Table of Contents

85.5 86 112.5 123 31 50 60.5 75 100 110.5 n L 13 14 15 16 17 18 19 20 21 22 23 24 174 187.5 198 L1 L2 L3 284 300 310.5 273 287.5 298 262 275 285.5 251 262.5 273 240 250 260.5 229 250 260.5 218 237.5 248 207 225 235.5 196 212.5 223 185 200 210.5 163 187.5 198 How to Order Double check block 2 position 3 position exhaust center VQ1000-FPGF M5 C4 IN side port size OUT side port size

OMU0023

77 4D M 109 6D m 14 0E SO 46 2E . 78 4E N 110 6E n 15 0F SI 47 2F / 79 4F O 111 6F o 16 10 DLE 48 30 0 80 50 P 112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X

IR1000/2000/3000

AL 14-5-21

Compact

CQ-M3 x 75 L 45 80 CQ-M3 x 80 L 50 85 CQ-M3 x 85 L 20 5.5 D C 5 45 CQ-M3 x 45 L 10 50 CQ-M3 x 50 L 15 55 CQ-M3 x 55 L 20 60 CQ-M3 x 60 L 25 65 CQ-M3 x 65 L 30 70 CQ-M3 x 70 L 35 75 CQ-M3 x 75 L 40 80 CQ-M3 x 80 L 45 85 CQ-M3 x 85 L 50 90 CQ-M3 x 90 L 25 8 6 MXZ Series Dimensions: MXZ12 MXZ12Standard (Pilot port location: Front) 4 x 6 4 x M3 x 0.5 depth 5 17 14 14 2 x 3.4 (Through holes for

39

, 75 , 90 , 105 A photograph shows handle unit L.

2/3 Port Valve

Refer p.4.1-20, 4.1-21 for specifications and models.

3

75 23.5 43 25.5 45 40 65 47.5 72.5 20 Extended M With arm CK CLK Retracted 25 20H7 (Arm side I.D

Short Stroke Electric Actuator Series LX

Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 59 F 5H9 +0.030 0 depth 5 29.5 D 4 4 6 6 E 60 90 90 90 F 30 60 60 60 G (50) (50) 100 100 Model LXFH5BD-25 LXFH5BD-50 LXFH5BD-75 LXFH5BD-100 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 6 Refer to page 299 for mounting. (11.5) 38 E Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg

SFOD-OMT0009CN

No. 1 11 21 31 2 12 22 32 3 13 23 33 4 14 24 34 5 15 25 35 6 16 26 36 7 17 27 37 8 18 28 38 9 19 29 39 10 20 30 40 I/O1 I/O2 38 No.SFOD-OMT0009CN-B (1) I/O1 No. 1 +COM1 DC24V24V IN0IN10SETUPHOLDDRIVERESETSVON OUT0OUT8BUSYAREASETONINPSVRE*ESTOP*ALARM 21 +COM2 2 IN0 22 IN1 Bit No. ( 512) 3 IN2 23 IN3 Bit No.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

21 21 21 44.5 44.5 44.5 44.5 Refer to the page 68 for dimensions with connector cable. 20 Series SYJ500 Manifold Specifications Manifold Specifications Type 20 Type 40 Type 41 For internal pilot Model Type 21R Type 40R Type 41R For external pilot Single base/B mount Manifold type Common SUP, common EXH P (SUP), R (EXH) 2 to 20 stations Valve stations A port Porting specifications Valve

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

70 30 128 119 108 50 42 8-8-21 21 Series MXP Proper Auto Switch Mounting Position (Detection at stroke end) Operating Range MXP10/12/16 MXP6 Applicable bore size (mm) Auto switch model 6 10 12 16 Electrical entry from outside D-A9/A9V 5 3 (2.5) 5 3 (2.5) 5 3 (2.5) 5 3 (2.5) A A D-M9/M9V/F9W/F9WV Note) Figures in parentheses are the cases for D-M9, D-M9V switch types.

Modular Type Lubricators Series AL

U 34 40 54 A NPT 1/4 NPT 3/8 NPT 1/2 W 2.3 2.3 2.3 X M28 X 1 M38 X 1.5 M42 X 1.5 DD 34.5 41 CC 28.5 38.5 42.5 T 15.4 8 10.5 E 30 38 F 70(max.73) 83(max.86) 88(max.92) Z 6 7 7 AA 14 19 21 Y 30 31 35.5 H 5 3.5 1.5 S 5.4 6.5 8.5 AW20 AW30 AW40 Auto Drain mm Dimensions Model Port Size C NPT 1/8 NPT 1/4 GaugePort D 53 70 Q 46 54 L 41 50 J 239(max.242) 276(max.280) K 59 75 U 40 54 V 53 70 A

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

MXW

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (Stroke (mm)) 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Auto switch Nil Without

CG1

Air cushion (mm) E F ZZ WA TA S (F1) GA (E1) Bore (mm) 32 40 50 63 80 100 119 (127) 20 17 77 (85) 18 18 2 17 2 136 (145) 21 18 84 (93) 19 25 2 21 2 157 (169) 23 20 97 (109) 21 30 2 26 2 157 (169) 23 20 97 (109) 21 32 2 26 2 190 (204) 30 116 (130) 28 40 3 32 3 191 (205) 31 117 (131) 29 50 3 37 3 These dimensions and other dimensions not indicated here are the same as standard.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

or less Metal seal 50 or less Exhaust center 79.2 (4.4) 0 5 VQ54 1 63 or less Rubber seal 60 or less Plug lead unit 0 5 61.2 (3.4) VQ55 0 53 or less Metal seal 50 or less Pressure center 0 5 63.0 (3.5) VQ55 1 63 or less Rubber seal 60 or less Symbols 0 5 41.4 (2.3) VQ56 0 65 or less Metal seal 62 or less 2 position single Perfect (A) 4 (B) 2 0 5 45.0 (2.5) VQ56 1 78 or less Rubber seal 75

VQ5000

or less Metal seal 50 or less Exhaust center 79.2 (4.4) 0 5 VQ54 1 63 or less Rubber seal 60 or less Plug lead unit 0 5 61.2 (3.4) VQ55 0 53 or less Metal seal 50 or less Pressure center 0 5 63.0 (3.5) VQ55 1 63 or less Rubber seal 60 or less Symbols 0 5 41.4 (2.3) VQ56 0 65 or less Metal seal 62 or less 2 position single Perfect (A) 4 (B) 2 0 5 45.0 (2.5) VQ56 1 78 or less Rubber seal 75

Slider Type Ball Screw Drive/11-LEFS Series

: 75% 15000 15000 Duty ratio: 100% 12500 12500 10 10 7500 7500 Duty ratio: 100% 5000 5000 2500 2500 0 0 0 2 4 6 8 0 5 10 15 20 Work load [kg] Work load [kg] LEFS25SlB/Ball Screw Drive LEFS25SlB/Ball Screw Drive Horizontal Vertical 20 20 Duty ratio: 50% Duty ratio: 50% Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] 17500 17500 Duty ratio: 75% Duty ratio: 75% 15000 15000

44

17 21 44.8 39.4 7.6 18 M M L2 KM 21 17 21 48.1 41.7 8.5 19 L1 27 22 27 52.3 45.9 9.3 25 KF M Union Elbow: KFG2L H/DL L/LL Applicable tubing size (mm) O.D.

Series VQ Base Mounted Metal Seal/Rubber Seal

87.5 98 75 100 110.5 13 14 15 16 17 18 19 20 21 22 23 24 174 187.5 198 n L L1 L2 L3 163 187.5 198 196 212.5 223 218 237.5 248 240 250 260.5 251 262.5 273 273 287.5 298 185 200 210.5 207 225 235.5 229 250 260.5 262 275 285.5 284 300 310.5 How to Order Double check block VQ1000FPG F M5 C4 IN side port size OUT side port size Option None With blacket F C4 C6 One-touch fitting for