17

MGPM, MGPL, MGPA Common Dimensions (mm) P Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL Nil TN TF 42 46 53 53.5 G1/8 G1/8 29 33 37 37.5 6 8 10 10 7 7 8 9 6 6 8 7 26 30 36 42 10 10.5 11.5 11.5 7 7.5 9 10 58 64 83 93 12 16 20 25 M4 M4 M5 M5 13 15 18 21 13 15 18 21 18 22 24 30 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1.0 10 12 13 15 M4 x 0.7 M5 x 0.8 M5 x 0.8

RHC

58 K 75 LD 7 H 11 GA 80 FA 16 EA 23 D 62 C 20 B 53 A 70 E Bore size (mm) Stroke range (mm) 50 Eff. thread length 32 -X Up to 1200 35 0 63 11 72 75 7 11 80 16 23 58 20 60 Up to 1200 80 35 32 55 0.074 0 2080 13 89 78 10 13 90 20 23 61 25 75 Up to 1400 95 40 37 65 0.074 0 100 16 110 80 10 13 95 20 25 63 30 90 Up to 1500 116 40 37 80 0.074 0 Data ZZ Y 6.8 to 11.3 WH 335 X 10 P 30 S 1/2 NF 215

Electric Rotary Table

to 420 20 to 280 30 to 420 20 to 280 30 to 420 Step Motor (Servo/24 VDC) Pushing speed [/sec] 20 30 20 30 20 30 Max. angular acceleration/deceleration [/sec2] Note 2) 3,000 0.5 Backlash [] 0.05 Positioning repeatability [] Impact/Vibration resistance [m/s2] Note 4) 150/30 Actuation type Special worm gear + Belt drive Max. operating frequency [c.p.m] 60 Operating temp. range [C] 5 to 40 Operating

Step Motor Controller

Cable type LE-CSE-mm: Encoder cable S R Standard cable Robotic cable (18.8) (13) (30) L (37.4) LE-CSNA LE-CSNB I/O connector LE C SNA Controller type 37.2 52.4 SNA SNB I/O connector (LECSAm) I/O connector (LECSBm) 39 39 Regeneration option 6 Mounting hole LA LEC MR RB (12) 144 12 (6) 15 Regeneration option type 032 12 Allowable regenerative power 30 W Allowable regenerative power 100 W Confirm

HRX-OM-W060

This produuct Your system Circulating fluid temperature 30 Serial communication Discharge temperature 31 Circulating fluid display temperature 30 Heat radiation Circulating fluid set 1 temperature 30 Offset temperature 30 1 5.4 Description of Screen HRL Series 5-30 HRX-OM-W060 Chapter 5 Display and Setting of Various Functions Pump operation mode 4. Pump operation mode can be set up.

Stainless Steel 316 Fittings

Width across flat Width across flat Effective area (mm2) 2 x Applicable tube Weight (g) d M L Model H1 H2 M L I.D. 2.5 3 4 6 7.5 8 9 10 13 KFG2L0425-00 KFG2L0403-00 KFG2L0604-00 KFG2L0806-00 KFG2L1075-00 KFG2L1008-00 KFG2L1209-00 KFG2L1210-00 KFG2L1613-00 4 4 6 8 10 10 12 12 16 H1 1.8 2.3 3.3 5.3 6.8 7.3 8 9 12 1.6 2.6 6 17 30 35 45 57 101 d 5 13.3 7 8 8 13 28 47 46 51 48 89 5.8 6.6 15.8

51

(mm) Rod Flange Symbol F GB B A AL B1 C D FT FX FD ZZ E GA H H2 H1 I J MM KA NA P S Bore size (mm) 20 25 32 40 50 63 80 100 12 15 15 20.5 26 26 32.5 32.5 14.5 17.5 17.5 23.5 29 29 35.5 35.5 8 10 12 14 18 18 22 26 12 14 18 25 30 32 40 50 5 6 6 8 11 11 13 16 79 85 87 93 121 121 151 152 40 44 53 61 76 92 104 128 13 17 17 19 27 27 32 41 14 16.5 20 26 32 38 50 60 2 2 2 2 2 2 3 3 28 32 38 46 58

HRX-OM-M090

This produuct Your system Circulating fluid temperature 30 Serial communication Discharge temperature 30 Heat radiation Circulating fluid display 1 temperature 30 Circulating fluid set temperature 29 30 MODE Explanation Control the temperature so that the discharge temperature of the circulating fluid is circulating fluid set temperature + offset temperature.

mb1

84 94 94 114 114 178 186 210 210 258 258 90 90 102 102 124 124 184 192 218 218 268 268 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72 72 46 52 65 75 95 114 22 30 35 35 40 40 13 14 15.5 16.5 19 19 9 6.5 Up to 500 Up to 500 Up to 600 Up to 600 Up to 800 Up to 800 19.5 27 32 32 37 37 10 14 18 18 22 26 4 4 5 9 M6 x 1 M14 x 1.5 10.5 M8 x 1.25 M18

70astamb1

30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 4 4 5 5 5 5 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 135 139 156 156 190 190 46 52 65 75 95 114 22 30 35 35 40 40 9 6.5 Up to 500 Up to 500 Up to 600 Up to 600 Up to 800 Up to 800 10 14 18 18 22 26

Vacuum System Peripherals:

ZSE30/ZSE40/ZSE5B 13-14-9 2. ZSE6B/ZSE3/ZSE1/ZSE2 13-14-10 3. PS1100/ZSP1/PSE200/530 13-14-11 Misc. Pressure gauge for vacuum: GZ46 13-14-12 Pressure Gauge for Vacuum Related Products: Air Line Equipment/Modular Type 1. Air filter: Series AF 13-14-13 2. Regulator: Series AR 13-14-13 3. Filter regulator: Series AW 13-14-13 4.

EX120/121/122

11 12 13 14 15 CN0 CN2 CN4 CN6 CN8 CN10 CN12 CN14 0 1 2 3 0 1 2 3 CN1 CN3 CN5 CN7 CN9 CN11 CN13 CN15 1 q 4 5 6 7 4 5 6 7 3 q 5 8 9 10 11 8 9 10 11 7 12 13 14 15 9 12 13 14 15 11 PWR 13 PWR e 15 e t y y t Shown with cover removed.

High Power Cylinder Series RHC

80 10 800.074 26 13 95 90 30 63 25 20 40 37 116 LH LS LT LY LX LZ M MM NE NF S P X Y WH ZZ Bore size (mm) -X 50 M18 x 1.5 73 7.5 10 88.5 53 6.8 to 11.3 30 10 335 52 275 1/2 215 25 27 Individual -X 63 M18 x 1.5 60 80 7.5 342 55 289 10 95 1/2 215 37 10 24.5 27 80 M22 x 1.5 10 308 12 115 75 100 3/4 8.5 to 13.5 40 13 371 65 228 30.5 32 100 M26 x 1.5 139 90 118 10 13 391 80 330 14 3/4 236 47 41

CV/MVGQ

14 9 18 13 5 9 15.5 13 5 57.5 28 M8 x 1.25 15 24 M20 x 1.5 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 10 19 10 45 30 14 9 22 13 5.5 9 19.5 17 6 63.5 33.5 M10 x 1.25 15 30 M26 x 1.5 CV 12 19 10 45 30 14 9 22 13 5.5 9 19.5 17 6 68 37.5 M10 x 1.25 15 34.5 M26 x 1.5 14 30 15 50 39 18 10 24 16 7 11 21 22 8 76 46.5 21.5 42.5 M32 x 2 M14 x 1.5 MVGQ Dimensions by Stroke Single Acting/Spring Extend

Speed Controller with Indicator

3.2 7.2 13 (13) AS22l1FSl-U01-04 4 8.2 AS22l1FSl-U01-06 6 10.4 14 (13) AS22l1FSl-U01-08 8 13.2 22.4 29.4 (29.3) 14.2 15 (14) AS22l1FSl-U01-10 10 15.9 25.3 32.3 (32.2) 15.6 16 (15) AS22l1FSl-U02-23 3.2 12 19.1 26.1 (26) 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 1/8 13 (12.7) 7.2 20.9 30 (30.3) 22.6 49.7 48.3 44.2 42.8 13.3 21.5 24 7.8 16.2 24 (25) AS22l1FSl-U02-04 4 8.2 AS22l1FSl-U02-06

Fluoropolymer Piping Equipment

E E H J K L1 L1 L2 L2 M Min. port size t W1 W2 LQ3P1A 1/8" 10 9 11 6 14.5 23.5 22.5 58 56 14 2 8 16 17 LQ3P2A 1/4" 17 16 16 7 20.5 28 27 69 67 20 4 8 21 24 LQ3P3A 3/8" 22.5 19.5 21 7 24.5 39 36 89 83 25 6.4 8 26 28 LQ3P4A 1/2" 24.5 22.5 24 9 30.5 44.5 42.5 100 96 29 9.5 8 32 36 LQ3P5A 3/4" 26.5 24 32 9 36.5 50.5 48 117 112 37 16 13 41 43 LQ3P6A 1" 30 26 41 10 48.5 60 56 136 127.5 49 22 13

HRX-OM-R026

This produuct Your system Circulating fluid temperature 30 Serial communication Discharge temperature 30 Heat radiation Circulating fluid display 1 temperature 30 Circulating fluid set temperature 29 30 MODE Explanation Control the temperature so that the discharge temperature of the circulating fluid is circulating fluid set temperature + offset temperature.

KG

(mm) Note) Weight (g) D Applicable tubing KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 1 8 4 15 23 11 16 14 11 13 15 17 13.1 10.4 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 5.6 10 Connection thread 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14

High Purity Chemical Valve

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2m LVA3m LVA4m LVA5m LVA6m 66.5 12.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 (mm) Dimensions A B Q R P C E F G H K L N Model LVA1m 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2m 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3m 36 47 78.5 13

2 Phase Stepper Motor/Without Motor Brake Series LXS

E-M5 thread depth 10 6 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch U N x P 20 5 N C 1 0.2 (5.1) 10 5.8