VCW

(mm) Electrical entry P Port size A B C D E F H K L M N Model Grommet: G Conduit: C DIN terminal: D Conduit terminal: T Q R Q R Q R S Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 45 44 43 58 40.5 46.5 99 43 66 83 1/8 VCW21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 46 44 44 58 41.5 46.5 99 44 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 56.5 46 54.5 60 52 48.5 101 54.5 68 99 1/4

Compact Guide Cylinder

(M3, M5 type only) Use SMCs recommended grease. Grease pack part number: GR-S-010 (10 g) M3, M5, Rc port, NPT port Use the correct tightening torques listed below.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

(M5 thread) F kit: D-sub connector 420 20 1 to 12 stations Side 1 to 12 stations 26P P kit: Flat ribbon cable 420 20 20P 1 to 9 stations C8 (For 8) 10-SS5Q13-10-SQ131 J kit: Flat ribbon cable PC wiring system compatible L3 (For 3.2) L4 (For 4) L6 (For 6) L5 (M5 thread) 1 to 8 stations 420 20 Top Note 2) 1 to 12 stations L kit: Lead wire 460 35 1 to 8 stations 475 20 S kit: Serial transmission

Electric Actuator Triple Axis P&P Unit

+191 D section detail (S=2/1) L Stroke+214 26 10 10 (92) 14 2-M5 x 0.8 Effective screw length 10 61 60 57 31 12 6 Reference plane 63.5 62.5 3 3 130 4-M5 x 0.8depth10 F-M5 x 0.8depth10 3-4H10depth5 4-6.5 20 20 12.5 C 31 63.5 13.5 E-100 4H10depth5 5 (26) (44) 110 100 Stroke69 (Stroke+131) 10 208 (For 200 to 1000 strokes) 85 (For 100 to 150 strokes) 92 C section detail (S=2/1) Dimension table

V

I N G S C3 C4 C6 M5 N1 N3 N7 C3 C4 C6 M5 N1 N3 N7 A S S E M B LY VVQ1000-R-1-C6 VVQ1000-52A-C8 (VQ1000) O F B A C K P R E S S U R E A S S E M B LY [-B] VVQ1000-57A DIN R A I L M O U N T E D B R A C K E T [-D] VA C U U M E J E C T O R U N I T C H E C K VA LV E F O R P R E V E N T I O N O F S I L E N C E R (EXH P O R T) VVQ1000-JA BM (VQ1000) VVQ1000-18A Courtesy of Steven Engineering, Inc.

1

+ Stroke NA C 4 x J Female thread MM Depth A1 H ZZ + Stroke Female rod end Female Rod End [mm] [mm] Bore size A AL B1 C D E F H H1 J KA MM NA Bore size A1 H MM 20 14.5 12 13 15.5 8 14 0 0.1 2 21 5 M4 x 0.7 depth 7 Width across flats 6 length 3.5 M8 x 1.25 24 20 8 6.5 M4 x 0.7 25 17.5 15 17 16.5 10 14 0 0.1 2 24 6 M5 x 0.8 depth 7.5 Width across flats 8 length 3.5 M10 x 1.25 27 25 8 6.5 M5

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5

10

J dimension is different from the value which is subtracted stroke from G dimension. 8 MHL2 Series Dimensions MHL2-16DmZ 8 8 10 2 x M5 x 0.8 thread depth 7 (Mounting thread) D Closed J View K (Fingers closed) The above figure shows the MHL2-16D1Z/16D2Z.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 12 12.5 5.5 12 6.3 26 Operating port 2 x M5 x 0.8 Other dimensions are the same as basic type. 804 MXQ 1322Air Slide Table Basic Dimensions: MXQ8 13222 x M3 x 0.5 thread depth 4 Operating port 2 x M5 x 0.8 2 7 3.5 I J Vacuum suction port M5 x 0.8 8 Max. 11 (Retraction end adjuster) 5.5 4 6.5 Note 1) If long bolts are used, they can touch the

CHKD/CHKG

J A + Stroke M M Rod end male thread CHKDB20, 25 CHKDB32 to 100 Water resistant type S N g C B + Stroke h + Stroke A + Stroke Rod end male thread (mm) B C D E F G H J K L M P Q R A Bore size (mm) 20 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 9.5 depth 5.4 43 1/8 16.5 6 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6 11 depth 6.5 63 1/4 19.5

Mechanical Valves Series NVM, NVFM, NVZNI

( 2 6 k 9 ) 0 216 in (5 5mm) 0 039 in. (1mm) A B c D E F G H J K 3.92 '99.5',13.05 '77.51 0.96 0.87 (221 0.06 (1.s) o.12 (3) 't.57 (40) 0.96 24.51 1.20 t30.5) 0.24 (6) Millimeters in Parentheses Millimeters in Parentheses MECHANICAL VALVES HOWTO ORDER S NVM430-N01-34 Series NVM NVM430-N01-33 F O F 4 4 1 l b s ( 2 k g ) T T 900 oi (J !

IIIIIII

( 2 6 k 9 ) 0 216 in (5 5mm) 0 039 in. (1mm) A B c D E F G H J K 3.92 '99.5',13.05 '77.51 0.96 0.87 (221 0.06 (1.s) o.12 (3) 't.57 (40) 0.96 24.51 1.20 t30.5) 0.24 (6) Millimeters in Parentheses Millimeters in Parentheses MECHANICAL VALVES HOWTO ORDER S NVM430-N01-34 Series NVM NVM430-N01-33 F O F 4 4 1 l b s ( 2 k g ) T T 900 oi (J !

ML2B

ML2B32 ML2B40 RS H A RZQ MI W S Stroke Adjusting Unit CEP1 With shock absorber: CE1 ML2B Bore size S Stroke L CE2 TT h ML2B EB FF EA Stroke adjusting unit C J G5-S CV ED MVGQ CC TA FA (Absorber stroke) RB FB FC J Shock absorber Cushion needle EC DFH -X EY 20Data (mm) TT Max. 16.5 Max. 20 Max. 25 TA 7 12 12 FH 12 16 16 FF 6 6 6 FC 13 17 17 FB 33 43 43 FA 46.7 67.3 67.3 EY 53.5 67 81.5 EC

ML2B

1 Stroke Reading Rodless Cylinder with Brake Series ML2B 25, 32, 40 RE A B REC CX CY Transfer Transfer Transfer Transfer MQQ M RHC MK(2) RS Q G Position feedback RS H A RZQ MI W S Rodless cylinder With brake CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-13-1 2 Stroke Reading Rodless Cylinder with Brake Series ML2B 25, 32, 40 For measuring intermediate stops Incorporating a brake

TABLE OF CONTENTS

Body Brass Body S. S.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

20MC NA NB MA MB KA C B Data K H S + Stroke ZZ + Stroke (mm) Stroke range Bore size (mm) B MM I K M MA MB MC NA NB P S Y ZZ H J D C KA GA GB 20 25 32 40 50 63 80 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 11 12 22 25 25 25 25 17 17 22 30 35 35 38 11 11 16 16 16 16 20 4 4 4 4 5 5 6 10 10 12 12 15 15 23 M8 x 1.25 M8 x 1.25 M10 x 1.5 M16 x 2 M20 x 2.5 M20 x 2.5

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

26P Side 420 20 P kit: Flat ribbon cable C8 (For 8) Option Built-in silencer, direct exhaust 20P 1 to 9 stations VQC J kit: Flat ribbon cable SS5Q13SQ130 SQ131 420 20 1 to 8 stations PC Wiring System compatible L3 (For 3.2) L4 (For 4) L6 (For 6) L5 (M5 thread) SQ (2) 460 35 1 to 12 stations L kit: Lead wire Top VQ0 1 to 8 stations 475 20 S kit: Serial transmission Note 1) One-touch fittings

CJP

MB MB1 Symbol Bore size (mm) S A A' B B' D F F' GA GB H J K MM NN R 5 st 10 st 15 st 20 st 30 st CA2 6 10 15 35.5 40.5 45.5 30.5 7 M10 x 1.0 7 9 14 14 3 8 6.5 6 6 17 6 8 M3 x 0.5 35.5 40.5 45.5 55.5 30.5 M12 x 1.0 8 10 12 15 17 5 8 6.5 6 7 20 7 8 M4 x 0.7 CS1 M14 x 1.0 35.5 40.5 45.5 55.5 30.5 10 12 14 20 19 6 10 8.5 6 7 24 9 8 M5 x 0.8 C76 Symbol Z C With auto switch Bore size (mm) W 5

CJP

Symbol Bore size (mm) A A' B B' D E F GA GB H J R MM FC NN FT FX FY FZ 6 7 9 14 14 3 10.5 8 6 6 17 6 7 M3 x 0.5 3.4 M10 x 1.0 1.6 24 16 32 10 10 12 15 17 5 13 8 6 7 20 7 8 M4 x 0.7 4.5 M12 x 1.0 1.6 28 18 37 15 12 14 20 19 6 15.5 10 6 7 24 9 10 M5 x 0.8 5.5 M14 x 1.0 2.3 36 22 49 Symbol S Z With auto switch W Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st FI P