Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: C [1 NPN Outputs + Analog (1 to 5 V)], Unit Specification: Fixed SI Unit, Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: E [1 PNP Outputs + Analog (1 to 5 V)], Unit Specification: Fixed SI Unit, Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: D [1 NPN Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: 1 PNP Outputs + External Input, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: 2 PNP Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

AFF

(Element life check) Max. contact capacity: 10 VA AC, 10 W DC Rated contact voltage (max. operating current): 125 V AC (0.08 A), 30 V DC (0.33 A) Max. contact capacity: 10 W DC Rated contact voltage (max. operating current): 30 V DC (0.33 A) Pressure drop 0.1 MPa Symbol V: Degreasing wash, white vaseline Reed switch Reed switch Body/housing is degreasing washed.

AL800/900

(Example) 23-R Nil N F Option Combinations Available Not available Accessary, Option Option Symbol 1 1S-1 1S-2 2 3 6 8 R -1 -1S-1 -1S-2 -2 -3 -6 -8 -R 1000 cm3 tank 1000 cm3 (With switch) Bottom limit ON 1000 cm3 (With switch) Bottom limit OFF Metal bowl Lubricator with drain cock Nylon bowl Metal bowl with level gauge Flow direction: Right Left Note) -1, -1S-1 and -1S-2 are with metal bowl

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

R.

SYJ300

For type R, U, DC voltage is only available. Power saving circuit is only available in the "Z" type. DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Bracket Nil: Without bracket F: With bracket AC (50/60 Hz) 3 port 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] For type W, DC voltage is only available.

VM100F

Construction Side ported Bottom ported t y w u q q w u y t 3(R) (3-port only) 3(R) (3-port only) Non-actuated Non-actuated !4 i !0 2(A) 1(P) r o e !3 !1 !2 !3 e o r !0 i !1 !2 2(A) 1(P) Actuated Actuated 2(A) 1(P) 2(A) 1(P) Component Parts No. Description Material Note 1 Valve PBT 2 Valve sheet A PBT 3 Valve sheet B PBT 4 Valve sheet C PBT No.

SY3000-OMH0002

(N.O.)3 8 No.SY3000-OMH0002 SY series .3.23.7mm ( ( (1mm) (R) (U) DC24V 12V 1/4 DC24V 62ms L M () (S) 0.5V (Z) () 9 No.SY3000-OMH0002 SY series DIN W 1 3WA +4-3 (DS) (Z) DIN M8 ( ) DC24V 12V 1V WA (FU) +COM (S) (Z) (R) (U) (SS5Y(3,5)-45)-COM (SS5Y(3,5)-45N) 4 (WA ) (S 3( WA ) L M (GZ, LZ, LOZ, MZ, MOZ) 4 (WA ) 3( WA ) DIN (DZ, YZ) 4 WA 3 WA 4 (WA

Clean Room Regulator/Fluoro Resin Type Series SRF30

Construction Tubing Integral fittings e y t e t i r y !6 r u i u q o q !0 o !1 !0 w !1 !2 w !2 Parts list !3 No.

Large Flow Lubricator AL800/900 Series

(Example) 23-R Semi-standard Combinations Available Not available Accessory, Semi-standard Option Symbol 1 1S-1 1S-2 2 3 6 8 R -1 -1S-1 -1S-2 -2 -3 -6 -8 -R 1000 cm3 tank 1000 cm3 (With switch) Bottom limit ON 1000 cm3 (With switch) Bottom limit OFF Metal bowl Lubricator with drain cock Nylon bowl Metal bowl with level gauge Flow direction: Right to left Note) -1, -1S-1 and -1S-2 are with

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Center of F.R.L. body A D Silencer Compact resin type High noise reduction type B B A A Dimensions [mm] Model Port size R Dimensions [mm] A B AN302-03 3/8 84 28 AN402-04 1/2 95 34 Model Port size R A B AN30-03 3/8 58.5 20 AN40-04 1/2 68 24 3 Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve VP500/700 Series Dimensions VP517 Surge voltage suppressor (for D YS, D YZ) Manual

AMF

Description AFF SGP-E: SS400 Filter case w Cover q Element SS400 AM Replacement Parts Misc. Model AMF800 AMF801 AMF900 AMF901 AMF1000 No. Description Material NBR 63271 63271 63271 3 pcs. 63271 3 pcs. 63271 5 pcs. Element r Packing e 63148 63148 63148 3 pcs. 63148 3 pcs. 63148 5 pcs. Drain NBR O.D. 112 x I.D.90 x T3 1 pc. O.D.112 x I.D.90 O.D.112 x I.D.90 x T3 3 pcs.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Indicator light (AC) When solenoid gets energized, indicator light illuminates, thus electrical states of the solenoid can be seen from the outside. 51 VA (64 VA ) 50 Hz Inrush Apparent power (VA) (Power consumption (W)) 45 VA (55 VA ) 60 Hz AC 17 VA (5.3/5.5 W) 50 Hz Holding 11 VA (2.9/3.2 W) 60 Hz 5.5 DC Power consumption (W) In the case of 3 position type.

Compact Vacuum Ejector Series ZA

Pilot valve symbol 1 2 3 4 5 6 100 AC 200 AC 110 AC 220 AC 24 DC 12 DC Nil Y Nil Y Nil Nil Nil Nil K1 K1 J1 J1 Q1 Q2 N1 N2 q w e r t y u i Combinations (1) to (8) in the above table are the only possible options. 850 Compact Vacuum Ejector Series ZA How to Order 08 ZZA1 3 P Manifold Right common air pressure supply (P) port (viewed from the vacuum (V) port side) ZA Number of stations 01

VDW Series

Leakage voltage Particularly when using a resistor in parallel with a switching element and using a C-R element (surge voltage suppressor) to protect the switching element, take note that leakage current will flow through the resistor and C-R element, etc., creating a danger that the valve may not shut OFF.