Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

coefficient Allowable moment coefficient 0.7 0.7 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 50 100 200 300 500 700 Average speed Va mm/s 50 100 200 300 500 700 Average speed Va mm/s Collision speed V mm/s Note) Use average speed to calculate static moment.

IDU/IDF

Grommet with waist Power cord outlet Grommet with waist 6 to 12 B A B C C A A 240 240 65 65 30 30 30 30 C 70 70 40 40 50 50 50 50 A 240 240 30 30 50 50 50 50 B 38 38 32 32 45 45 45 45 Model IDU6D IDU8D IDU11C IDU15C IDU22C1 IDU37C1 IDU55C IDU75C B 38 38 50 50 45 45 45 45 C 70 70 49 49 50 50 50 50 Model IDF6D IDF8D IDF11C IDF15C IDF22C1 IDF37C1 IDF55C IDF75C Transformer box (1795) Power cord

Compact Type Dual-Rod Cylinder Series CXSJ

(mm) Overhang L (mm) Graph V = up to 800 mm/s (up to 700 mm/s for 15, 20) 4 CXSJM CXSJL Graph V = up to 600 mm/s 3 CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15, 20. 4 Series CXSJ Horizontal Mounting V = up to 400 mm/s V= = up to 800 mm/s V = up to 400 mm/s V= =

7

S CAC408 50 50A Flange R 230 VAC G N.O.

48

stroke A C D FA FB G GA GB H J JC K L MM ML NN 50 (40 x 2) 25, 50, 100, 150, 200 63 43.5 18 15.5 4 51 20.5 12.5 148 25.5 9 25.5 37 M8 x 1.25 20 M8 x 1.25 63 (45 x 2) 67.5 48 20 15.5 4 56 24.5 13.5 162 28 11 28 40 M10 x 1.5 25 M8 x 1.25 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TF TN 50 (40 x 2) 6.7 11 6 Rc1/8 NPT1/8 G1/8 18 27 27 30 24 54 39 119 91 135 18.1 40

HRX-OM-S004

Table 7-1 Quality criteria for clean water (tap water) Standard value Item Unit For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

1.63

= 400 mm/s (20) L = 100 mm, V = 400 mm/s 100 100 63 63 50 50, 63 50, 63 50 10 10 40 40 Load mass m (kg) Load mass m (kg) 40 40 32 32 32 32 25 25 25 25 20 20 20 20 1 1 0.1 0.1 10 100 50 51 200 10 100 50 51 200 Stroke (mm) Stroke (mm) 508 Model Selection MGPW Series L L m m Horizontal Mounting Ball bushing MGPWL20 to 25, MGPWA20 to 25 (21) L = 50 mm, V = 200 mm/s or less (22) L = 100 mm, V

MHZ2/MHZJ2

50 Pressure 0.2MPa Pressure 0.2MPa 40 H Overhang H mm Overhang H mm 40 30 0.6MPa, 0.7MPa 30 0.3MPa Gripping point 0.3MPa 0.4MPa L 20 0.4MPa 0.5MPa 0.5MPa 20 0.6MPa, 0.7MPa 10 10 MHZJ2/With dust cover 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L mm Gripping point L mm H MHZ 2-16 MHZ 2-16 60 60 Pressure 0.2MPa 50 50 Gripping point Pressure 0.2MPa L Overhang H mm Overhang H mm 40 40 0.3MPa

39

(mm) Bore size (mm) B C D E GA GC I J K L LA LB MM GB N NA NB NC NN P 50 63 92 48 12 13.7 95 166 10 12 55 376.6 155.5 78.4 M10 x 1.5 19 13 36.5 9.5 M8 x 1.25 10 95.5 110 54 12 16.6 99 10 12 55 391.6 161 78 M10 x 1.5 22 13 36.5 15 M8 x 1.25 10 171.5 100.5 Bore size (mm) PA PB PC PD R RB RR S V VA VB VC VD RA VE VF W XA XB XC 104.5 50 63 50 45 10 55 46 68 46 48 11 8 30 32 63.5 71.5 12 3.5 78.4

CE2

25 to 700 45 30 10 10 10 54 32 26 11 22 20 44 16 11 15 6 27 71.5 60 42 22 21 150.5 8 M8 x 1.25 25 to 800 25 to 650 50 35 12 13 10 59 40 27 11 27 21 52 20 10 17 9 32 80.5 70 46 24 28.5 162.5 11 M8 x 1.25 25 to 800 25 to 650 60 35 15 18 10 67 40 26 27 23 64 20 13 17 9 32 98.5 85 48.5 24 28.5 174 11 M10 x 1.25 13.5 25 to 750 25 to 600 70 40 17 23 14 72 52 30 32 23 78 25 15 21 11 37 117.5 102

IDX-OM-W011

M 11 M IDF4E/6E/8E/11E/15E1 11-1 ( ) 11-2 ADM200 IDF4E15E1-10-M IDF4E15E1-20-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50/60Hz) 4W IDF Series 11-1 11 1 IDX-OM-W011 11 M 11-3 Rc1/2 32 25 1) 2830Nm 30 (5) (17)(30) 2 2 Rc1/2 11-4 1-1 IDF Series 11-3 11 2 IDX-OM-W011 12 R 12 R IDF4E/6E/8E/11E/15E1 12-1 12-2 1 AC100V AC200V INOUT IDF4E

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MY1 3.4-11 End Lock Cylinder Series CBA1 40, 50, 63, 80, 100 How to Order L 50 150 H N CBA1 Standard L 50 150 A53 H N CDBA1 With auto switch Number of auto switches Air cylinder with auto switch 2 1 n S n Mounting Basic Axial foot Front flange Rear flange Single clevis Double clevis Center trunnion B L F G C D T Style Auto switch Lube Non-lube Steel tube N F Without auto switch Refer

Secondary Batteries

L RSH 90 Heavy Duty Stopper Cylinder 50, 63 30 M9BWL 50 D L RS1H 90 Number of auto switches Bore size 50 63 Series compatible with secondary batteries 50 mm 63 mm (auto switch number mounted) 90 Material restriction Nil S 2 pcs. 1 pc.

7

S n Thread type Nil Rc1/4 NPT1/4 G1/4 TN TF Bore size Made to Order MK 40 50 63 40 mm 50 mm 63 mm Refer to page 422 for details.

OMR0031

50 100 100g 0g 0g 0g 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 0 10 20 30 40 50 Total travel distance [mm] Total travel distance [mm] Total travel distance [mm] 36 - (2) Speed entry method Settings: Target position [mm], Speed [mm/s], Acceleration [mm/s2], Deceleration [mm/s2], Load mass [g] To obtain the total travel distance S [mm] in absolute Acceleration Aa Speed Vc Speed [mm/s] positioning

1

ZZ Bore size ZZ Rc1/8 NPT1/8 20 10.5 11 7.5 54 (59.5) 75 (80.5) 20 60.5 (66) 25 10.5 11 7.5 52.5 (58) 76.5 (82) 25 59 (64.5) 32 10.5 10.5 7.5 53 (59) 77 (83) 32 59.5 (65.5) 40 10.5 10.5 7.5 57.5 (63.5) 87.5 (93.5) 40 64 (70) Bore size GA GB S ZZ Bore size ZZ 20 9 5 41 (46.5) 62 (67.5) 20 47.5 (53) 25 11 5 43.5 (49) 67.5 (73) 25 50 (55.5) 32 10.5 5 43.5 (49.5) 67.5 (73.5) 32 50 (56) 40 11

PF-OMM0004_C

1 L/min 2 L/min (50 ms) 1 L/pulse 070 () L/minL 3F.S. 3F.S. 2F.S. 2 5%F.S.(25 ) 3 3 9 L 4 1L NPN PNP 80 mA DC28 V NPN1 V (80 mA ) PNP1.5 V (80 mA ) 25 0.5 s/1 s/2 s 6 0.5 s/1 s/2 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 0.4 V ()30 ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10 50 mA -68No.PF-OMM0004-D PF3W711 PF3W721 0.4 V ()30 ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10

Series AP500

0.34 40 0.28 30 0.21 20 0.14 0 10 0.00 0.07 0 50 100 150 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

F

G A S K E T C O N S T R U C T I O N A g a s k e t m a d e o f s t a i n l e s s s h e e t c o v e r e d w i t h l a m i n a t e d N B R o n b o t h s i d e s i s s e a t e d o n t h e chamfer of a female thread to materialize a perfect sealing construction irrespective of the difference in thread diameters due to the difference in the types of female threads, variation in tolerance, difference