Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Direct Operated Pilot Operated Refer to pages 7, 9, 11, 25, 35, and 39 for details. 2-Port Solenoid Valve Improved environmental resistance due to the stainless steel coil cover [IP67 enclosure] Refer to pages 46 to 50 for details.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Power supply terminal Power supply terminal The circuits above are for the double wiring specification with up to 11 or 12 stations. Connect to SOL.A for a single solenoid.

AS-FG/ASD-FG

(ANR) Flow rate l/min (ANR) Effective area mm Effective area mm 12 10, 11 1000 10, 11, 12 08, 09 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle revolutions Number of needle revolutions 11 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 Parts list Material Note Description Note Description No. 12 Material No. 1 Body A Elbow body Knob Body

SZ3000

Weight (g) 17.6 19.9 24.4 28.9 33.4 37.9 22.1 26.6 31.1 35.6 10 11 12 13 14 15 16 17 18 19 No. Terminal no.

q"s

Flow characteristics sJppy pressL,e 1.0vea Reliel flow chatacteristics suppry pressu 1 0 Mpa Pressure chalacteristics setpressure: 04 [4pa 0.9 0.8 P o.z 3 o.o 3 o.s P 0.4 0.8 G n 7 g 0.6 3 o.s E 0.4 -o 0.3 t o.z 0.1 0.0 500 1000 1500 2000 Flow te (l/min IANR)) I E E .9 .9 6 " " a o.2 0 . 1 o 0.0 500 1000 1500 2000 Flow raie (rmin (aNB)) 0.4 0.6 0.8 1.0 1.2 Supply pressure (MPa) series ITV

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

AS-FP AS3201FG, AS3211FG AS3301FG, AS3311FG AS4201FG, AS4211FG AS4301FG, AS4311FG AS-FM Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13, 16 10, 11, 12 AS-D 1500 1000 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) 08, 09 AS-T 06, 07 1000 ASP 500 ASN 500 AQ 0 0 5 0 10 5 0 10 ASV Number of needle rotations Number of needle rotations AK Note) The numbers above the flow rate characteristic

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS431FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08, 09 06, 07 Number of needle rotations Number of needle rotations 681 AS-FG Series Construction: Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

100 200 400 1.5 3 6 Effective area (mm2) Effective area (mm2) Effective area (mm2) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530FG ASD630FG 1500 1000 Effective area (mm2) Effective area (mm2)

Vacuum System Peripherals:

When ordering the mixed specifications of single and double solenoids, Specify the wiring. 11 11 stations 2 to 19 stations Both sides ... ... When creating the mixed specifications, complete the stations table on the right. 19 19 stations When creating the special specifications, complete the stations table on the right.

Cylinder with Lock Series MNB

W X Y ZZ J 32 34 27 1/8 154 6.5 7 30 198 3.2 32 57 50 6 M10 x 1.25 37 47 13 6.5 22 9 232 M6 x 1.0 40 39.5 27 1/4 161 8 9 33 209 3.2 38 64.5 55 6 M14 x 1.5 41.5 51 16.5 9 24 11 247 M6 x 1.0 50 47 31.5 1/4 183 9 9 40 237 3.2 46 77.5 70 7 M18 x 1.5 47.5 58 20 10.5 27 11 279 M8 x 1.25 63 55.5 31.5 3/8 197 8.5 12 48 251 3.6 56 93 80 7 M18 x 1.5 55 58 23 12 27 14 296 M8 x 1.25 80 61.5 38 3/8 245

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08, 09 06, 07 Number of needle rotations Number of needle rotations 543 Series AS-FG Construction: Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Description Material 1 Bracket Steel strip 2 Cross recessed round head screw Steel wire 3 Clasp Steel strip 8 Cassette 9 Seal NBR 10 O-ring NBR 11 O-ring NBR 12 Bonnet A POM 13 Bonnet B POM 14 Gear PPS 15 Indicator gear POM 16 Clip Stainless steel 1 The AS3002FS-11, AS4002FS-11, AS4002FS-13 are made of stainless steel. 9 Related Equipment Holder for Speed Controller TMH Series Specifications

CL

Bore size (mm) H1 NA P PG PH PL PW S TA TB TC l H ZZ e f h ZZ Stroke range Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 33 38 39 44 55 62 62 70 19.5 24 24 24 16 17 17 17 20 24 24 24 30 30 35 35 38 41 41 41 178 193 196 221 141 151 154 169 35 40 40 50 Up to 200 Up to 300 Up to 300 Up to 300 11 11 11 12 5 6 6 8 11 11 10 10 24 29 36 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 198 215 218 241 20 25 32 40 0.25 stroke

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SOL.A 10 () (+) White Black Item Characteristics Japan Aviation Electronics Industry, Ltd. 10 stations SOL.B 23 () (+) Gray Red 11 () (+) White Red Conductor resistance /km, 20C J.S.T. Mfg. Co., Ltd. 65 or less SOL.A 11 stations Hirose Electric Co., Ltd.

reduces flow setting time

AS-FG AS301FS, AS311FS AS401FS, AS411FS AS-FP Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa AS-FM 10, 11, 12 10, 11, 12 12, 13, 16 12, 13, 16 1500 1000 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 08, 09 AS-D 06, 07 1000 AS-T 500 ASP 500 ASN 0 0 5 0 10 5 0 10 AQ Number of needle rotations Number of needle rotations ASV Note) The numbers above the flow rate characteristic curves

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

AS-FG AS-FG AS301FSG, AS311FSG AS401FSG, AS411FSG AS-FP Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa AS-FM 10, 11, 12 10, 11, 12 12, 13, 16 12, 13, 16 1500 1000 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 08, 09 AS-D 06, 07 1000 AS-T 500 ASP 500 ASN 0 0 5 0 10 5 0 10 AQ Number of needle rotations Number of needle rotations ASV Note) The numbers above the flow rate characteristic

Compact Type

counterbore with depth 6.3 2 2-6.5 through 2 2-11 counterbore with depth 6.3 2-M4 0.7 with depth 6 15 2-M5 0.8 54 19 70 52 17 8.5 42 25 5 10 2.5 20 8 9.5 38 57.5 9 2-M4 0.7 with depth 6 20 2-M5 0.8 62 24 84 60 22 11 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 0.8 with depth 7.5 25 2-M6 1.0 73 29 87 71 27 13.5 60 35 6 12 4.5 30 12 14.5 46 70.5 9 2-M5 0.8 with depth 7.5 32 2-M6 1.0 94

Compact Type Dual-Rod Cylinder Series CXSJ

counterbore with depth 6.3 2 2-6.5 through 2 2-11 counterbore with depth 6.3 2-M4 0.7 with depth 6 15 2-M5 0.8 54 19 70 52 17 8.5 42 25 5 10 2.5 20 8 9.5 38 57.5 9 2-M4 0.7 with depth 6 20 2-M5 0.8 62 24 84 60 22 11 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 0.8 with depth 7.5 25 2-M6 1.0 73 29 87 71 27 13.5 60 35 6 12 4.5 30 12 14.5 46 70.5 9 2-M5 0.8 with depth 7.5 32 2-M6 1.0 94

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Use manifold specification sheet. 11 Series SYJ3000 Flat Ribbon Cable Manifold Flat Ribbon Cable Manifold Specifications Multiple valve wiring is simplified through the use of the flat cable connector.

AC Servo Motor Driver (SSCNET /H Type)

Power supply is AC200V single phase (Note 4) Malfunction RA1 OFF ON MC MC SK EMG stop switch Driver Servo amplifier Servo motor MC (Note 7) MCCB CNP1 1-phase 200 V AC to 240 V AC (Note 11) L1 CNP3 (Note 6) U U L2 Motor V V L3 M [1] W NW P3 (Note 1) (Note 10) P4 CNP2 P+ [2] (Note 2) C [3] D (Note 11) (Note 3) Encoder CN2 Encoder L11 cable L21 (Note 8) Main circuit power supply CN3 EM2 24 V