Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

L O L ZX G H F K ZR J ZM ZH E D I A ZU B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL 2-4.5 ZY ZQ A B C D E F G H I J K L Model 4 ZFC100-04 ZF 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 ZP 1/4" ZFC101-07 6 ZFC200-06 ZCU 8 ZFC200-

AZ1000

2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) 4.34 (110.2) Hastelloy is a registered trademark of Haynes International.

Information

6 !6 Component Parts Description Material Description Material No.

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

A L1 Applicable tubing O.D. d 0 0 5 10 AS-DPP00092 AS-DPP00093 4 6 19.4 16 46.9 43.5 42.7 39.3 Number of needle rotations 624

99

Applicable for a wide range of liquids The element is applicable for a wide range of liquids because it adopts PTFE seals.

Table of Contents

0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

LEC-OM02704CN

OFF ( 6 ) ( 6 ) ( 6 ) PC35 PC35 PC35 PC35 P A 11 PA1 2 P A 11 PA12 P A 11 PA12 15 43 15 1.

Series H, DL, L, LL Self-align Fittings

L-04 L-06 N-04 N-06 LL-04 LL-06 S-04 S-06 4 6 L-08 8 L-10 10 L-12 12 4 6 N-08 8 N-10 10 N-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 4 6 S-08 8 S-10 10 S-12 12 0.7 1.1 1.4 1.7 2.0 Precautions Be sure to read before handling. Refer to Air Fittings & Tubing Precautions for other details. Installation Caution Cut the tube to the required length.

Air Suction Filter With One-touch Fittings ZFB Series

M Element Replacement Procedure Body Model A B C D E F G H I J K L M N Size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 12.8 4 6 53 54 8.5 14.4 15.5 50 15 17.5 24 12.5 26 22.5 48 Metric size Inch size 15.2 6 8 9.5 16.6 17.5 61 16 19.5 27 13.5 28 65 24.5 52 Collar part arrow 57 8 10 69.5 70 18.5 11 18 21.5 65 17 21 29.5 14.5 30 27 Transparent cover 3 16 1 4 " 1 4 " 3 8 " 1

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

4, 5/32" 6, 1/4" 16.5 16.5 A B A B A B A B A B 77.6 [79.8] 45 49 77 [79.2] 65 82.8 16.5 + + + + + (3.2) Triangle mark 52.8 1/8 (P, R port) (Pitch) P = 17.5 21 (Station 1) (Station n) (Light/surge voltage suppressor) 48.6[55.6] 5.8 25.1 20 28.5 Applicable connector: 26 pins MIL type with strain relief (Conforming to MIL-C-83503) Stations n L1 L2 6 129.5 111.5 8 164.5 146.5 10 199.5 181.5

SV

option L1 4 A 4 A 4 A 4 A 41 42 E 3/5 E 3/5 64.2 2 B 2 B 2 B 2 B (Station n) (Station 1) 77.5 1 P 1 P 78 E 3 P 1 Light/Surge voltage suppressor (6) Individual EXH spacer Individual SUP spacer MAX.14 109.5 SV100-06Interface regulator SV100-05Interface regulator (DIN rail dimension) 61.2 (47.3) 7.5 48 19.7 Block separation lever B B B B 102.9 111.4 118 100.4 91.9 A A A A B A B A B A B A Dimensions

LEC-OM02904

(1) 1 2 16 4 6 4 (2) SW1 Ab AC Ad Ab A b A b . A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * No.No.81 8 8 8 CPU CPU (3) 0 0. b JOGDO (1) # #. b (3) # #. d # #. C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

MNB

D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A B A B A B A B A B A B A B 32 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 CL 40 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 50 1.5 4 2 4.5 0 1 10 12.5 5 7.5 2.5 5 0 1 CL1 63 1.5 4 2 4.5 0 1 10 12.5 5 7.5 2.5 5 0 1 80 5.5 7 6 7.5 2.5 4 14 15.5 9 10.5 6.5 8 2.5 4 MLGC 100 5.5 7 6 7.5 2.5 4 14 15.5 9 10.5 6.5 8 2.5 4 CNG Auto Switch Mounting Height D-Z7

MNB

9-6-20 21 Series MNB Cylinder with Lock Double Acting, Single Rod Proper Auto Switch Mounting Position D-F5W D-J59W D-F5 D-J5 D-F5BAL D-F59F D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W, D-Y7WV D-Y7BAL D-A3 D-A44 D-G39 D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A B A B A B A B A B A B A B 32 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 CL 40 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 50 1.5

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

Air Fittings Fitting Series For Special Environment

O e b u t ) h c n I ( . n i M e l o h . a i d d a e r h T T P N . o N t r a P H ) . x e H ( D L A * M . t W ) f g ( 6 9 . 0 ) 5 . 4 2 ( 1 8 . 0 ) 5 . 0 2 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 8 / 1 S 4 3 7 0 H R K 9/ 6 1 ) 9 2 . 4 1 ( 3 6 . 0 ) 6 1 ( 1 1 5 7 . 0 ) 9 1 ( 6 1 4 / 1 S 5 3 7 0 H R K 8 9 . 0 ) 5 2 ( 4 / 1 8 / 3 S 6 3 7 0 H R K 1 1 / 6 1 ) 6 4 . 7 1 ( 3 7 . 0 ) 5 . 8 1 ( 8 2 0 4

Check Valve Series AK 1

6.5 10 8 13.5 6 14 17 22 16 24 43 45 39 80 62 80 H M 14 8 18.5 14 42 A 17 L 54.3 47.3 49.3 60.5 54.5 17 10 24 21 22 19 22 12 34 22 Connection thread Reference dimensions of R thread after installation.

OMU0023

(Example) When Step Data No. 1 is used for a positioning operation: Recommended set value Set value for pushing speed = 6 (Thus, positioning speed of Return to Origin: 6 mm/s, Pushing speed for Step Data No. 1 positioning operation: 0 mm/s) 45 - (Example) When Step Data No. 1 (Step Data No. 0) is used for a pushing operation and the speed is set to 6 mm/s: Recommended set value Set value

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

ZR

Arrangement (Right valve station which is looked from valve side is first station.) 06 B Both sides 6 Viewed from the front side of valve unit, confirm the port location on the right and/or left side. 1 1 1 station only 1 station only 6 6 6 stations only 6 stations only All stations A All stations A If more than one spacer is required, specify all spacers.