HRX-OM-T004

(Request):010307F5 [CR][LF] (Response):01030E00D40D02010A [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 03 Function 0 Head address of specified register 0E Quantity of bytes to read 0007 Quantity of register to read 00D4 Information of 0h (circulating fluid discharge temperature) F5 LRC 0 Information of 0001h (Reserved)

HRX-OM-R028

(Request):010307F5 [CR][LF] (Response):01030E00D40D02010A [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 03 Function 0 Head address of specified register 0E Quantity of bytes to read 0007 Quantity of register to read 00D4 Information of 0h (circulating fluid discharge temperature) F5 LRC 0 Information of 0001h (Reserved)

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.8 90.2 91.8 90.2 91.8 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3

A

-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Clean Regulator

SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 10 0 5 15 20 25 0 0 1000 500 500 1000 1500 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH4100-03 SRH4110-03 SRH4100-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05

Electro-Pneumatic Proportional Valve Series VEF/VEP

characteristics Set pressure range (MPa) Without sub-plate Without sub-plate 1 2 3 Nil 02 03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 2 0.1 to 0.9MPa 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2

Electro-pneumatic Proportional Valve Series VEF/VEP 1

Symbol Body size Symbol Standard characteristics Symbol Port size Without sub-plate Rc 1/4 Rc 3/8 1 2 3 Nil 02 03 Symbol Set pressure range (MPa) 2 Without sub-plate Rc 1/4 Rc 3/8 Nil 02 03 03 04 06 0.05 to 0.65 MPa 1 2 2 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 0.1 to 0.9 MPa 2 02 03 04 03 04 06 1 3 30 Rc 3/8 Rc 1/2 Rc 3/4 4 0.005 to 0.15 MPa 1 1 4 45 1 2 3 4 12 8 4.5 2.5 Without sub-plate

VXD21/22/23

TI/ TIL Table (2) Rated Voltage-Electrical Entry-Electrical Option Table (1) Connection Size and Applicable Model PA Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G Connection Applicable model VXD2130-02 VXD2130-03, VXD2140-03 VXD2130-04, VXD2140-04 VXD2150-06 VXD2260-10 VXD2270-32 VXD2380-40

VXP21/22/23

Table(2) Rated Voltage-Electrical Entry-Electrical Option PAX Table(1) Connection Size and Applicable Model Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G C D, T G, C T PB S L, Z S L, Z S Note ) Connection Applicable model VXP2130-02 VXP2130-03,VXP2140-03 VXP2130-04,VXP2140-04 VXP2150-06

Lightweight, compact, and precision control make these speed controls the right choice for many heavy-duty applications. These speed controls are offered with in-line and elbow construction to give the widest choice to your unique application. Locking nuts are included as standard as well as simplified mounting. Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric

Lightweight, compact, and precision control make these speed controls the right choice for many heavy-duty applications. These speed controls are offered with in-line and elbow construction to give the widest choice to your unique application. Locking nuts are included as standard as well as simplified mounting. Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric

Lightweight, compact, and precision control make these speed controls the right choice for many heavy-duty applications. These speed controls are offered with in-line and elbow construction to give the widest choice to your unique application. Locking nuts are included as standard as well as simplified mounting. Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric

SMC series AS*002F, in-line type, compact speed controllers with built in one-touch fittings minimize installation time, reduce mounting height, and enable a more compact machine design. These speed controls can be mounted in 4 variations (direct mounting, L-bracket mounting, DIN rail mounting and holder mounting). Available tube sizes range from 3.2mm to 12mm OD (metric) and 1/8 to 1/2

SMC series AS*002F, in-line type, compact speed controllers with built in one-touch fittings minimize installation time, reduce mounting height, and enable a more compact machine design. These speed controls can be mounted in 4 variations (direct mounting, L-bracket mounting, DIN rail mounting and holder mounting). Available tube sizes range from 3.2mm to 12mm OD (metric) and 1/8 to 1/2

SMC series AS*002F, in-line type, compact speed controllers with built in one-touch fittings minimize installation time, reduce mounting height, and enable a more compact machine design. These speed controls can be mounted in 4 variations (direct mounting, L-bracket mounting, DIN rail mounting and holder mounting). Available tube sizes range from 3.2mm to 12mm OD (metric) and 1/8 to 1/2

Lightweight, compact, and precision control make these speed controls the right choice for many heavy-duty applications. These speed controls are offered with in-line and elbow construction to give the widest choice to your unique application. Locking nuts are included as standard as well as simplified mounting. Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric

Lightweight, compact, and precision control make these speed controls the right choice for many heavy-duty applications. These speed controls are offered with in-line and elbow construction to give the widest choice to your unique application. Locking nuts are included as standard as well as simplified mounting. Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2022 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. D-G