Serial Transmission System Series EX250 Series EX500

elbow 6 One-touch fitting M5 threads Mixed size for elbow piping L3 L4 8 One-touch fitting L6 Input block COM.

Series AK1000

It is recommended to perform a helium leak test on all face seal connections and tube welds per the industry standards (refer to SEMI F1). Selection Warning 1. Conrm the specications.

Digital pressure switch for energy-saving control ejector

energy-saving control ejector MODEL / Series / Product Number ZSE10ZL3ZL6 series Table of Contents Safety Instructions 2 How to order read wires 9 Summary of Product parts 10 Definition and terminology 11 Wiring 15 Wiring 15 Internal circuit and wiring example 16 Easy Setting 17 Measurement mode 17 Function Setting 20 Function selection mode 20 Default setting 20 F0 Unit selection function 23 F1

KK/KK13

10.1 6 -06H 4.7 14 12 18.4 1/8 38.6 13.2 18.5 15.7 8 -08H 16 14 22.6 6 39.7 17.6 21 22.6 10 -10H 19 17 12.8 22.3 17 10.1 6 KK4P-06H 4.7 14 12 46.2 22.6 23.0 18.5 19.8 8 -08H 6.2 16 14 25.2 1/4 35.3 27.1 21 27.6 10 -10H 7.7 19 17 47.5 30.0 40.2 -12H 9 50.9 22 12 21 19 44.4 41.2 KK6P-12H 9.2 56.1 31 1/2 106.2 25 16 50.7 -16H 13 26 25.7 Applicable tubing D Elbow type with One-touch fitting L3

Rubber seal 5 Port Solenoid Valve Series SYJ7000

length) 65 31.5 [38.5] Max. 10 57.5 16.1 46.2 31.1 M8 x 1 36 18.5 Approx. 300 (Lead wire length) 42.6 [49.6] 2-3.2 (For mounting) 2-3.2 127.2 [131.6] 2-3.2 2-3.2 (For mounting) (For mounting) 107.6 [112] (For mounting) 125.4 145.4 147.2 110.6 97.6 65.6 35 35 35 35 21 21 25 21 25 21 Pg7 28 25 28 25 28 Applicable cable O.D. 3.5 to 7 28 Refer to the page 91 for dimentions with connector cable. 53

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

weight : Rod end male thread 10g : Rubber bumper 2g : Double clevis 92g 25 12 16 20 Option g g g g oz oz oz oz 1.5 6 12 3 0.05 0.21 0.42 0.11 Male thread Rod end thread Note 2) 1 4 8 2 0.04 0.14 0.28 0.07 Nut Total 201g 0 -2 -3 1 -0.07 -0.11 0.04 0 Single rod Rubber bumper Note 3) 0 -2 -2 -1 -0.07 -0.07 -0.04 0 Double rod 55 159 181 65 5.61 6.38 2.29 1.94 Standard Foot (including bolt) 53

S Couplers Series KK/KK13

10.1 6 -06H 4.7 14 12 18.4 1/8 38.6 13.2 18.5 15.7 8 -08H 16 14 22.6 6 39.7 17.6 21 22.6 10 -10H 19 17 12.8 22.3 17 10.1 6 KK4P-06H 4.7 14 12 46.2 22.6 23.0 18.5 19.8 8 -08H 6.2 16 14 25.2 1/4 35.3 27.1 21 27.6 10 -10H 7.7 19 17 47.5 30.0 40.2 -12H 9 50.9 22 12 21 19 44.4 41.2 KK6P-12H 9.2 56.1 31 1/2 106.2 25 16 50.7 -16H 13 26 25.7 Applicable tubing D Elbow type with One-touch fitting L3

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

.@ \71) (&.5) \92) 4.O4 (102.5) 4.45 (113) 4.46 (n.5) \ta) (144.5) 6.10 (155/ 6.52 (165.5) fi76) 7.34 {1B6.5) 7.76 (1e7 ) 8.17 (207.s) 8.54 (218) s.oo (228.s) L3 1.24 (31.5) 1.65 2.07 \42) (52.5) 2.44 (63) 2.89 3.31 3.72 (84) (e4.s)(t05) 4.55 4.96 (r15.5) (126) 5.37 (i365)5.79 6.20 (147) (157.5) (168) 7.03 (178.5) 7.44 (i8s) 7.6 8.27 (r9s.5) (2ro) 8.68 (220.8 Tgpe 41 Manifold: Side Ported

IDX-OM-Y002

(Tightening torque: 1.0 Nm) Terminal width 9.9mm PE L3 L2 L1 24 23 6 5 22 21 Remote operation Error signal Ground RUN signal Power supply (to be connected to the user's equipment) IDF190D/240D Series 3.2Installation 3-5 IDX-OM-Y002 Chapter 3 Transportation and installation 4) Mount the front panel back. [Remote control] Voltage of AC200V is present on the terminal block.

PSxx-OMR0001CN

2 () [()][] 1.5 F42.51 m3 m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -19No.PS-OMR0001CN-J 2 ISA3-() ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 C(4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -20No.PS-OMR0001CN-J 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3

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.@ \71) (&.5) \92) 4.O4 (102.5) 4.45 (113) 4.46 (n.5) \ta) (144.5) 6.10 (155/ 6.52 (165.5) fi76) 7.34 {1B6.5) 7.76 (1e7 ) 8.17 (207.s) 8.54 (218) s.oo (228.s) L3 1.24 (31.5) 1.65 2.07 \42) (52.5) 2.44 (63) 2.89 3.31 3.72 (84) (e4.s)(t05) 4.55 4.96 (r15.5) (126) 5.37 (i365)5.79 6.20 (147) (157.5) (168) 7.03 (178.5) 7.44 (i8s) 7.6 8.27 (r9s.5) (2ro) 8.68 (220.8 Tgpe 41 Manifold: Side Ported

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.@ \71) (&.5) \92) 4.O4 (102.5) 4.45 (113) 4.46 (n.5) \ta) (144.5) 6.10 (155/ 6.52 (165.5) fi76) 7.34 {1B6.5) 7.76 (1e7 ) 8.17 (207.s) 8.54 (218) s.oo (228.s) L3 1.24 (31.5) 1.65 2.07 \42) (52.5) 2.44 (63) 2.89 3.31 3.72 (84) (e4.s)(t05) 4.55 4.96 (r15.5) (126) 5.37 (i365)5.79 6.20 (147) (157.5) (168) 7.03 (178.5) 7.44 (i8s) 7.6 8.27 (r9s.5) (2ro) 8.68 (220.8 Tgpe 41 Manifold: Side Ported

Actuation: 1 (2-Position Single), Electrical Entry: L (L-type Plug Connector), Lead Wire Length: 3 (300mm), Manual Override: Non-locking Push Type, A,B Port: C6 (ø6 One-touch Fitting, Metric), Thread Type: Rc, Bracket: F2 (w/Side Bracket)

Actuation: 1 (2-Position Single), Electrical Entry: L (L-type Plug Connector), Lead Wire Length: 3 (300mm), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: T (NPTF), Bracket: F2 (w/Side Bracket)

Actuation: 2-Position Single, Electrical Entry: L-type Plug Connector, Lead Wire Length: 300mm, Manual Override: Non-locking Push Type, A,B Port: ø6 One-touch Fitting, Metric, Thread Type: Rc, Bracket: w/Side Bracket

Actuation: 2-Position Single, Electrical Entry: L-type Plug Connector, Lead Wire Length: 300mm, Manual Override: Non-locking Push Type, A,B Port: 1/8, Thread Type: NPTF, Bracket: w/Side Bracket

3 Port Solenoid Valve Metal Seal Series VZ200 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Side/Base (Same side of solenoid) Piping direction/ Location Port size P, E port VT Top/Valve Side/Base (Opposite side of solenoid) VV3Z2-50-0612(A) port M5 x 0.8, Rc 1/8 C4, C6 C4, C6 Rc 1/8 VZ215VZ225Base mounted (Without sub-plate) VVZ200-31A-2 VVZ200

5 Port Solenoid Valve Series SV

Specification SV1000 SV2000 Applicable series Stacking type cassette base manifold Manifold type Common SUP, EXH 1 (P: SUP)/3, 5 (E: EXH) type Valve stations (maximum) 18 stations 20 stations Max. number of solenoids 18 points 26 points 1(P)/3, 5 (E) port C8, N9 C10, N11 Port size C3, C4, C6 N1, N3, N7 C4, C6, C8 N3, N7, N9 4(A)/2(B) port Flow Characteristics Flow characteristics Port size

Actuation: 1 (2-Position Single), Barrier: w/o Barrier, Electrical Entry: L (Plug Connector Type), Lead Wire Length: 3 (300mm), Manual Override: Non-Locking Push, Port Size: 01 (1/8), Thread Type: N (NPT), Bracket: F1 (w/Foot Bracket)

Actuation: 2-Position Single, Barrier: w/o Barrier, Electrical Entry: Plug Connector Type, Lead Wire Length: 300mm, Manual Override: Non-Locking Push, Port Size: 1/8, Thread Type: NPT, Bracket: w/Foot Bracket