Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 3 Stations, A B Port Size: ø4 One-touch Fitting, P R Port Thread: -

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 3 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: NPTF

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 3 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 3 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: NPT

Series AP3500

Select compatible materials of construction for the gas Vacuum to 250 psig (1.7 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) 14 to 160F (10 to 71C) (No freezing) 2.8 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 1) 4 x 10-9 Pam3/sec 1) Ra max 15 in. (0.4 m) Option: 10in.(0.25 m), 7in.(0.18 m), 5in.(0.13 m) Face seal, Tube weld 80 to 100 psig (0.55 to 0.7 MPa) 10-32 UNF thread Side Bottom mount 0.76

VDW Series

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.

2 Phase Stepper Motor/Without Motor Brake Series LXS

E-M5 thread depth 10 6 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch U N x P 20 5 N C 1 0.2 (5.1) 10 5.8

IDX-OM-U022

150 1(ANR)[2065%] 2[32] 3 4 5R IDFA100F150F 6 1 6.1 IDX-OM-U022 6.

VDW

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Valve 10-VQD1000 Dimensions Plug lead unit manifold: 10-VV4QD15Lead wire length 300 mm Indicator light 4 x Rc1/8 (P, R port) 2-4.5 (Mounting hole) 57.5 52.5 51 1(P) 3(R) 1(P) 3(R) 32 16 17 9 10 P=11 10 4 4 36.5 L2 L1 41.5 45 M plug connector (M) D side Stations U side 1 2 3 4 5 n Direct manual override (Non-locking) 2n-C4, M5 (A, B port) C4: 4 One-touch fitting M5: M5 thread 2(B) 2(B) 27.5

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.

Slide Tables MX Series

Bolt used Max. tightening torqueN.m{kgf.cm} l mm Model MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 10.5 12.5 16 21 26 32 1.2{12.2} 1.2{12.2} 2.8{28.6} 5.7{58.1} 5.7{58.1} 10{100} M3 x 0.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 3. Top body tapped A hand can be caught by an adjuster option.

SFOD-OMT0009CN

No.SFOD-OMT0009CN-B LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 [mm/s] 500 500 410 340 250 200 170 [mm/s] 30 20 10 () [mm/s] 49 33 17 () 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 [mm/s] 400 200 400 200 400 200 [mm/s] 20 10 20 10 20 10 () [mm/s] 25 13 27 14 30 15 () 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 [mm/s] 300 250

3 Port Solenoid Valve Rubber Seal Series SY100 1

Other dimensions are same as grommet type. 4-3-9 10 Series SY100 Manifold Specifications Manifold Specifications Type 30 (3) Type 31 Type S41 Model Single base/B mount Manifold Common SUP/Common EXH P(SUP)/R(EXH) 2 to 20 stations 2 to 10 stations Valve stations Valve Base Position A port porting specifications Top Side Direction M5 x 0.8 P, R ports Port size M3 x 0.5 A port M3 x 0.5, M5 x

NAMUR

A 24 VK M5 thread 8 deep, with or without insert depending on base material. VZ 32 VF A' VFR Coding stud. M5 x 10 DIN913-45H VP4 12 2 8 VZS G 1/4 DIN/ISO228/1 M5 Drive flange face VFS VS4 19.5 5.5 Solenoid valve flange face O-ring 16 x 2 VQ7 1.5 3 EVS VFN The solenoid valve can be attached with 2 mounting bolts.

LEF-OM002xx

10 to 300 701800 Note2) Stroke 30 to 930 20 to 620 10 to 300 801900 Speed range [mm/s] 30 to 780 20 to 520 10 to 250 9011000 30 to 660 20 to 440 10 to 220 10011100 Actuator specification 30 to 570 20 to 380 10 to 190 11011200 20 to 500 30 to 500 10 to 250 1000 Driver type LECPA Note2) Stroke 30 to 500 20 to 440 10 to 220 Speed 10011100 range [mm/s] 30 to 500 20 to 380 10 to 190 11011200

MHx-OMU0057

6 MHZ2-16 M40.7 1.6 4.5 MHZ2-20 M50.8 3.3 8 L L MHZ2-25 M61 5.9 10 MHZ2-32 M61 5.9 10 MHZ2-40 M81.25 13.7 13 Nm Lmm MHZ2-10 M30.5 0.69 5 MHZ2-16 M40.7 2.1 8 MHZ2-20 M50.8 4.3 10 MHZ2-25 M61 7.3 12 MHZ2-32 M61 7.9 13 MHZ2-40 M81.25 17.7 16 Nm MHZ2-10 M2.50.45 0.49 MHZ2-16 M30.5 0.88 MHZ2-20 M40.7 2.1 MHZ2-25 M50.8 4.3 MHZ2-32 M50.8 4.3 MHZ2-40 M61 7.3 D-Y59 D-Y69 D-Y7P 7 - 1. 2. 1.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

High Rigidity and High Precision Slider Type LEKFS Series LEKFS25, 32, 40 How to Order w y e r t u i q LEKFS 32 E A 300 R1 CD17T q Size w Motor mounting position e Motor type r Lead [mm] 25 32 40 Nil In-line R Right side parallel L Left side parallel Symbol LEKFS25 LEKFS32 LEKFS40 H 20 24 30 A 12 16 20 B 6 8 10 E Battery-less absolute (Step motor 24 VDC) y Motor option t Stroke*1 u Actuator

Smooth Cylinder Series CQSY

5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke. 3

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

17.4H9 10.8 19 M3 x 0.5 29.5 6.5 M4 x 0.7 4.5 M4 x 0.7 8 3.4 3H9 3 1.5 M4 x 0.7 8 MHZ2-20D 22.4H9 12 23 M4 x 0.7 39.8 8.3 M5 x 0.8 8 M5 x 0.8 10 4.3 4H9 4 2 M5 x 0.8 10 MHZ2-25D 13 37 49.7 10.8 M6 x 1 10 M6 x 1 12 5.1 4H9 4 27.4H9 3 M6 x 1 12 M5 x 0.8 AM AL AN AP AQ AR AS AT AU AV AW AX AY AZ Model 1122112211221122+2.2 0 +0.5 +0.1 +0.5 +0.1 +0.5 +0.1 +0.5 +0.1 +0.5 0.2 +0.5 0.2 +0.5 0.2 +