Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 7

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

, 100 16 15, 30, 45, 60, 75, 100 20 15, 30, 45, 60, 75, 100 25 15, 30, 45, 60, 75, 100 Strokes are available in 1mm increments by installing spacers in standard stroke cylinders.

Clamp Cylinder with Lock Series CLK1

D-G5NTL 75 + 50 (n-2) 15 75 30.5 38 43 50 A B 0 (1) 0.5 2 2 D-A3 D-G3, D-K3 100 + 100 (n-2) 35 + 30 (n-2) 35 100 D-B5, D-B6 33.5 23.5 25 25 Approx. Hs 25.5 (28.5) 38 43.5 50.5 D-A4 35 + 30 (n-2) 50 + 50 (n-2) 35 55 A B 0 2 3.5 3.5 D-G5NTL 27 25 26.5 26.5 Approx. Hs 33.5 38 43.5 50.5 A B 0 1.5 1.5 D-A3 D-G3, D-K3 23 24.5 24.5 Approx.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Refer to page 100 for part numbers. 75 Non-standard Motor High Rigidity Direct Acting Guide Series LJ1H20 Ground Ball Screw Motor Output 100W 15mm/10mm lead Vertical Mount How to Order Stroke 2 LJ1H20 F K W X10 PA 1 G Cable entry direction Top entry Power supply voltage Motor specification Cable entry direction Switch Left entry N.C. (B contact) 2 pcs.

F

55 KSH10-02S 22.5 54 21 7 48 36.3 10 1/4 22 63 KSH10-03S 22.5 55 21 7 48.5 36.3 3/8 22 81 KSH10-04S 22.5 21 7 57.5 49.5 36.3 1/2 24 75 KSH12-03S 24.5 22 8 57 50.5 46.1 12 3/8 24 92 8 KSH12-04S 24.5 22 60 52 46.1 1/2 D I M E N S I O N S E L B O W C O N N E C T O R: KSL Metric thread connection Male pipe thread connection Dimensions in mm Effective orifice (mm2) Mass (g) Applicable tube O.D

SL5200

Hastelloy C-22 Hastelloy C-22 PCTFE Dimensions inch (mm) SL5500 2.12 (53.8) Max. 5.6 (142.2) 1.5 (38.1) 2.25 (57.2) IN OUT 0.69 (17.5) 2.00 (50.8) A 0.88 (22.4) Connections A inch (mm) FV4 MV4 TW4 FV6 MV6 TW6 2 x 10-32 UNF depth 0.3 (7.6) (Mounting hole) (94.0) 3.70 (75.2) 2.96 (119.4) 4.70 (75.2) 2.96 Flow Characteristics SL5500 80 psig (0.55 MPa) Inlet pressure: 50 psig (0.34 MPa) SL5500

HRX-OM-X037

Date and time, Operation time and Alarm history are not reset. (1) Data reset setting screen Table 5.4-22 Data reset setting No.

AC Servo Motor Driver (Pulse input type)

No Initial value Recommended value Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 65536 32768 65536 32768 65536 32768 Electronic gear denominator *3 PA07 1 150 75 75 150 75 75 250 125 125 200 100 50 Regenerative option PA02 0 0 (Non)/ 0002 (LEC-MR-RB-032) 1 1 0 0 Rotation direction selection *4 PA14 0 (+Counter (+Counter (+Counter (+Counter

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Rubber seal 10.8 (0.6) VQZ242 20 or less 15 or less Metal seal 14.4 (0.8) VQZ312 22 or less 17 or less N.C. Rubber seal 16.2 (0.9) VQZ332 33 or less 25 or less 92 VQZ300 Metal seal 13.5 (0.75) VQZ322 22 or less 17 or less N.O.

Series HAW Water Cooled Aftercooler 1

Accessory (Option) Basic size (Applicable compressor kW) F With screw flange D With auto-drain Port size Symbol 2 Screw type Reciprocating type 2.2 7.5 15 22 37 55 75 04 06 14 20 30 Rc 1 2 Rc 3 4 Rc 1 1 2 Rc 2 3B flange HAW2 HAW7 HAW22/37 HAW55/75 HAW110 Caution on Design 7 22 22 Warning 1.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

86 97 108 141 L1 L2 L3 119 130 152 50 62.5 75 87.5 100 112.5 125 125 162.5 137.5 150 175 60.5 73 85.5 98 110.5 123 135.5 135.5 173 148 160.5 185.5 n L L1 L2 L3 14 16 17 18 21 22 24 13 15 19 20 23 163 174 196 207 218 251 262 284 185 229 240 273 187.5 187.5 212.5 225 237.5 262.5 275 300 200 250 250 287.5 198 198 223 235.5 248 273 285.5 310.5 210.5 260.5 260.5 298 How to Order Double

Compact 5-Port Solenoid Valve

solenoids available) Lead wire length (L1/L2/L3) 24 24 stations 22 22 stations Symbol Type 1 0.6 m 2 1.5 m 3 3 m SI unit output polarity, End plate type (S6m) Refer to page 63.

MVGQ

MVGQM, MVGQL Common Dimensions ML2B Applicable solenoid valve B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z Bore size (mm) Standard stroke (mm) TA TB U Over 10 st 10 st C J G5-S 12 6 29 50 13 18 58 39 22 56 2 5 36 40 14 7 12 29 5 48 20 30 16 M4 x 0.7 10 M4 x 0.7 M4 x 0.7 10, 20, 30, 40, 50, 75, 100 16 CV 8 33 54 64 15 22 43 25 62 2.5 5.5 38 42 16 8 13 33 7 52 23 30 18 M5 x 0.8 13 M5

2/3 Port Valve

system Direct operated Pilot operated diaphragm Pilot operated disk Pilot operated Series VX21/22/23 VXD21/22/23 Single unit Single unit VXP21/22/23 VXR21/22/23 Body Single unit N.C.

Title not found

IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Series ZFB Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Metric size 3/16" 20 22 20 22 30 30 75 40 100 62 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 1/4" 1/4" Inch size (2) 3/8" 1/2" Specifications Fluid Air/Nitrogen Negative pressure 0.5MPa 0 to 60C (Non-freezing) 30m 0.15MPa Nylon/Soft Nylon/Polyurethane

Compact Cylinder with Solenoid Valve/

D (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQM5010 CVQM325 45 M5 x 45L M6 x 60L 60 15 10 45 x 45L x 60L 60 20 15 50 x 50L x 65L 65 25 20 55 x 55L x 70L 70 30 25 60 x 60L x 75L 75 35 30 65 x 65L 12.5 x 80L 80 9 40 35 70 x 70L x 85L 85 45 40 75 x 75L x 90L 90 50 45 80 x 80L x 95L 95 75 50 85 x 85L x 120L 120 -100 75 110 x 110L x 145L 145 CVQM6310

MXW Series Long Stroke Slide Table

A F L=200mm F F L=200mm A L L L L=200mm A MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 0.03 0.03 0.10 MXW12 MXW8 MXW16 MXW12 MXW8 MXW16 0.08 Table deflection quantity mm Table deflection quantity mm Table deflection quantity mm MXW12 MXW8 MXW16 0.02 0.02 0.06 0.04 0.01 0.01 0.02 0 0 0 100 75 50 25 100 20 40 60 75 50 25 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N =

Slider Type/Ball Bushing Bearing

24 H 46 54 63 HA 33.5 42.5 46 HB 33.5 41.5 46 HC 45 53 61.5 HG 17 16 25 HP 42 50 58.5 HT 19 23.5 28 J M5 x 0.8 M5 x 0.8 M6 x 1.0 L 106 108 138 LL 44 48.5 56 LW 71.5 75.5 86 M M5 x 0.8 M5 x 0.8 M6 x 1.0 MM 8 8 10 N 16.5 18 20.5 NL 15 15 18 NT 8 8 9 EA 26.5 26.5 29 CY1L CY1H15 CY1H20 CY1H25 CY1H CY1H Model P M5 x 0.8 Rc1/8 Rc1/8 PA 50 50 65 PB 62 65 75 PP 21 23 27 S 161 169 209 TW 65 70 75

CG1

18 22 14 16 20 22 25 30 35 43 29 33 40 49 60 74 56 64 28 32 38 45.5 54 63.5 79 96 99.5 120 8 10 12 14 16 18 18 22 Up to 200 Up to 300 Up to 300 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 With rod boot ZZ Bore (mm) Applicable pin part no.

44

14 17 22 14 17 22 14 17 22 19 22 16.1 19.9 16.1 19.9 17.2 21 20.1 23.3 24.7 25 26.4 30.6 25 26.4 30.6 25 26.4 30.6 25 26.4 30.6 29.3 33.3 17.4 19.6 17.4 19.6 19.6 21.8 24.7 26.3 27.3 29.6 30.6 33.5 29.6 30.6 33.5 29.6 30.6 33.5 29.6 30.6 33.5 36.3 39 9 18 9 18 12 21 22 30 42 37 47 74 36 46 73 38 49 75 40 51 77 75 96 4 2.5 1.8 1.4 7 8 14.5 5 KG 4 3 2.3 2.3 Applicable tubing M L1 KFG2 KFG2