximum pressure value when workpiece is vacuumed. Min.B: Maximum pressure value when workpiece is not vacuumed.

Compact Vacuum Ejector Series ZA

n x 10 M5 both sides common air pressure supply (P) port P P Note 1) The above dimensions are for ZZA103-00.

4-channel Flow Monitor (Remote type monitor unit)

1.0 to 38.0 2 to 76 8 to 186 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Accumulated Setting/display flow range 0 to 9 ft3 x 10-2 0 to 9 ft3 x 10-1 flow Min. setting/display unit 1 ft3 x 10-3 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x 10-2/

1

6 1/8 1/4 3/8 Internal External Female thread (Rc, NPT) XSA1 1 x 106 1.3 x 109 1.3 x 1011 XSA2 XSA3 Face seal fitting Compression fitting Female thread (Rc, NPT) 1 Normal Close High Vacuum Solenoid Valve XSA Series *1 *1 Excluding grommet/AC How to Order Face seal fitting Compression fitting XSA 2 1 1 2 S 5 G Face seal fitting Compression fitting 1 1 1 P 5 G XSA 2 Female thread type Female

DOC1023126

Therefore, the return to the origin is required.*1 Rotating direction reference *1 In-line:1 In-line:1 1: Normal direction 2: Reverse direction Parallel:2 Parallel:2 Sets the level of followability of acceleration/deceleration. Followability to the acceleration becomes loose as the setting value increases.

3

1 !2 q w e r t y !1 !0 o i u Component Parts No.

PFxx-OMS0001CN

PFMC 7 7 A*8 8 501 5~500L/min 2 102 10~1000L/min 202 20~2000L/min *7 Rc N NPT R F G*1 1ISO228 501 102 202 04 1/2 *7 06 3/4 OUT1 OU2 *5 A NPN NPN M SI*6 B PNP PNP 5 C NPN (1~5V) SI D NPN (4~20mA) 6:L/min:L E*2 PNP (1~5V) F*2 PNP (4~20mA) 1 G*2 NPN *3 M8(3m)*4 H*2 PNP *3 2 3 N M8 *4 / ZS-40-A M8 3 m ZS-42-A PFMC7501/7102 (M352 ) ZS-42-B PFMC7202 (M352 ) -10No.PF-OMS0001CN-A M8 1