TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

MLU

BBA2: D-A7/A8/F7/J7 The above stainless steel screw kit is used for auto switch D-F7BAL and D-F7BAVL when it is shipped mounted on a cylinder. Also, BBA2 is included when a auto switch alone is shipped. 9-13-10 10 Series MLU Plate Cylinder with Lock Construction !4 !7 !0 !4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !

Modular F.R.L. Unit

AC30 AC40 AC40-06 AC50 AC55 AC60 87 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 41.5 43 30 24 33 12 5.5 50 29.5 5.5 3.2 65 2 Note 1) 141 123 36 80 126 55 57 41 35 14 7 71 28.5 7 4 64 0 194 153 38 80 167 55 57 41 35 14 7 7 4 71 66 30.5 3.5 194 153 38 80 167 72.5 75 50 40 18 9 9 4 88 74 35 3.5 226 187 40 105 220 77.5 80 50 40 18 9 88 35 9 4.6 74 3 226 187 38 105 235

Vacuum System Peripherals:

Recommended fastening torque = R 1/8: 7 to 9 N.m, R 1/4: 12 to 14 N.m. Note 2) Please consult with SMC if other fluids are used, a corrosive problem may result. Mobile parts (gear, etc) inside the pressure gauge is made of brass.

ISA2

S L S S S S L L L L 6 9 6 9 6 9 6 9 6 9 IN IN IN 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 Right Right Left Bracket DIN rail mounting bracket DIN rail mounting bracket Stations 1 Stations 1 Stations 1 2 3 IISA2NSR-1B1 set (1 station manifold part number) ISA2-GE41P1 set (Air catch sensor part number) IISA2NPL-1D1 set (1 station

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

#0 #1 #2 #3 #4 #5 #6 #7 #8 #9 $0 $1 $2 $3 $44 $5 $6 $7 $8 $9 %5 %6 q w e r t y u i o !

Vacuum Unit

is available in units of 1 piece.)

Square Tube Type Air Cylinder Series MB1

8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)3/8 Rc(PT)1/2 Basic type, Foot type, Front flange type, Rear flange type Single clevis type, Double clevis type Mounting bracket Note) When there is no air cushion, the unit is equipped with rubber bumpers.

C76

1 !2 !3 !4 !5 !6 !7 !8 !9 @0 q w e r t y u i o !

C76

1 !2 !3 !4 !5 !6 !7 !8 !9 @0 q w e r t y u i o !

Slider Type/Ball Bushing Bearing

Technical Data The shock absorber service life is different from that of the CY1L cylinder. Refer to the Specific Product Precautions for the replacement period. 1517 A CY1L Series Construction Slider type/Ball bushing bearing CY1L6 $0 #9 #3 @2 t #4 !9 #8!0!2!6 @4 @1 @8 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2#9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

Vacuum Pad

From the formula on the front matter 9, the average suction flow rate Q1 is as follows: Q1 = (1/2 to 1/3) x Ejector max. suction flow rate = (1/2 to 1/3) x 5 = 2.5 to 1.7 L/min (ANR) (2) Next, find the maximum flow rate Q2 of the piping. The conductance C is 0.22 from the Selection Graph (3).

CXS

9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 @9 !7 o i Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Component Parts No. Description No. Description Note Material Note Material Hard anodized Aluminum alloy Polyurethane !

CXS

9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !

Thermo-chiller/Rack Mount Type

Operation Display Panel The basic operation of this unit is controlled through the operation panel on the front of the product. q e o t r !0 !1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

rep-modular-e

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 #9 Diaphragm Body 1 1 Chromate treatment Spring Valve guide 1 1 Chromate treatment Zinc chromate treatment Diaphragm shell Diaphragm shell 1 1 Zinc chromate treatment Chromate treatment Washer Valve 1 1 Rubber lining material: HNBR Spring holder Valve spring 1 1 Zinc chromate treatment Seal Diaphragm 1 1 O-ring holder Diaphragm holder

Modular Pressure Control Equipment F.R.L. Replacement Procedure

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 #9 Diaphragm Body 1 1 Chromate treatment Spring Valve guide 1 1 Chromate treatment Zinc chromate treatment Diaphragm shell Diaphragm shell 1 1 Zinc chromate treatment Chromate treatment Washer Valve 1 1 Rubber lining material: HNBR Spring holder Valve spring 1 1 Zinc chromate treatment Seal Diaphragm 1 1 O-ring holder Diaphragm holder

Compact Type

9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

CRQ2

9 !2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

Modular F.R.L. Unit

66 74 74 K 12 14 14 18 18 L 5.5 7 7 9 9 M 3.2 4 4 4 4.6 N B 132 184 187 222 224 J 33 L 5.5 7 7 9 9 F 43 57 57 75 80 G 30 41 41 50 50 H 24 35 35 40 40 E 41.5 55 55 72.5 77.5 AC20C AC25C AC30C AC40C 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 2 Note 1) 50 71 71 88 88 45 50 50 75 75 126 167 167 220 235 114 143 146 183 185 26.5 28 31 36 36 0 3.5 3.5 3 AC40C-06 Note 1) For AC20 only, the position