Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

screw R R B B B B B B B B X X P P 18.7 7.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

REC

RE A B Model Recommended Speed Controller REC Model Elbow type Straight type In-line type CX REC20 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REC25 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 CY REC32 AS2201F-01-06-X214 AS2301F-01-06-X214 AS3001F-08-X214 REC40 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way

REA/REB

49.5 65.5 32 55 55.5 83 82.5 60.5 77.5 RS H A 40 61 61.5 94 93.5 66.5 88.5 RZQ MI W S Operating Range Bore size (mm) Auto switch model CEP1 25 10 32 40 15 20 D-A7/A8 6 6 6 6 6 6 CE1 D-F7/J7/F79F 3 3 3 3.5 4 3 Since this is a guideline including hysteresis, not meant to be guaranteed.

REA/REB

6 6 9 D-Y5/Y6/Y7 5 5 5 6 Since this is a guideline including hysteresis, not meant to be guaranteed.

REA/REB

Speed 300 mm/s Proper Auto Switch Mounting Position for Stroke End Detection Auto switch operating range (mm) Piping port surface Basic Type REA Direct Mount Type REAR Direct Mount Type REBR D-Y7W D-Y7WV Auto switch model D-Z7 D-Z80 D-Y5 D-Y6 D-Y7P D-Y7PV Cylinder model REAH10 8 6 A B REAH15 6 5 REAH20 6 5 REAH25 6 5 Proper auto switch mounting position (mm) REAHT25 6 5 A B Auto switch model

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

Information

ASG22F-M5-04 ASG22F-M5-06 ASG32F-01-04S ASG32F-01-06S ASG32F-01-08S ASG42F-02-06S ASG42F-02-08S ASG42F-02-10S ASG52F-03-08S ASG52F-03-10S ASG52F-03-12S ASG62F-04-12S 4 10.6 23 28.8 11.6 25.2 18.2 M5 x 0.8 8 15.8 37.2 33.7 33.7 30.2 6 13 23.6 30.6 14 34.4 18.8 4 10.6 24.8 32 14.3 39.4 18.2 1/8 12 18.6 44 39 40 35 6 13 25.4 32.6 14.3 42.4 18.8 8 15 27.5 35.5 16 52.4 20.9 6 13 27.3 36.2 17.9

VQ4000

pilot port) 44 62 9 9 91 44 62 Station number 50.5 59 2-Rc 1/8 (External pilot port) R4.5 R4.5 50.5 9 9 U side entry (LU) U side D side D side U side n 15 X X n X 12 12 12 12 8 B 2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

EXH SS5Y7-20 1/4 C10 3.60 0.93 0.88 0.27 3.60 0.93 2 to 20 (1) Valve stations Note) Values for 5 stations manifold with a 2 position single type valve. 4/2 (A/B) Location Valve 1,3,5 (P,EA,EB) Port 1/4 1/8 C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/4 C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) Port size 4,2 (A,B) Port Manifold

Miniature Regulator

0.8 0.9 ITV Inlet pressure (MPa) IC Construction ITVH ARJ310-01 ARJ310F-01 ITVX 6 17 3 PVQ 8 11 VY1 15 1 VBA VBAT 7 9 AP100 Material Note Component Parts 14 4 Description Body Valve guide Bonnet Piston Valve Adjusting screw Panel nut Hexagon nut Adjusting spring Valve spring Spring holder Mini Y-seal O-ring Lock washer Bracket Pressure gauge Cassette No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15

Shock Absorbers and Rate Controls

70 3, N/A 38 N/A 6 24 6.0 11.2 0.73 230 6.38 fi r.m'N tz.lo l" 12.70.3ril/A 38 N/A 22 6 6.0 Notei (S) denotes model available wrth spring.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

VZA2000

Rc NPTF, NPT G Nil T F 3 position closed center 3 position exhaust center Caution Refer to pages 5-11-2 to 5-11-6 for Safety Instruction and Solenoid Valve Precautions. 5-3-5 6 Series VZA4000 Dimensions: Body Ported 2 position single: VZA4121-01 2 position double: VZA4221-01 2-3.4 Mounting hole 2-3.4 mounting hole Pilot port (A side) Pilot port (A side) Pilot port (B side) Manual override

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

A (2) Model T D1 H1 L4 (1) Applicable tubing O.D. d (g) Weight H2 D2 L1 L2 L3 M AS121F-M5-06W2 AS221F-01-06W2 AS221F-01-08W2 AS221F-01-10W2 AS221F-02-06W2 AS221F-02-08W2 AS221F-02-10W2 AS321F-02-06W2 AS321F-02-08W2 AS321F-02-10W2 AS321F-02-12W2 AS321F-03-06W2 AS321F-03-08W2 AS321F-03-10W2 AS321F-03-12W2 AS421F-04-10W2 AS421F-04-12W2 11.6 6 9 13.5 22.9 11.7 28.8 26 25.2 22.4 18.1 8 6 9.6 M5

PFxx-OMJ0005CN

8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

AS231F-U01(3.2, 4, 6, 1/8 and 5/32) are made of POM. 15-9-21 4 Series AS Elbow Type/Metric Size H Applicable tubing O.D. d (Hexagon width across flats) A L4 D1 L3 D2 M Connecting thread T L1 L2 T Uni thread H D1 D2 L1 L2 L3 L4 A Max. Min. Max. Min.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

1 Direct Operated Solenoid Valve Metal Seal Series VS4 10 Model Flow characteristics Max. (1) operating cycle (cpm) (3) VK Response (2) time (ms) Weight (kg) Model Port size Rc (Nominal size) Number of positions JIS Symbol P A/B A/B EA/EB VZ C [dm 3/(sbar)] C [dm 3/(sbar)] b b Cv Cv AC DC AC DC AC DC VS4110-01 (6A) 3.2 3.2 0.42 0.37 0.86 0.80 1 8 2 (Single) 1,200 180 13 or less 45 or less

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Flow Rate and Sonic Conductance Model AS1002FS AS2002FSAS2052FS AS3002FS AS4002FS Metric size 3.2 4 6 4 6 6 8 6 8 10 12 10 12 Tubing O.D.