MHZ2/MHZJ2 When closed 8.8 When open 22.8 7 Standard Type/Series MHZ2 Finger Position/Options Side Tap Mounting Type [1N1] Through Hole in Opening/Closing Direction [2N2] 4-MM Attachment mounting thread C C B A 4-H Attachment mounting hole S S O O B A Unit: mm Unit: mm Model A 3 4 5 6 Model A 3 4 5 6 B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 B 5.7 7 9 12 H 2.9 3.4 4.5 5.5 1
40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure in tank [kPa] Vacuum pressure in tank [kPa] ZL6H ZL6M ZL3H ZL3M Time to reach vacuum [S] 1 2 3 4 5 6 0 Time to reach vacuum [S] 1 2 3 4 5 6 7 8 9 10 0 Break Flow Rate Characteristics (Representative value) Vacuum Breaking Time (Representative value) Break flow rate supplied to vacuum area at different needle openings and at each
m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ7A MSQ50 MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N
P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.
'a,z .s _g ic F S sd 9a' 6); rF G < 6 i 8z_ '62 _::"; ?
'a,z .s _g ic F S sd 9a' 6); rF G < 6 i 8z_ '62 _::"; ;x E !
-6 = 9.0 x 10-6 (kgm2) Moment of inertia around Z axis IA = IZ1 + m1r12 X 10-6 z r2 Z2 B part r2 = 47(mm) Calculation of weight m2 = d x e x f x Specific gravity m2 = 5 x 10 x 12 x 2.7 x 10-6 = 0.002 (kg) Moment of inertia around Z2 axis IZ2 = {m2 (d2 + e2)/12} x 10-6 IZ2 = {0.002 x (52 + 102)/12} x 10-6 = 0.02 x 10-6 (kgm2) IB = 0.02 x 10-6 + 0.002 x 472 x 10-6 = 4.4 x 10-6 (kgm2) I =
-6 = 9.0 x 10-6 (kgm2) Moment of inertia around Z axis IA = IZ1 + m1r12 X 10-6 z r2 Z2 B part r2 = 47(mm) Calculation of weight m2 = d x e x f x Specific gravity m2 = 5 x 10 x 12 x 2.7 x 10-6 = 0.002 (kg) Moment of inertia around Z2 axis IZ2 = {m2 (d2 + e2)/12} x 10-6 IZ2 = {0.002 x (52 + 102)/12} x 10-6 = 0.02 x 10-6 (kgm2) IB = 0.02 x 10-6 + 0.002 x 472 x 10-6 = 4.4 x 10-6 (kgm2) I =
(Standard pitch: 80 mm) Note) Maximum bar length is 1260 mm. The air purge nozzles are arranged at an 80 mm-pitch. X15 Model with 40 mm-pitch emitter cartridges High-voltage/control unit detachable short type Model with 80 mm-pitch emitter cartridges X210 A short type ionizer (full length of 180 mm and 220 mm) can be installed in a small space.
R and S (Because S function is also included in R.) S and T (Because S function is also included in T.) The combination of K, L and M is not possible because an auto drain can only be attached to a single option. *2 The maximum operating pressure is 1.6 MPa. *3 Voltage symbol 20 (200 VAC) is the terminal block connection as standard. The Option S cannot be chosen.
Knob Position Symbol Position Knob position Knob position Knob position Front Top Bottom 56 A B C Top Front Bottom 84 42 84 70 70 6 26 (Max.28) P U S SMC SMC H L 6 O C K SMC SMC 28.5 51.5 6 51.5 80 13 OUT IN 3 28 13 13 OUT IN OUT IN 3 3 2. OUT Piping Position 3.
-25S/C 0.49 MHKL2-25S MHKL2-25C M: Allowable moment (M = WL) 100 100 W 80 80 Gripping force (N) Gripping force (N) M Pressure 0.6 MPa Pressure 0.6 MPa 60 60 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 40 40 L 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) 12-6-11 11 Series MHK2 Dimensions MHK2-12: Standard type 9
-25S/C 0.49 MHKL2-25S MHKL2-25C M: Allowable moment (M = WL) 100 100 W 80 80 Gripping force (N) Gripping force (N) M Pressure 0.6 MPa Pressure 0.6 MPa 60 60 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 40 40 L 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) 12-6-11 11 Series MHK2 Dimensions MHK2-12: Standard type 9
11 22 35 60 65 80 110 Bracket Assembly (Accessory) Part No.
(Knock pin position) M X W Y Y X W ZZ + S Stroke LS + Stroke Z (mm) 4 4 4 4 LC 7 7 6 6 LD 30 25 22 20 LH 3 3 3 3 LT 16.5 16 15 15 X 8.5 8 7 7 Y 4 3.5 3.5 3 M B 60 69 69 69 LS 54 44 36 32 LX 187 175 173 163 ZZ 10 10 10 10 W 71 58 49 44 LZ Z Bore size 63.5 53 52 47 38.5 34 40 32 25 20 54.5 45 10 12 55 74 4.5 100 125 5 20 28.5 80 101 6 11 65 74 6 120 150 7 20 30 100 121 6 14 50 63 70.5 5 5 40
S 6-2. XLD-63 XLD-80 XLD-25 XLD-40 XLD-50 XLD-100 XLD-160 0.08 Nm 0.3 Nm 6-3.S S S S 6-4.M M M S 6-5./ S M S M 12 XL-OMY0002 7.
Count Pressure Characteristics Flow Characteristics Set pressure: 10 kPa 0 1 10 kPa 20 kPa Output deviation factor (% F.S.) 20 0.5 40 kPa Set pressure (kPa) 40 Out 60 kPa 60 0 Return 80 kPa 80 0.5 100 kPa 100 120 100 80 60 40 1 0 1 1.5 0.5 2 2.5 3 3.5 4 20 Flow rate (/min (ANR)) Supply pressure (kPa) 14-8-7 8 Series ITV0 Dimensions For Single Unit 4-6 2-6 PWR ERR PWR L-bracket (Option) ERR
6-13-4 Double rod Nonlube Non-rotating Rod Nonlube Single rod Series CP95K 32, 40 50, 63 80, 100 (Standard) (Standard) Double acting 6-13-14 Double rod Nonlube (Standard) (Standard) 6-13-1 2 Profile Design ISO/VDMA Cylinder 32, 40, 50, 63, 80, 100 Series CP95 Space-saving auto switch mounting Space is saved by setting switches completely into grooves provided on 4 surfaces.
, 100, 125, 160, 200, 250, 320, 400, 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Refer to page 6-13-20 for Minimum Stroke for Auto Switch Mounting. 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500 25, 50, 80, 100
Core wire colors 7 1 8 1 7 3 2 8 7 1 8 3 2 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 2 3 1 7 2 3 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 6 5 4 4 5 6 4 5 6 6 5 4 Socket connector pin arrangement Plug connector pin arrangement Socket connector pin arrangement Plug connector pin arrangement Connections Connections