HRX-OM-W060

75 71 Operation manual (for installation/operation) (English 1, Japanese 1) Particle filter set for CH1 Particle filter set for CH2 Accessories Anchor bracket 2pcs.

ARM10/11

SMC SMC 28.5 AV 6 51.5 80 51.5 AU 13 OUT IN 13 3 28 OUT IN 13 AF OUT IN 3 3 5. Option 4. Accessory 6. Unit representation 2.

Compact Manifold Regulator

Knob Position Symbol Position Knob position Knob position Knob position Front Top Bottom 56 A B C Top Front Bottom 84 42 84 70 70 6 26 (Max.28) P U S SMC SMC H L 6 O C K SMC SMC 28.5 51.5 6 51.5 80 13 OUT IN 3 28 13 13 OUT IN OUT IN 3 3 2. OUT Piping Position 3.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

14 2.8 depth 8.4 PF2M711/721L-02(-L) 88 13 17 2.8 depth 6.2 PF2M711/721L-N2(-L) 88 13 17 2.8 depth 6.2 PF2M711/721L-F2(-L) 88 17 21 2.8 depth 6.2 20 PF2M7(-L) Series Dimensions 76 A PF2M7mS-C4/C6/C8/N7(-L) 76 A 68 68 58 58 48 48 18 18 OUT1 OUT2 OUT1 OUT2 DC(+) 10.2 DC() 1.4 DC(+) 10.2 DC() 1.4 46.9 (Max. 53.9) 46.9 (Max. 53.9) 38.5 (30.9) 38.5 (30.9) 13 3 13 3 2 x 3.4 2 x One-touch fitting

ARM10/11

SMC SMC 28.5 AV 6 51.5 80 51.5 AU 13 OUT IN 13 3 28 OUT IN 13 AF OUT IN 3 3 5. Option 4. Accessory 6. Unit representation 2.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

No.EX-OMX1011 PRODUCT NAME Fieldbus system EtherNet/IPTM compatible SI Unit IO-Link Master Unit MODEL / Series / Product Number EX600-SEN3-X80 EX600-ED# EX600-LAB1 EX600-LBB1 Table of Contents Safety Instructions 3 System Outline 9 Definition and terminology 10 Assembly 11 Mounting and Installation 13 Installation 13 Wiring 15 SI Unit Model Indication and How to Order 16 Summary of Product

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

4.5 (same on reverse side) 4 8 6 11 22.5 (13) (10 + 1/2ST) 4 Model ST 13 + ST 45 + ST 58.5 + ST 10 + 1/2ST CXS6-10-XB19 10 23 55 68.5 15 CXS6-20-XB19 20 33 65 78.5 20 CXS6-30-XB19 30 43 75 88.5 25 CXS6-40-XB19 40 53 85 98.5 30 CXS6-50-XB19 50 63 95 108.5 35 CXS10--XB19 17 S ZZ 15 1 10 7 SS 2-3.4 through 2-6.5 counter bore depth 3.3 2-2.5 x 14l AW (spring pin) 20 Z 9 5 1 35 0.2 35 0.2 33.6

Slider Type/Ball Bushing Bearing

C Q + Stroke CY1S Shock absorber Shock absorber CY1L CY1L CY1H (mm) A B d C D EA EB FA FB G H Model CY1L15 CY1L20 CY1L25 CY1L32 CY1L40 HG HI J JK L LD GP HA HB HO HP HS HT CY1F 7.5 9.5 12 5 16.6 6 13 3 6 6.5 40 16 14 M6 x 1.0 9.5 75 5.6 65 6.5 4 38 39 25 16 9.5 9.5 16 5.2 21.6 8.5 46 18 16 M6 x 1.0 10 86 5.6 80 9 10 44 45 31 20 CYP 9.5 11 16 6.5 26.4 8 14 4 7 8.5 54 23 21 M8 x 1.25 10 86

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

85.5 18 198.5 211.5 237.5 248 19 209 222 250 260.5 20 219.5 232.5 262.5 273 13 146 159 187.5 198 14 156.5 169.5 200 210.5 15 167 180 200 210.5 16 177.5 190.5 212.5 223 17 188 201 225 235.5 10 114.5 127.5 150 160.5 11 125 138 162.5 173 12 135.5 148.5 175 185.5 5 62 75 100 110.5 6 72.5 85.5 112.5 123 7 83 96 125 135.5 8 93.5 106.5 137.5 148 9 104 117 137.5 148 3 41 54 75 85.5 4 51.5 64.5 87.5

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Station L1 L2 L1 L2 Port size M5 1/

MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP AG AB A AA AN B GD AH AI AJ AK AL AM AO AP BZ GC Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 13 11 54 75 32 28 134 150 108 140 M 8 135 110 4 9 9 104 86.5 16 15 62 88 37 29 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 16 15 62 88 37 30

MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP A AA AB AG AH AI AJ AK AL AM AN AO AP B BZ GC GD Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 11 13 75 32 28 54 134 150 108 140 M 8 135 110 4 9 9 104 86.5 15 16 88 37 29 62 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 15 16 88 37 30 62

NCA1

3/4 2.02 1 1/8 3/4 1/2 1/2 9/16 0.3 1/4-28 2 3/8 3/8 1.26 1.1 0.62 0.62 1 3/4 5 1.71 3 5/8 2.36 4 3/4 1.43 CA2 200 (2) 5/8 7/16-20 3/8 .75 3/4 2.6 1 1/8 3/4 1/2 1/2 2 1/2 9/16 0.3 5/16-24 3/8 1.06 3/8 1.26 0.62 3/4 0.62 1 5 1.71 3 5/8 2.4 4 3/4 1.84 250 (2.5) 5/8 7/16-20 3/8 .75 3/4 3.1 1 1/8 3/4 1/2 1/2 9/16 5/16-24 3 0 3/8 3/8 1.30 1.06 0.62 0.62 1 7/8 5 1.75 3 3/4 2.48 4 7/8 2.19 CS1

NCA1

5/8 7/16-20 3/8 3/4 1.43 CA2 200 (2) 3/4 1.06 0.3 2 1/2 1 0.62 0.62 1.26 3/8 3/8 5/16-24 4 3/4 9/16 2.4 1/2 3 5/8 1/2 1.71 3/4 5 1 1/8 2.6 .75 5/8 7/16-20 3/8 3/4 1.84 250 (2.5) 1 7/8 0.62 0.62 1.06 1.30 3/8 0 3/8 3 5/16-24 4 7/8 9/16 2.48 1/2 3 3/4 1/2 1.75 3/4 5 1 1/8 3.1 .75 5/8 7/16-20 3/8 3/4 2.19 CS1 325 (3.25) 1 3/8 0.87 1.05 1.57 5/8 1/2 3 3/4 3/8-24 5 53/64 7/8 2.72 5/8 4 1/4 3/

V

www.stevenengineering.com I FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT REQUEST CATALOG REFERENCE E131, N238, E138 & N239 2.47 SOLENOID VALVES SERIAL TRANSMISSION SERIES VQ1000 D I M E N S I O N S L/n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 64.5 75 85.5 96 106.5 117 127.5 138 148.5 159 169.5 180 190.5 201 211.5 L2 93.5 104 114.5 125 135.5 146 156.5 167 177.5 188 198.5 209 219.5 230 240.5

EXxx-OMY0006CN

EX245-DY1 . 75 12.1. . 75 12.2. . 76 12.3. . 77 12.4. . 77 12.5. LED . 78 12.6. . 79 13. . 80 13.1. . 80 13.2. Y . 81 13.3. . 82 14. . 83 14.1. EX245-FPS1/2/3 . 83 14.2. . 85 15. . 86 15.1. EX245-FPS1/2/3 . 86 15.2. EX245-DX1 . 88 15.3. EX245-DY1 . 88 16. . 89 16.1. . 89 16.2. PROFIsafe . 99 16.3.

NCA1

1/2 1 1/2 3 1/2 3 1/2 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 3 1/2 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 3 13/16 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 3 13/16 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 3 13/16 BORE E EE(NPT) F G J K ND NT TN ADD STROKE LB P SN 8 8 1/2 3/4 3/4 2 1 1/2 9/16 1 1/8 3/4-10 4 1/2 5 7/8 3 1/4 3 1/4 10 10 5/8 1 3/4 2 1/4 2 11/16 1 1/2 1-8 5 1/2

Air Cylinder NCA1 Series

1/2 1 1/2 3 1/2 3 1/2 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 3 1/2 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 3 13/16 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 3 13/16 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 3 13/16 BORE E EE(NPT) F G J K ND NT TN ADD STROKE LB P SN 8 8 1/2 3/4 3/4 2 1 1/2 9/16 1 1/8 3/4-10 4 1/2 5 7/8 3 1/4 3 1/4 10 10 5/8 1 3/4 2 1/4 2 11/16 1 1/2 1-8 5 1/2

Table of Contents

Cylinder port is located at U side of body. 3(R) EXH port L n Dimensions Formula L1 = 11n + 15.5, L2 = 11n + 28 n: Station (Maximum 16 stations) 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 37.5 50 75 85.5 L1 L2 (L3) (L4) 26.5 39 62.5 73 48.5 61 87.5 98 59.5 72 100 110.5 70.5 83 112.5 123 81.5 94 125 135.5 92.5 105 125 135.5 103.5 116 137.5 148 114.5 127 150 160.5 125.5 138 162.5 173 136.5 149

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Refer to page 5-10-13 for Precautions on these products.