S Couplers Series KK/KK13

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Symbol 01 02 03 04 06 Symbol 50 60 65 80 85 110 Symbol 04 06 08 10 12 16 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Tubing O.D. mm 4 6 8 10 12 16 Construction Description Material Plug Description Material Socket Note Note Electroless nickel plated No. 1 14 15 No. 1 2 3 4 5 6 7

HRX-OM-W002

3 Key operation (3/4) 5.2 Function HRR Series 5-4 HRX-OM-W002 Chapter 5 Display and Setting of Various Functions Communication setting menu Reset menu Information moniter menu Alarm history menu RST CO INFO AL h MENU MENU MENU nnn MENU MENU MENU MENU Example / / / / / Contact output signal 2 function selection R T hRR 018-R ASC NO Model Serialprotocol Setting date reset AL17 Alarm (The latest

Booster Regulator/Air Tank

When the inlet pressure is 0.4 MPa: VBA VBAT VBA VBAT 1 Pilot pressure 0.2 MPa to 0.4 MPa 0.9 AP100 Outlet pressure 0.4 MPa to 0.8 MPa 0.8 Outlet pressure MPa (Q = 0) 0.7 0.6 0.5 0.4 0.3 0.2 0.1 0.1 0 0.2 Pilot pressure MPa 0.3 0.4 0.5 1017 VBA Series Construction/Replacement Parts VBA10A VBA11A w q r e w t r e u q t VBA20A, 22A, VBA40A, 42A, 43A Air-operated type q w r y q t e VBA22A, 42A

Compact

1 1 2N q w e r t y u i o !

IDU/IDF

Note 4) Combinations of M and H, H and M, R and S, S and T, L and M are not available.

XL

5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum Angle Valve Series XL 1 With pilot pressure at 0.5MPa (72psi) XLA Normally closed XLC Double acting (dual operation) Valve type Model 1200 1200 1000 1000 800 800 T msec T msec 600 600 Bellows seal 400 400 200 200 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size XLF Normally closed XLG Double acting (dual operation) Valve type

Modular Type Filter Regulator Series AW

t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

For connector cable of M8 connector, refer to page 90. 25 Series SYJ5000 Construction 2 position single 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) e w q t r q y t rw (A) 4 (B) 2 (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) i u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t rw 5 (R1) 3 (R2) 1

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

5 y e o r q !0 !6 !5 y e o i r !9 r u e y o i q t !2 q !1 @0 !7 t !2 u !1 !7 !0 i !2 !7 !1 !5 !6 !0 t Component Parts Description Note Note Description No. Material Material No. U seal Body A NBR PBT q !2 Elbow body Cassette POM, Stainless steel PBT w !3 Seal Handle NBR PBT e !4 O-ring Body B NBR Stainless steel 303 r !5 O-ring Body B NBR Stainless steel 303 t !

Air Cylinder NCJ2 Series Miniature Stainless Steel Body

t i l n.Al Cdu"' Rod Cross Section sl0 (3/8") 6 (5/81 Foot Type (L) r.rcizxL leo,e .I;]+L;G] @ Port location on Head Cover: In Llne T-TN rti \ =.1+@ L:_fr.,'t l l l L T r l I L H I f .

Title not found

t i l n.Al Cdu"' Rod Cross Section sl0 (3/8") 6 (5/81 Foot Type (L) r.rcizxL leo,e .I;]+L;G] @ Port location on Head Cover: In Llne T-TN rti \ =.1+@ L:_fr.,'t l l l L T r l I L H I f .

C95

2 r!4 i yq !3t!8!1!7w !6ui e!5 !

reduces flow setting time

AK VCHC ASR ASQ 589 AS-FS Series Construction: Elbow Type Seal method: Gasket seal For M5, 10-32UNF Seal method: Sealant For R, NPT thread o !0 !1 e !3 !4 o !0 !1 !2 e !3 !4 !5 !2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !

CY1

5 u i !0 y !7 e #3 #4 @1 @2 r t #1 @9 !2 o !1 #0 !4 #2 !3 !

LEC-OM02904

100500[r/min] No.PD31 7FFFh 5 32 5 5.4.3 master-slave EM1OFF/ON EM1OFF/ON 3sONONON ON/OFFONON /C1 (1) / SSCNET 5 33 5 (2) 31 / QD75MH LD77MH Q173HCPU Q172HCPU Q173DCPU Q172DCPU Q170MCPU ON SSCNET14 SSCNETSSCNET LECSSLECSSLECSSLECSSMR-J3-B MR-J3-B MR-J3-B MR-J3-B [] [] [] [] [] [] CN2 CN2 CN2 CN2 CN2 CN2 5 34 5 (3) / /No.PA14 /5.4 (a) No.

High Vacuum Angle Valve, XL Series

5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum Angle Valve Series XL 1 With pilot pressure at 0.5MPa (72psi) XLA Normally closed XLC Double acting (dual operation) Valve type Model 1200 1200 1000 1000 800 800 T msec T msec 600 600 Bellows seal 400 400 200 200 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size XLF Normally closed XLG Double acting (dual operation) Valve type

Compressed Air Preparation Filter

Activated carbon filter Bracket B Bracket A Mounting screws Bracket mounting view Accessories Sold Separately/ International Standard Specific Product Precautions 22 AMK Series Dimensions AMK20 AMK30 AMK40 S N T J D M S N T U D J M U 2 x P 2 x P Q R Q R (Port size) (Port size) G B V C V C B IN OUT IN OUT Maintenance space A Maintenance space A E G AMK50 AMK60 D M J N T S U 2 x P R (Port size

VZ100/300/500

/R port Thread type Stations A port side P port M5 01 C4 C6 B3 B7 2 stations 02 M5 x 0.8 1/8 Tube Nil Rc G NPT NPTF F N T 20 stations 20 One-touch fitting for 4 One-touch fitting for 6 A port M5 x 0.8, 1/8, C4, C6, B3, B7 One-touch fitting for 5/32" One-touch fitting for 1/4 Note) For more than 9 stations, supply air to both sides of P port and exhaust air from both sides of R port.

53

Applicable model Minimum operating flow rate [L/min] HRS-BP005 HRSH090-ll-l 20 r t r e q To circulating fluid outlet r t w r Parts List No.

IDX-OM-W026

-3 12 2 IDX-OM-W026 13 T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 3mA) 13-3 ON 3 () 5 /1 () IDF Series 13-1 13 1 IDX-OM-W026 13 T 13-4 1 2 3 PE L3 L1 L2 PE 1 2 3 L1L2L3 PE: PE: LN: LN PE: PE: PE: M3 6.5mm M3 2 1.25mm 6.5mm 2 1.25mm () () 13-5 3 5-2 IDF55E/75E IDF Series 13-4 13 2 IDX-OM-W026 13 T 13-6 IDF22/37E-20-T IDF22/37E-30-T R GFCI R GFCI L1 2 3