NCA1

4 3/4 250 (2.5") 7/16-20 3/4 3.1 1 1/8 1 1/8 3/8 0.551 5/16-24 3 0 3/8 3/8 3/8 1.3 1.06 2.19 3 7/8 4 5/8 5/8 1 1.75 3 3/4 2.48 4 7/8 Non-rotating Rod-Head Side Flange Style: NCA1KG (MF2 mounting style) P + Stroke 2-EE (NPTF) Y 4-FB (Hole) C D across flats AA BA KK EA 0.63 B R E 4-DD J F A WF G TF UF XF + Stroke ZB + Stroke Bore size (in) KK A AA B BA C D DD E EA EE F FB G J R TF UF WF Y P

High Power Cylinder:

0 i e r y !3 !4 @0 !9 t !8 @2 @4 !

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,

CNS

Symbol Bore size (mm) 125 140 160 H A L1 H1 3.5 Y type double knuckle I type single knuckle Y-12 110 50 100 156.5 I-12 Y-14 110 50 105 161.5 I-14 Y-16 120 56 110 170.5 I-16 L1 H1 A, H Dimensions When Mounting a Single/Double Knuckle Joint together with a Rod End Nut A H Bore size (mm) 125 140 160 65 125 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-

Serial Network

U, D)-SSL1 Y VQ2000/4000/5000 EX123 (U, D)-SSL2 Y IP53 or NEMA12 comes as optional.

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 20, Backflow Function: None, Thread: Rc, Port Size: 02 (1/4), Accessory: G [Round Pressure Gauge ("20-" Type Includes Limit Indicator)]

Special Applications: Clean-room, Copper-free, Fluorine-free, Silicon-free, Size: 20, Backflow Function: None, Thread: Rc, Port Size: 1/4, Accessory: G [Round Pressure Gauge ("20-" Type Includes Limit Indicator)], Specifications: -, Pressure Unit: -

MHY2/MHW2

4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !3 Open Component Parts Component Parts Note No. q Description Material Aluminum alloy Description Material Note No. Body Bushing B Hard anodized Sintered alloy steel o !0 !1 !2 !3 !4 !5 !

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

After placing the tubing y in the holder assembly i, push it onto the insert bushing t until it stops and clamp it with the hook o. 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com o Hook e Base Caution y Tubing t Insert bushing When the tubing y is curved, straighten

Electric Actuator Triple Axis P&P Unit

Stroke+191 (23) Rreference plane (25) Stroke+15 130 21 63.5 Stroke+214 130 LG-240Z-Y 1 LG-240Z-Z 2 120 (23) 86 (90) Stroke+15 60 Stroke8 (For 100 to 150 strokes) 192 (For 200 to 1000 strokes) Stroke+191 Stroke+214 Select the unit specifications after confirming the Y and Z axes specifications. 1 ) For detailed dimensions and specifications, please refer to the body dimensions.

REC

26 40 8 13 10 41 5 8 33.5 5 6.8 25 186 40 55 20 30 150 to 700 M10 X 1.25 25 22 19.5 47 17 32 45.5 10 13 10 45 6 8 37.5 5.5 6.8 28 186 40 55 20 34.5 150 to 700 M10 X 1.25 32 22 19.5 47 17 32 49.5 12 13 11 45 6 8 46.5 5.5 6.8 28 199 40 55 22 42.5 150 to 1000 M14 X 1.5 40 24 21 54 22 41 55.5 14 16 12.5 50 8 10 56.2 7 7 30 227 55 75 26.5 51 200 to 1000 NN P S X Y Z ZZ Bore size Stroke range

REC

13 26 40 8 13 10 41 5 8 33.5 5 6.8 25 186 40 55 20 30 25 M10 x 1.25 Up to 700 22 19.5 47 17 32 45.5 10 13 10 45 6 8 37.5 5.5 6.8 28 186 40 55 20 34.5 32 M10 x 1.25 Up to 1000 22 19.5 47 17 32 49.5 12 13 11 45 6 8 46.5 5.5 6.8 28 199 40 55 22 42.5 40 M14 x 1.5 Up to 1000 24 21 54 22 41 55.5 14 16 12.5 50 8 10 56.2 7 7 30 227 55 75 26.5 51 NN P S X Y Z ZZ Bore (mm) Stroke range 20 M20 x 1.5

CXS

Seal kits consist of items 19 through 21, and can be ordered by using the seal kit number corresponding to each bore size. 13 Series CXS Construction: Ball Bushing Bearing CXSL6 CXSL10 CXSL15 CXSL20 to 32 Parts list Parts list: Standard piping Description Material Synthetic resin Note 2) Note No. 18 19 20 21 22 23 24 25 26 27 28 29 Description Material Aluminum alloy Special steel Special

SX

21 62.5 67.7 21 60 128.6 115.6 30 99.5 28.2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com G: 300 H: 600 (Pitch) Manual override Manual override (Press and turn for the locking type.)

0.4

VVQ2000-3A-1 y U-side end plate assembly no.

CLQ

A A1 E1 L1 NZ 16 16 20 22 28 38 44 34 41 42 56 71 79 25 30 30 40 50 55 20 25 32, 40 50, 63 80 100 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 34 41 42 56 71 79 25 30 30 40 50 55 IY-G02 16 20 IY-G03 20 22 IY-G04 36 28 IY-G05 44 38 IY-G08 56 44 IY-G10 Knuckle pin and snap ring are included. 64 Knuckle Pin (Common with double clevis pin

CNG

A1 E1 L1 I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 +0.058 0 0.2 0.4 8 8 0.2 0.4 10 0.3 0.5 18 16 20 22 +0.4 +0.2 8 16 34 41 42 2 25, 32 40 8.5 10.5 14 25 30 30 M8 x 1.25 10.3 12.8 12 11.5 14 14 8 10 10 21 11.5 25 30 30 20 34 41 42 8.5 M8 x 1.25 10.3 16 20 36 IY-G02 IY-G03 IY-G04 +0.058 0 10 +0.058 0 10 +0.4 +0.2 10 20 M10 x 1.25 25.6 14 M10 x 1.25 12.8 25, 32 40 10.5 16 +0.5 +0.3 18 M14 x 1.5 41.6

Cylinder with Lock Series CNG

I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 34 41 42 10.3 12.8 12 25 30 30 10.3 12.8 12 + 0.058 0 -0.2 -0.4 8 8 -0.2 -0.4 10 -0.3 -0.5 18 16 20 22 34 41 42 11.5 14 14 20 25, 32 40 8.5 10.5 14 M8 x 1.25 M10 x 1.25 M14 x 1.5 16 20 22 8 10 10 16 20 36 21 25.6 41.6 11.5 14 14 M8 x 1.25 M10 x 1.25 M14 x 1.5 25 30 30 8.5 10.5 16 + 0.4 + 0.2 8 IY-G02 IY-G03 IY-G04 20 25, 32 40 + 0.058 0 10 + 0.058 0 10

ZPT/ZPX

Hexagon width across flats 21 Width across flats 37 Width across flats 24 4 A B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 34 (mm) (mm) C M8 x 1.25 40 ZPX40H-B01-B10 42 M10 x 1.5 Model A 40 ZPX40H-B01-B8 B 42 A B C D E F Y G 63 65 14.5 26 41 63 3.5 M10 x 1.5

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

m1 Note) Static load m M3 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 M1 m1 x g x Y m2 x g x Y m3 x g x Z M2 z y Y Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a weight movable by thrust.