SMC Corporation of America
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Applicable model Minimum operating flow rate (50/60 Hz) [L/min] HRS-BP005 HRS090-ll-20/40 29/45 To circulating fluid return port r t r e q To circulating fluid outlet r t w r Parts List No.

52-SY5140 (R) -LL-02 L 104 (Lead wire length) Insulation: Red (+) Insulation: Black () 0.3 mm2 4.1 34.5 37.2 Cable type (TT) 52-SY5140 (R) -TT-02 Max.10 L 120.8 (Lead wire length) Lead wire marking No.1 (+), No.2 () 0.75 mm2 5.9 14 ATEX Compliant Base Mounted Type Series 52-SY5000 Dimensions 2-position double L plug connector (L) 52-SY5240 (R) -L-02 19 18 9.5 2 x 4.3 (Mounting holes) 37.2

E 3 Auto-drain Pressure gauge mounting Port size 02 03 04 06 10 ARJ MR unit 1 None With auto drain 0 Flow direction: Right to left Nil Flow direction: Left to right Applicable model 1/4 3/8 1/2 3/4 1 Nil E2 E3 E4 E6 E10 R 3 4 5 6 AMR3 00-02 to 03 AMR4 00-02 to 04 AMR5 00-04 to 06 AMR6 00-10 AR425 to 935 Adapter assembly port size (2 pcs.)

R Y + Stroke View D-D' 63 to 100 Reinforcing bracket Mounted in case of 301mm or longer strokes Front mounting flange Width across flats HT B HS C D View C-C' HU D' C' A R Y + Stroke View D-D' Auto switch mounting position Auto switch mounting height (mm) (mm) D-A72, A7H, A80H D-A73C, A80C D-F7, F7V, F7W D-F7WV, F7BAL D-J7 D-A7H, J79W D-A80H, F7BAL D-F7, F7F D-J79, F7NTL D-F7W D-A7, A8 D-F7V

D-F79F D-F7NTL D-BAL D-A79W D-F7WV D-F7V D-F7BAVL D-J79 D-F7W D-J79W D-A7 D-A80 D-A7H D-A80H D-F7 12 to 25 32 to 50 D-A9V D-M9V D-F9WV D-A9 D-M9 D-F9W D-F9BAL 32 to 50 Proper Auto Switch Mounting Position Auto Switch Mounting Height (mm) D-A7H D-A80H D-A73C D-A80C D-F7 D-F79F D-J79 D-F7V D-J79C D-F7W D-J79W D-F7WV D-F7BAVL D-F7BAL D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

D-C80 D-C73C, D-C80C Reed BMA2-020 BMA2-032 BMA2-040 BMA2-025 D-H7A1, D-H7A2, D-H7B, D-H7C D-H7NW, D-H7PW, D-H7BW D-H7LF, D-H7NF, D-H7BAL Solid state Reed Solid state D-B53, D-B54, D-B64, D-B59W D-G5NTL BA-32 BA-04 BA-01 BA-02 Reed Solid state D-A33, D-A34, D-A4 D-G39, D-K39 BD1-02M BD1-02 BD1-04M Precautions Be sure to read before handling.

Brass 1 Electroless nickel plated Body NBR, Aluminum alloy 2 Valve Stainless steel 3 Spring Free flow Fitting Male thread Brass 4 Electroless nickel plated Spacer Stainless steel 5 Stopper NBR 6 O-ring 7 Cassette NBR 8 Seal Stainless steel + NBR 9 Gasket Bushing Type: AKB Auto Switch D-B7/B8 D-G7/K7 R 1/4, 3/8, 1/2 NPT 1/4, 3/8, 1/2 R 1/8 NPT 1/8 Free flow Female thread Male thread Description

Left IN1(P) Piping VHS500-06 VHS501-06 VHS400-04 VHS401-04 VHS400-03 VHS401-03 VHS400-02 VHS401-02 Right IN1(P) 3 4 1 2 3 8 1 4 Port size Effective area (mm2)(CV) Weight (kg) 93(5.22) 57(3.20) 35(1.97) 21(1.18) 105(5.90) 76(4.27) 54(3.03) 35(1.97) 0.29 1(P)2(A) 2(A)3(R) 0.34 0.25 0.27 Left or right to the front face of the handle.

Symbol 2 to 8 10 to 16 40, 50 20 to 32 U C D B Flat Flat with ribs Deep Bellows B4 M4 x 0.7 Symbol Applicable cylinder model Female thread M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 D R D R X11 ZC(D)UK 10 Application: Refer to Table (1). Nil ZC(D)UK 16/32 M10 x 1.25 B10 Note) -X11 Pad: 2 to 8 diameter and flat style only available.

: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-H7 D-G59F 5 5 5.5 6 7 7.5 8 7.5 D-B5/B6 BA -04 BA -05 BA -06 BA -08 BA -10 BA -32 BA -02 BA -01 CX D-G5NBL 35 40 45 45 45 40 50 45 D-G5/K5 D-B7/B8 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 BM1 -06 Since this is a guideline including hysteresis, not meant to be guaranteed.

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.

O e b u t ) h c n i ( . n i M e l o h . a i d e z i S d . o N t r a P D L 1 A M . t W ) f g ( 8 / 3 1 1 7 0 R R K 3 6 . 0 ) 6 1 ( 5 6 . 1 ) 2 4 ( 9 7 . 0 ) 0 2 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 0 2 4 / 1 2 / 1 3 1 7 0 R R K 3 6 . 0 ) 6 1 ( 5 6 . 1 ) 2 4 ( 1 7 . 0 ) 8 1 ( 1 9 . 0 ) 3 2 ( 8 2 4 / 1 2 / 1 3 1 1 1 R R K 2 8 . 0 ) 8 . 0 2 ( 3 8 . 1 ) 5 . 6 4 ( 9 8 . 0 ) 5 . 2 2 ( 4 9 . 0 )

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Manifold 10 SS5Q13 08 FD2 D CE-compliant Clean series Nil Q CE-compliant Stations 1 station 01 1(P), 3(R) port size 24 Note) 24 stations Nil 1(P), 3(R) port 8 One-touch fittings 1(P), 3(R) port 5/16" One-touch fittings Note) The maximum number of stations depends on the type of electrical entries. 00T Option Nil 02 to 24 Note

N 3 ISE80 -0.11MPa ZSE80 0-101KPa ZSE80F -100100KPa ISE80H -0.12MPa Y K + T + 2 02 R1/4 N02 NPT1/4 F02* G1/4 G01 Rc1/8 A2 URJ1/4 B2 TSJ1/4 A (ZS-24-A/ZS-35-A) B *(ZS-24-D) C D + F02 ISO228-1 1 *1 L M SI*2 P (psi)*1 1 2 ISE80H: MPa MPa kpa N NPN1 P PNP1 A NPN2 B PNP2 R NPN2+/ T PNP2+/ S NPN2+/ V PNP2+/ / ZS-24-A ZS-24-D ZS-35-A ZS-35-C ZS-35-B ZS-35-F ZS-35-E + -9No.PS-OMM0002CN-F

Option Body material Nil N Body only With silencer 1 2 ADC12 (Aluminum) SCS14 (Stainless steel) For AIR EXH: AN200-02 Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Diaphragm material 02 03 1/4 (8A) 3/8 (10A) 1 PTFE (Fluoro resin) JIS Symbol Type Thread

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with