10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)
10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%
( C)(MPa)(A)(kg)HRZ010-W2SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RHClear water, Deionozed water10 to 609(at 20 C)2.5 (at 20 C)?
Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Valve Stations: 10 Stations, P,E Port Location: D Side, SUP/EXH Block: Internal Pilot, A,B Port Size: C4 (ø4 One-touch Fitting), Mounting: A (DIN Rail Mounting, Name Plate w/Station Number), DIN Rail Option: 11 (Longer than Standard DIN Rail)
Model: 10 (Side Ported), Number of Cores - Lead Wires: L1 (34 Cores), Lead Wire Length: 2 (1.5m), Valve Stations: 10 Stations, P, E Port Locations: U (U Side), SUP/EXH Block: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: A (DIN Rail Mounting, Name Plate w/Station Number), DIN Rail Option: 11 (Longer than Standard DIN Rail)
Model: 11 (Bottom Ported), Connector Type: F (D-sub Connector, IP40, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P,E Port Location: D (D Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: N7 (ø1/4" One-touch Fitting)
Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A,B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 11 (Longer than Standard DIN Rail)
Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 10 (1), Output Specification: G (OUT1: NPN; OUT2: External Input), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)
Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 10 (1), Output Specification: C (OUT1: NPN; OUT2: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)
Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 10 (1), Output Specification/Temperature Sensor: CT (Out 1: NPN; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: G (Instantaneous Flow: gal/min, Accumulated Flow: gal.
SMC Actuators: 6 SMC Actuators: Copper-free Rotary Actuators Size: 1, 3, 7, 10, 20, 30, 50, 70, 100, 200 Size (Torque) Rotary Actuators Series Application Standard Copper-free 1 3 7 10 20 30 50 70 100 200 Series variations Rotary table Series MSU Basic type MSU With auto switch MDSU Rotary table Series MSQ 20-MSQ Basic type (Adjusting bolt type) 20-MSQA High precision type (Adjusting bolt type) 20-MSQR
Grease pack part no.: GR-S-010 (10 g) 13 A
Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 10 (1), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Units on Label: G (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C)
Connector Mounting Position: D Side 2~10 Stations, Stations: 3 Stations, SUP/EXH Block Mounting: 2~10 Stations: One Side, 11~20 Stations: Both Sides, Port Size: ø8 One-touch Fitting
Connector Mounting Position: D Side 2~10 Stations, Stations: 4 Stations, SUP/EXH Block Mounting: 2~10 Stations: One Side, 11~20 Stations: Both Sides, Port Size: ø8 One-touch Fitting
Connector Mounting Position: D Side 2~10 Stations, Stations: 6 Stations, SUP/EXH Block Mounting: 2~10 Stations: One Side, 11~20 Stations: Both Sides, Port Size: ø8 One-touch Fitting
Connector Mounting Position: D Side 2~10 Stations, Stations: 7 Stations, SUP/EXH Block Mounting: 2~10 Stations: One Side, 11~20 Stations: Both Sides, Port Size: ø6 One-touch Fitting
Connector Mounting Position: D Side 2~10 Stations, Stations: 8 Stations, SUP/EXH Block Mounting: 2~10 Stations: One Side, 11~20 Stations: Both Sides, Port Size: ø6 One-touch Fitting
Connector Mounting Position: U Side 2~10 Stations, Stations: 3 Stations, SUP/EXH Block Mounting: 2~10 Stations: One Side, 11~20 Stations: Both Sides, Port Size: ø8 One-touch Fitting
Connector Mounting Position: U Side 2~10 Stations, Stations: 5 Stations, SUP/EXH Block Mounting: 2~10 Stations: One Side, 11~20 Stations: Both Sides, Port Size: ø8 One-touch Fitting