Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Top Direction, Stations: 10 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: ø8 One-touch Fitting, Mounting Method: -

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Side Direction, Stations: 10 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: ø8 One-touch Fitting, Mounting Method: -

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Side Direction, Stations: 10 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 3/8" One-touch Fitting, Mounting Method: -

Stations: 10 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 3/8" One-touch Fitting, Mounting Method: -

Stations: 10 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: ø6 One-touch Fitting, Mounting Method: -

Stations: 10 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: ø8 One-touch Fitting, Mounting Method: -

SI Unit: EtherNet/IP, Input Block Stations: None, Input Block COM: +COM, Stations: 10 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 5/16" One-touch Fitting, Mounting Method: DIN Rail Mount w/o DIN Rail, US Option: -

SI Unit: ZEN (EtherNet/IP), Input Block Stations: None, Input Block COM: +COM, Stations: 10 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N9 (5/16" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)

VQZ1000/2000/3000

part number consists of 10 units.

Vacuum Unit

6 p. 31 3 30 m ZK2 SC3 4 A Body gasket1 (10 pcs. per set) Construction !1 p. 31 Applicable nozzle size ZK2 BG5 A 4 For nozzle size 07, 10 6 For nozzle size 12, 15 1 Applicable type Release lever (10 pcs. per set) Construction !

VQ4000

SOL.B SOL.A 10 10 () (+) White Black SOL.A Double wiring (connected to SOL. A and SOL. B) is adopted for the internal wiring of each station, regardless of valve and option types. Mixed single and double wiring is available as an option. For details, refer to below.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

] Approx. 300 (Lead wire length) 98.6[103] 79 [83.4] R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 96.8 28 28 69 28 82 14 14 14 5 5 5 Refer to the page 91 for dimentions with connector cable. 9 Series SYJ3000 3 Position Closed Center/Exhaust Center/Pressure Center [ ]: AC 3 4 5 G H Grommet (G), (H): SYJ3 40-M5 M5 x 0.8 (A, B port) 10 5 10 2-3.2 (For mounting) 15.3 32 22 3 2.5 Manual override

CLA

l~ length 01 thread wnhoul boot With boot --l ~ 40 500 20-500 27 30 60 96 V. y, 44 16 32 10 85 15 26 54 10 10 M8X1.25 100 -750 20750 37 40 11 6 140 V. y, 92 30 52 14 124 21 31 76 25 19 M1 2Xl .75 50 600 20-600 32 35 70 108 Yo V. 52 20 40 10 95 17 27 59 13 12 M 8X 1. 25 63 -600 20-600 32 35 86 11 5 'I, 'I, 64 20 40 10 102 17 26 67 18 15 Ml 0Xl .25 80 750 20750 37 40 102 129 'I.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Single AXT66114A Lead wire length 300mm 600mm 1000mm 2000mm 3000mm VQZ1000 VQZ1000-GS-5 VK AXT66113A Latching VQZ2000 VQZ2000-GS-5 6 10 20 30 DC (-COM) VQZ3000 VQZ3000-GS-5 VZ AXT66113AN Latching Note ) Above part number consists of 10 units. Each unit has one gasket and two screws. Orders are accepted in 10 units.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

39

CKZ-50A013 CKZ-50A014 CKZ-50A015 NAAMS code ACA221M ACA222M ACA223M 55.0 85.0 115.0 50 mm Offset-Machined 50 mm Offset-Machined A A B B C C 6H6 through +0.008 0 8F7 through +0.028 +0.013 D D E E F F 200.03 200.03 10 G G 10 300.025 300.025 300.025 300.025 9 through 11 through H H I I J J 250.05 250.05 45 45 M6 x 1.0 M6x 1.0 750.05 750.05 R25 R25 6.5 6.5 10 10 1 1 1 1 R25 R25 18 18 19 19 19

ARM10/11

ARM 2500 05 A 02 G1 AV AU Accessory None (With plug) Nil G1 G2 Regulator for manifold AF G33-10-01 GA33-10-01 AR Pressure gauges are shipped together (but not assembled).

ARM10/11

ARM 2500 05 A 02 G1 AV AU Accessory None (With plug) Nil G1 G2 Regulator for manifold AF G33-10-01 GA33-10-01 AR Pressure gauges are shipped together (but not assembled).

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

10 units.

3 Port Solenoid Valve Series SYJ300/500/700

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.