RQ

94 11 17.5 Rc 3/8 40 to 100 Q RB S U Z Bore size (mm) 63 80 100 34 10.5 93 47.5 19 39 13.5 112.5 57.5 26 43 13.5 132.5 67.5 26 Refer to page 7-7-14 for details on rod end nut and accessories.

CEx-OMQ0011

100 100 50 50 0 0 0 5 m/s m/s 19 4-3.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ5140-01 Cylinder is in extending.

Integrated Controller

Reference value for settling time: 0.15 s or less The following value is used for this calculation. T4 = 0.15 [s] Calculation example) T1 to T4 can be calculated as follows. T1 = V/a1 = 100/5000 = 0.02 [s], T3 = V/a2 = 100/5000 = 0.02 [s] T2 = = = 1.98 [s] L 0.5 V (T1 + T3) V 200 0.5 100 (0.02 + 0.02) 100 T4 = 0.15 [s] The cycle time can be found as follows.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

200 300 400 500 1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s MY2C MY2 H/HT Maximum Load Mass Select the load mass from within the range of limits shown in the graphs.

Speed Controller with One-touch Fitting

A 3.2 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS221F-01-04(S)A 4 8.2 AS221F-01-06(S)A 6 10.4 10 (9) AS221F-01-08(S)A 8 13.2 22.4 29.5 14.2 11 (10) AS221F-01-10(S)A 10 15.9 25.3 32.4 15.6 12 (11) AS221F-02-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2 23.9

OMR0031

Speed Vc Acceleration Aa Speed [mm/s] Total travel distance S Time [s] Positioning time Tp LAT3LAT3MLAT3FShortest positioning time [ms] 600 350 700 Shortest positioning time [ms] Shortest positioning time [ms] Load weight1000g Load weight1000g Load weight1000g 300 600 [ms] 500 [ms] [ms] 700g 700g 700g 250 500 400 500g 500g 500g 200 400 300 150 300 200 100 200 300g 300g 300g 100 100g 100g

ZQ-OM01401

-*ZQ000MA-K25L-*ZQ000MA-J15L-FPD ZZQ1A-ROC *ZQ000MA-K15L---S *ZQ000MA-K25L---S EA EB FA FB EC EE FC FE *ZQ3MAK1 5L--S *ZQ3MAK2 5LK--S EA EB FA FB EC EE FC FE *ZQ000MAJ1 5LF *ZQ000MAK1 5L*ZQ000MAK2 5LEA EB FA FB EC EE FC FE *ZQ000MAK1 5L--S *ZQ000MAK2 5L--S 36 - No.ZQ-OM01401-B 11. ,,, 11.1 / ZQ05A 0.35MPa -100 30 -100 -80 25 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 20 -60 -60 15

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS25-10 S SS ZZ Z 10 94 118 30 20 104 128 40 30 114 138 40 40 124 148 40 21-/2210-/11-/12CXS25-20 CXS25-30 CXS25-40 CXS25-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 134 158 60 21-/2210-/11-/12100 184 208 80 CXS25-75 CXS25-100 21-/2210-/11-/1275 159 183 60 21-/2210-/11-/12858 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS32, CXSL32 10-/11221221S ZZ SS 38 16 14 2

Air Fittings & Tubing

KQ2U23-M5 38 34.5 2.2 2.2 9 M5 X 0.8 10 9.6 41 44 9.6 15.5 37 38 14 3.4 2.9 3.2 1 8 KQ2U23-01S KQ2U23-02S 11 14 1 4 39.5 KQ2U04-M5 M5 X 0.8 M6 X 1.0 4 2.2 2.2 Kl KQ2U04-M6 40 36 10 11 10.4 16 4 10.4 1 8 42 38 KQ2U04-01S 4.2 4.2 11 Ml 1 4 KQ2U04-02S 46 40 20 14 42.5 KQ2U06-M5 M5 X 0.8 M6 X 1.0 2.2 2.2 12 KQ2U06-M6 43 39 13 Hl 1 8 12.8 45.5 41.5 KQ2U06-01S 12.8 11 17 6 1 4 49 43 17

SZ3000

Weight (g) 17.6 19.9 24.4 28.9 33.4 37.9 22.1 26.6 31.1 35.6 10 11 12 13 14 15 16 17 18 19 No. Terminal no.

AC Servo Motor Driver (SSCNET /H Type)

The following shows about this parameter and connectable driver (setting value of [Pr.100] Servo serise). Setting value of [Pr.97] SSCNET setting Driver Setting value of [Pr.100] Servo series 0 SSCNET LECSS-S 1MR-J3-B 1 SSCNET/H LECSS2-T 32MR-J4-B Pr.100 Servo series Be sure to set up servo driver. Communication with servo driver is not started by the initial value 0 in default value.

MLU

Allowable Kinetic Energy Extension locking direction Retraction locking direction 100 100 50 50 Load weight kg Load weight kg 10 10 50 W 50 5 5 40 40 B 32 32 0.5MPa 0.4MPa 0.5MPa 0.4MPa A A 25 25 1 1 100 500 100 500 B W Maximum speed mm/s Maximum speed mm/s B: Retraction locking direction F: Extension locking direction 9-13-4 4 Series MLU Specific Product Precautions 2 Be sure to read before

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

.: S-LINK (16 outputs) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (8 outputs) DeviceNet OMRON Corp.: CompoBus/S (16 outputs) OMRON Corp.: CompoBus/S (8 outputs) CC-Link 377 Series 10-SZ3000 5 Port Solenoid Valve Plug-in Type [Option] An order cannot be placed with only the manifold part no.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

gas under vacuum Operating temperature C 5 to 60 (High temperature type: 5 to 150) Atmospheric pressure to 1 x 10-6 Operating pressure Pa Main exhaust valve 14 45 80 160 200 Conductance l/s Note 1) Initial exhaust valve 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 1.3 x 10-10{1 x 10-10} at ambient temperatures, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient

SZ3000

Double wiring specification Symbol D Mounting position 11 12 10 11 10 stations 11 stations D Side 11 stations 12 stations Specified layout Note 2) Specified layout (up to 22 solenoids possible) ... ... ... ...

AC Servo Motor Driver (SSCNET Type)

Configuration Minimum equipment and wiring requirements to get started Provided 1 Ex) 200 V AC (*1) by customer 5 6 Provided 1 by customer 7 2 3 (-) PC 1 2 (+) 8 4 C D 11 21 9 11 U 2 Electric Actuators Ex) LEF V W 3 Provided by customer 10 (Positioning unit/Motion controller) (*1)Refer to LECSS Operation Manual, Chapter 3 if the power supply voltage is 100VAC. 1 Driver LECSS*-S* 2 Motor cable

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

JIS symbol 5 Port 4 Port Fluid Specifications Air 22~100 (0.15~0.7) 15~100 (0.1~0.7) 22~100 (0.15~0.7) 2 Position single 2 Position single 2 Position single 2 Position double 3 Position 2 Position single 2 Position double 3 Position A B A B Operating pressure range PSI (MPa) P R R P R Operating pressure to 100 (Operating pressure to 0.7) 15~100 (0.1 to 0.7) 22~100 (0.15 to 0.7) Max.140 Not

LJ1H

8kg 10kg Speed (mm/s) Speed (mm/s) 250 250 LJ1H10 Model Mounting orientation 10kg 200 200 Load movement direction 150 150 600 100 100 400 L1 (mm) a = 1000 Pitching Yawing Vertical Vertical 50 50 m a a = 2000 200 a = 3000 0 100 200 300 400 500 0 100 200 300 400 500 L1 Mep Stroke (mm) Stroke (mm) 0 2 4 6 8 10 When an actuator is operated under conditions that exceed the lines in the graphs

Stopper Cylinder

13 7 9 11.5 12 17 11.5 12 17 9 9 13 13 9 9 9.5 10 15 17.5 18 23 15 7 11 19 7 15 12 12.5 17.5 18 18.5 23.5 15.5 9.5 16.5 10.5 15 21 11 17 12 12.5 17.5 22.5 23 28 20 9.5 21 10.5 15 25.5 11 21.5 5.5 6 11 30.5 31 36 28 3 29 4 8.5 33.5 4.5 29.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.