3

VXS VXS VXB VXE (3) Formula for flow rate When P2 + 0.1 0.5, choked flow P1 + 0.1 293 Q = 120 x S (P1 + 0.1) (3) 273 + T When P2 + 0.1 > 0.5, subsonic flow P1 + 0.1 293 Q = 240 x S (P2 + 0.1) (P1 P2) (4) 273 + T Conversion with sonic conductance C: VXP VXR VXH VXF VX3 VXA S = 5.0 x C(5) Q : Air flow rate[L/min(ANR)] S : Effective area [mm2] P1 : Upstream pressure [MPa] P2 : Downstream

MK

Model MKB12-llN MKB16-llN 18.5 M3 X 0.5 4 20 29 8 8 21.5 M4 X 0.7 5 25 36 11 11 20, 25 Both ends tapped/MKA U S R K L Oh9 Q F E C B Model MKB20 MKB20 A 0 0.052 0 0.052 0.15 0.15 4 31 62 72.5 24.5 48 36 46.8 36 13.5 0.15 0.15 7.5 20 5 32 63 73.5 27.5 53.8 40 52 40 16 8 23 Note 1) Above figure is for D-A73, A80.

AC Servo Motor Driver (CC-Link Type)

Example using a 20[mm] Lead Actuator with target travel speed of 500[mm/sec] Rotations per second Travel distance per second Travel distance per rotation Rotation Speed (rpm) = {Speed (mm/s) Lead (mm) }60 (S) = {500 (mm/s) 20 (mm) }60 (s) =1500 (rpm) The rotation speed must be a value between 0 and the allowable actuator speed. The actuator will not operate if set to 0.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

Compact Cylinder with Solenoid Valve/

50 to 300 mm/s Piston speed 1.

7.4

Symbol Length Nil 150 mm 3 300 mm 6 600 mm 10 1000 mm Base Mounted Part no. Type S0700-S-M5 For internal pilot S0700-S-M5-R For external pilot Note) Standard wire length of valve with plug connector is 300 mm. When ordering a lead wire length of 600 mm or longer, list the part numbers for the valve without connector and the connector assembly.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load mass kg Load mass kg m s m s Type of impact s m 1 m 2 Kinetic energy E1 Thrust energy E2 Fs Fs + mgs Fs mgs Absorbed energy E E + E Symbols : Speed of impacting object (m/s) m: Mass of impacting object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8m/s) s: Shock absorber stroke (m) Note) The speed of the impacting object is measured at the time of impact with the

ML1

W: Weight (kg) F: Load (N) FE: Load equivalent to impact (N) a: Average speed (mm/s) M: Static moment (Nm) : Collision speed (mm/s) L1: Distance to center of load gravity (m) ME: Dynamic moment (Nm) g: Gravitational acceleration (9.8m/s2) 1.4 100 =1.4 a(mm/s) FE= agW (4) 1 3 ME= FEL1=0.05aWL1(Nm) Note 4) Average load ratio (This is for averaging Max. load moment when stopper collides in case

ML2B

0.2 0.2 0.5 ML2B25 ML2B25 ML2B25 ML2B25 ML2B25 ML2B25 0.1 0.1 0.1 100 200 300 400 500 1000 1500 100 200 300400500 10001500 100 200 300400500 10001500 RS Q G YES Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) YES This system cannot be used because its learning function will not operate properly and the stopping accuracy will be worsen.

ML2B

0.2 0.2 0.5 ML2B25 ML2B25 ML2B25 ML2B25 ML2B25 ML2B25 0.1 0.1 0.1 100 200 300 400 500 1000 1500 100 200 300400500 10001500 100 200 300400500 10001500 RS Q G YES Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) YES This system cannot be used because its learning function will not operate properly and the stopping accuracy will be worsen.

Ejector Valve Unit Series ZYY/ZYX 1

Note 2) V, S and R specifications are 45T, 45T1.

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

Dimensions/40 to 100 Basic/CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10

Digital Flow Switch Series PFA For Air Series PFW For Water

PFA703H--28 PFA703H--68 PFA706H--28 PFA706H--68 PFA703H--29 PFA703H--69 PFA706H--29 PFA706H--69 3000 3000 150 150 6000 6000 300 300 PFA712H--28 PFA712H--68 PFA712H--29 PFA712H--69 12000 12000 600 600 19

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

amount (10 6 Pam 3/s) of V, M options are values when differential pressure is 0.1 MPa.

PSxx-OMU0008CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -21No.PS-OMU0008CN-D ZSE20C(F)/ISE20C(H)-S/-R () NPN 2 DC(+) Max.28 V80 mA 1 V R15 V OUT1 1 k S420 mA OUT2 12 V 300 24 V 600 DC(-) 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -22No.PS-OMU0008CN-D -V/-T () PNP 2 DC(+) Max.80 mA 1 V T15 V OUT1 1 k V420 mA OUT2

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

25

150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 100 100 0.5 s 0.5 s 150 150 1 s 1 s 200 200 2 s 250 250 2 s 5 s 5 s 300 300 421 IZS40/41/42 Series Note) Static neutralization features are based on the data using the charged plate (size: 150 mm x 150 mm, capacitance: 20 pF) as defined in the U.S.

Process Pump

With nut PAF341 S S 13 0 1 X68 Fitting type Fitting type Products using stainless steel parts (Body tightening bolts, switching valves, etc.)

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

':.: -: "' ,t*11*t3.s.&1*fi::{{'i: r:l:i, i:ar&i1 f i!.-r ..,;.;:li.i..i.i;t,l.il i.ii=i i i=i li,i !;;r,i:i l,t,t.t,::,:,,.4 a',::r:t:,. . *,,t;,,-:,i,:li=:3;d*:a*,,r.i,i t.i-i+,,i=r.t.r,,..r,r:,:t:*,:t:t i.3.li!i.i*i*!!i.:g.*1ii1*,ii1r,.:.'' 4.5 Ports Solenoid Valve NVZ1000/3000/5000 NVZl000 o o ; NVZ3000 (Body ported type Cvo.2) NVZ5000 ::.:l L r r s L I 5 l r ' ' . .