Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

7.5 8 45 50 19 25 9 73 53 20 28 17 17 13 M10 x 1.5 20 16 22 M16 x 1.5 30 26 3/8 5 43 112 11 10 9 50 63 21 28 8 80 60 22.4 30 17 17 13 M10 x 1.5 22 16 25 M18 x 1.5 30 26 3/8 5 47 116 11 12 10 55 80 26 32 8 100 75 28 32 22 20 15 M12 x 1.75 26 19 29 M22 x 1.5 35 30 1/2 5 57 127 11 16 13 65 100 34 38 6.5 118 90 35.5 35 27 19 16 M12 x 1.75 27 21 34 M27 x 2 35 32 1/2 8 66 137 12 20 16 80 125 34

Best Pneumatics Vol. 14

9 4.6 88 3 264 43 20 186 20 11 50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(0.6) C6: 8.6(0.48) C8: 9.9(0.55) M plug connector AC Non-locking push style SYJ3000 3 position 50 60 50 100V AC Hz 110V AC Hz 200V AC Hz 220V AC Hz Closed center Exhaust center Pressure center 60 50 60 M5 X 0.8: 1.8(0.1) 50 60 (1) AC Push-turnlocking slotted style With light and surge voltage suppressor SYJ5000 Rc(PT)1/8: 4.5(0.25) SYJ7000 Rc(PT)1/8, 1/4: 12.6(0.7) Note 1) All AC voltage

MGP

11 14 14 30 30 40 50 34 40 46 58 7.5 7.5 9 9 Rc1/8 Rc1/8 Rc1/4 Rc1/4 32 38 34 39 32 40 50 63 MGF 91 69 14 10 14 M6 M8 X 1.25 M8 X 1.25 18 25, 50, 75, 100, 125, 150, 175 ,200 97 69 14 11 12 M8 M10 X 1.5 M10 X 1.5 21.5 CY1 102 74 16.5 13.5 16.5 M10 M10 X 1.5 M10 X 1.5 28 WA WB Bore (mm) Standard stroke (mm) R S T U VA VB X XA XB XC XL YY YL Z MY1 25 ,50, 75st 200st 25, 50, 75st 200st 42 50

HRX-OM-W002

21 21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 2 22

Programless controller Step motor (servo 24 VDC)

800 9 40 900 50 900 50 900 60 900 10 45 1000 55 1000 55 1000 70 1000 11 50 1200 60 1200 60 1200 80 1200 12 55 1400 65 1400 70 1400 90 1400 13 60 1600 70 1600 80 1600 100 1600 14 65 1800 75 1800 90 1800 110 1800 15 70 2000 80 2000 100 2000 120 2000 57 No.

Cylinder with Lock

Cushion valve Port TX LH LY 4 x LD TT ZZ + Stroke LS + Stroke Y X X Y LX LT LZ TY [mm] With Rubber Bumper [mm] Bore size LS ZZ 32 193 227 40 211 249 50 234 276 63 246 291 80 297 353 100 321 377 Bore size LD LH LS LT LX LY LZ TT TX TY X Y ZZ 32 7 30 187 3.2 32 68.5 50 17 48 49 22 9 221 40 9 33 205 3.2 38 75.5 55 22 55 58 24 11 243 50 9 40 226 3.2 46 89 70 22 68 71 27 11 268 63 12 48 238 3.6

Modular F.R.L. Unit

77.5 50 224 3 264 43 20 186 44.5 84 16 6.4 115 11 11 20 93 50 70 3.3 303 277 43 20 191 44.5 16 84 6.4 117.5 11 11 20 50 98 70 316 3.3 280 46 20 196 44.5 84 13 6.4 117.5 11 20 11 50 70 98 319 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of Optional specification Note 2) the piping.

CJ2

B H C C d d 10 Y-J010B 15.2 8 21 M4 x 0.7 CP95 SNJ-006B 16 Y-J016B 6 NTJ-006A 16.6 11 21 M5 x 0.8 M6 x 1.0 4 8 9.2 6 M3 x 0.5 2.4 5.5 6.4 SNJ-010B 10 NTJ-010A M8 x 1.0 4 11 12.7 10 M4 x 0.7 3.2 7 8.1 NDd9 NDH10 NX R1 U1 Part no.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

For response time, refer to the graph below. 400 350 Response time (ms) 300 250 200 150 100 50 0 1 2 3 4 5 6 7 8 9 10 11 12 * This graph shows delay times between gateway unit and controllers. Fieldbus network delay time is not included.

Series VQ Base Mounted Metal Seal/Rubber Seal

Coil rated voltage VP7 1 2 3 4 5 6 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC VP4 VQ VQ4 Wiring Specifications VQZ The lead wires are connected to the valve as shown below. Connect each to the power supply side.

V

/60Hz) 2* 200VAC (50/60Hz) 3* 110VAC (50/60Hz) 4* 220VAC (50/60Hz) 5 24VDC 6 12VDC 9* Others Courtesy of Steven Engineering, Inc. !

HRX-OM-X084

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

CRB2/CRBU2/CRB1

9 14 10 15.5 25 10 25 13 25 14 0.004 0.012 0 0.043 5 12 34 20 9 18 4 1.5 6 10 0.5 29 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0.004 0.012 0 0.043 6 14 42 29 10 20 4.5 1.5 7 10 0.5 36 M5 M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014 0 0.043 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11 Series CRB2 Dimensions: 40 Single vane/Double vane type M5 x 0.8 with depth 10 CRB2BW40-S, D 3-M5 x

51

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CG-050-24A CG-063-24A CG-080-24A CG-100-24A 36 43 50 58 70 82 73 90 8 10 12 14 16 18 18 22 10 10 10 10 20 20 5.5 5.5 6.6 6.6 9 11 11 13.5 25 30 35 40 50 60 55 65 (29.3) 13 15 17 21 24 26 36 50 3.2 3.2 4.5 4.5 6 8 11 12 (33.1) Rod End Nut (For Male Thread) (40.4) (49.2) 30 d (60.4) (74.6) 0.1 0.3 28 D A C 0.1 0.3 32 H2 Applicable pin O.D Applicable

Fluoropolymer Piping Equipment

LQ3T11-R1 4 3 4 3.5 10 9 10 9 10 9 4.8 9.5 11 11 11 28.5 27.5 28.5 27.5 28.5 27.5 14 14 14 2 LQ3T11-R5 4 3 LQ3T21-R1 4 6 4 17 16 10 9 17 16 6 12 16 11 16 34.5 33.5 30.5 29.5 34.5 33.5 20 14 20 2.5 LQ3T21-R2 3 6 2 LQ3T21-R5 6 4 17 16 10 9 16 11 34.5 33.5 30.5 29.5 20 14 2.5 LQ3T21-R6 6 3 2 LQ3T31-R1 6 8 10 25 25 6.4 LQ3T31-R2 6 10 17 16 16 38 37 20 4 LQ3T31-R5 10 8 22.5 19.5 21 21 47.5 44.5

Modular F.R.L. Unit

93 96 70 50 20 11 115 44.5 11 6.4 84 3.3 303 264 43 105 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 105 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 105 297 Note 1) For AC20 only, the position of the pressure gauge is above the piping center.

Electric Actuator with Integrated Guide

Power supply 11) 100/110V AC (50/60Hz) 200/220V AC (50/60Hz) 21) 1) Consult SMC if the supply voltage for LC1-1HV1 will be 110V AC or more, or the supply voltage for LC1-1HV2 will be 220V AC or more. or LC1-1-T1(Teaching box) are required.

MXS

5.5 5.5 11 MY1 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 20 30 20 28 38 ZZ 48 58 68 90 106 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21 31 43 41 MXS6L-10 MXS6L-20 MXS6L-30 MXS6L-40 MXS6L-50 3.11-29 Series MXS Dimensions MXS 8L

Compact 5-Port Solenoid Valve

Refer to the cylinder catalog for details. 10 Optimum Actuation Size Chart of Air Cylinder For JSY3000, A, B port: 8 Horizontal Vertical (Upward) Average speed [mm/s] 0 100 200 300 400 500 600 700 800 32 CM2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 300 mm 40 50 63 CA2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 500 mm 80 100 125 CS1 series Pressure: 0.5 MPa Load ratio: 50% Stroke