XL

1 1 1 1 2 (a) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

3 Port Solenoid Valve Rubber Seal Series SY100 1

Type S41 How to Order Applicable solenoid valve Note) SY114SY114ASY124SY124AApplicable blanking plate assembly SY100-77-1A SS3Y1 S41 05 M3 Stations A port side 02 M3 M5 M3 x 0.5 M5 x 0.8 2 stations 20 20 stations P R R port M5 x 0.8 P port M5 x 0.8 A port M3 x 0.5 M5 x 0.8 Note) SY114(A) and SY124(A) cannot be mounted on the same manifold.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

B C D R Model CDRBU2WU10-S 22 45.5 14 M5 x 0.8 MRQ CDRBU2WU15-S 25 47 18 M5 x 0.8 CDRBU2WU20-S 34.5 51 20 M5 x 0.8 CDRBU2WU30-S 47.5 55.5 22 M5 x 0.8 CDRBU2WU10, 15-D Double vane type CDRBU2WU20, 30-D A port B port A port B port A port B port Free mounting rotary actuator Free mounting rotary actuator Free mounting rotary actuator 2 x R 2 x R 2 x R Cover Angle adjuster Angle adjuster Angle

MVGQ

port CEP1 C + Stroke B + Stroke A + Stroke M5 x 0.8 R port CE1 CE2 [ ]: Denotes AC.

Integrated Controller

Calculate the load factor for each direction. x = Xc/Lx, y = Yc/Ly, z = Zc/Lz 5. Confirm the total of x, y, and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3.

High Vacuum Angle Valve

2 Valve open/closed B 1 Valve open C 1 Valve closed Symbol Model Remarks Nil Without auto switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is

3

Basic (mm) (mm) A B C D E F Yh9 H 25 29 32 38 15.5 20 5 7 M3 x 0.5 M5 x 0.8 5.5 6.5 6 8 MKB12-Z MKB16-Z Clamp stroke Model 11 14 Rod state Model 0 0.043 0 0.043 20 mm Q R 88 115.5 88 115.5 30 mm Q R 108 145.5 108 145.5 10 mm Q R 68 85.5 68 85.5 Retracted Extended Retracted Extended MKB12-Z 45.5 55.5 65.5 MK MK MKB16-Z 45.5 55.5 65.5 MK2T Note) The above figure is with the auto switch (D-M9

240

8 4 x M5 x 0.8 Depth 11 2 x M5 x 0.8 Cylinder port MXJ 4 x M5 x 0.8 Depth 8 6.5 34 6 MXP 24.5 34 63.5 64.5 MXY MTS 32 7 32 7 34 6 6 NS 52.5 + Stroke 68 + Stroke 32 20 11 15.5 20 15 10 + Stroke 15 4 x M5 x 0.8 Depth 8 20 Note 1) Refer to Specific Product Precautions for mounting of the Compact Slide and a workpiece.

Slider Type/Ball Bushing Bearing

Square nut insertion TW NL CY3B CY3R CY1S (mm) Model A 97 102.5 125 EB 21 22 24 H 46 54 63 HA 33.5 42.5 46 HB 33.5 41.5 46 HC 45 53 61.5 HG 17 16 25 HP 42 50 58.5 HT 19 23.5 28 J M5 x 0.8 M5 x 0.8 M6 x 1.0 L 106 108 138 LL 44 48.5 56 LW 71.5 75.5 86 M M5 x 0.8 M5 x 0.8 M6 x 1.0 MM 8 8 10 N 16.5 18 20.5 NL 15 15 18 NT 8 8 9 EA 26.5 26.5 29 CY1L CY1H15 CY1H20 CY1H25 CY1H CY1H Model P M5 x

ZP3

Lock ring Adapter z c x Pad 165 A

180

of A part of attachment and parallel to Z kgm2 Moment of inertia around the Z axis of B part of attachment IB m1 m2 r1 r2 Z2 Weight of A part of attachment kg Axis on the center gravity of B part of attachment and parallel to Z Total moment of inertia for attachment Weight of B part of attachment kg kgm2 I Inertia moment around the Z1 axis of A part of attachment kgm2 Distance between Z

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

B A B A B A B 4.7 35 44.4 <45.1> 23.5 10.2 26 3 R A A G: Approx. 300 H: Approx. 600 DIN rail (VZ1000-11-1-) (Pitch) = 10.5 13.5 24.3 33.2 (M5 port) DIN rail holding screw 2n1-M5 x 0.8 (ports A, B) 2n2-One-touch fitting (ports A, B) Applicable tube O.D.: 4 6 L2 [rail mounting hole pitch 12.5] (5) L1 9 Cassette Type Manifold Series SY3000/5000/7000 Note) [ ] are for AC type, while < > are

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

-25 103 Precision air slide table MXP/MXPJ6 11221122Dimensions: MXP16 3 Z V K Metal stopper C 6.5 C Max. 4 25 5 Without stroke adjuster G M 11 Max. 4 C 2-M5 x 0.8 depth 8 Stroke: S 2-M4 x 0.7 depth 6 11-/22-MXP16-20 Width across flats 8 Width across flats 3 A 4-M5 x 0.8 depth 7 (Plug: M-5P) 2-M5 x 0.8 Piping port H 17 M6 x 1 10.5 26.7 11 5 5.5 34 35 8.5 4-M6 x 1 +0.030 0 depth 4 4H9 depth

Compact Cylinder with Solenoid Valve/

Bore size (mm) Stroke range (mm) OB P1 P2 Q RA RB S V W Y Z 32 40 50 63 9 M5 x 0.8 M5 x 0.8 2.5 10 7 12 43 43.5 59 38 5 to 100 9 M5 x 0.8 M5 x 0.8 2.5 10 7 12 43 43.5 67 46 5 to 100 11 Rc, G, NPT1/8 Rc, G, NPT1/8 3.5 14 8 17 54 63 83 58 10 to 100 14 Rc, G, NPT1/8 Rc, G, NPT1/8 3.5 18 10.5 17 54 63 97 69 10 to 100 6 Compact Cylinder with Solenoid Valve/Guide Rod Type Series CVQM Auto Switch

V100

0.8 2 port M5 x 0.8 Note) V114(A) and V124(A) cannot be mounted to the same manifold.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

M5 x 0.8 Port 2 M5 x 0.8 Note) 10-V114(A) and 10-V124(A) cannot be mounted on the same manifold.

Compact Guide Cylinder

When used as a stopper, select a model with a stroke of 30 mm or less. 2.

ZSE30/ISE30

In actual application, only one color is displayed at a time. Abnormal conditions can be detected at a glance!

CE

resistance Endurance 10G; X, Y, Z directions, 3 times each Impact resistance 350g or less Weight Note 1) 90 phase difference input A phase I Multi Counter/Dimensions B phase J 24-M3 x 0.5 A B C D t A COM COM COM B DC12V GND F.G.

F

R E A C O D E A P P L I C A B L E T U B E OD Japan, Asia, Australia, UK N Canada, USA MM 23 3.2 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 B O D Y S I Z E 1 M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard T H R E A D P O R T S I Z E M5 ...M5 U01 ..1/8 U02 ..1/4 U03 ..3/8 U04 ..1/2 U32 ..10-32UNF 01 ... 1/8 02 ... 1/4 03 ... 3/8 04 ... 1/2 W I