High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

CJ5-S

35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 176 63 Up to 600 35 32 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 1/4 109 176 80 RS Q G Up to 750 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 3/8 130 210 100 Up to 750 110 40 37 41 125 60 30 100 14 10 29 20 71 16 M12 x 1.75 10 26 8 M26 x 1.5 100 1/2 131 212

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

RSH/RS1H

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

50 to 600 CXS25 CXS32 Allowable kinetic energy (J) 0.17 0.271 0.32 25, 30, 35, 40, 45, 50, 60, 70, 75, 80, 90, 100 Cushion Needle Adjustment Caution Theoretical Output (N) 1.Keep the adjusting range for the cushion needle between the fully closed position and the rotations shown below.

MLGC

Ball bushing bearing MLGCL 200, 250, 300 Bore size (mm) Auto switch model D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 40 350, 400, 450, 500, 600, 700, 800 20 25 32 40 BMA2 -020 BA -01 BA -02 BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Also when exceeding a 600 mm stroke, specify -XB11 at the end of the model number. Refer to the Made to Order Specifications on page 8-13-31.

Electromagnetic Digital Flow Switch

Temperature characteristics Ambient temperature 5% F.S. (25C reference) Fluid temperature 5% F.S. (25C reference) Operating pressure range*2 0 to 1 MPa Proof pressure*2 2 MPa Analog output Response time*3 0.5 s Voltage output Output voltage: 1 to 5 V Output impedance: 1 k Current output Output current: 4 to 20 mA Max. load impedance: 600 Power supply voltage 24 VDC 10% Current consumption

Clean Air Module

or less (24 VDC) P2: Analog output 1 to 5 V Allowable load resistance 100 k or more P6: Analog output 4 to 20 mA Allowable load resistance 300 or less (12 VDC), 600 or less (24 VDC) 339 LLB Series Refer to the operation manual for how to set and to operate.

Ionizer

Reduced-wiring Fieldbus System Static Neutralization Equipment Autobalance sensor [Body-mounting type] Offset voltage of static neutralization area 150 Alphabetical Index Length Measuring/ Counter 100 Offset voltage (V) 50 0 return current + return current 50 100 Controls offset voltage of static neutralization area at a constant value. 150 0 300 600 900 1200 1500 1800 2100 Monitoring +

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

mode Variable from 0*2 Window comparator mode Short circuit protection Yes Voltage output Output type Voltage output: 1 to 5 V Voltage output: 0.6 to 5 V Output impedance Approx. 1 k Output type Current output: 4 to 20 mA Current output: 2.4 to 20 mA Analog output Current output Load impedance Maximum load impedance at power supply voltage of 12 V: 300 at power supply voltage of 24 V: 600

Peltier-type Chiller Thermo-con/ Compact Type

For details, refer to the optional accessory (page 11). 6 HEF Series Cooling Capacity Circulating fluid: Water, Flow rate: 1 L/min Circulating fluid: Water, Flow rate: 1 L/min, When constant fan speed mode is selected 600 600 500 500 Cooling capacity [W] Cooling capacity [W] Ambient temperature 25C 400 400 Ambient temperature 25C 300 300 200 200 Ambient temperature 35C Ambient temperature

33

Cooling Capacity HRSE012-A-10-(T) [50 Hz] [60 Hz] 1600 1400 1600 Ambient temperature Ambient temperature 0 200 400 600 800 1000 1200 1400 25C Cooling capacity [W] Cooling capacity [W] 25C 600 800 1000 1200 HRS HRS 090 35C 35C 0 200 400 HRS 100/150 0 10 20 30 40 0 10 20 30 40 HRSH 090 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH HRSE018-A-10-(T) [50 Hz] [60 Hz]

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

length 300 mm) M: With lead wire (Lead wire length 300 mm) MN: Without lead wire Light/Surge voltage suppressor DC, AC specifications DC specifications Nil S Z R U Without light/surge voltage suppressor With surge voltage suppresser With light/surge voltage suppresser With surge voltage suppresser (Non-polar type) With light/surge voltage suppresser (Non-polar type) H: Lead wire length 600

Intrinsically Safe Valve

Use only supplied cable and nut. 600 mm Maximum length for L-type 1000 mm 1500 mm 2000 mm 3000 mm 10 mm Semi-standard Warning Note) When placing an order for body ported solenoid valve as a single unit, mounting screws and gaskets for manifold are not included. Order them separately, if necessary. (For details, refer to page 18.)

PSxx-OMG0001CN

(DC24 V) 50 DC+ DC+ OUT1 OUT1 OUT2 OUT2 DCDCPSE32(T) PSE33(T) NPN 2 PNP 2 Max.80 mA 1 V Max.30 V80 mA 1 V 15 V 1 k DC+ DC+ OUT1 OUT1 OUT2 OUT2 DCDCPSE34(T) PSE35(T) PNP 2 PNP 2 Max.80 mA 1 V Max.80 mA 1 V 420 mA 300 (DC12 V) 600 (DC24 V) 50 DC+ DC+ OUT1 OUT1 OUT2 OUT2 DCDC-15No.PS-OMG0001CN-H 1 M [S_J] [S_F] 2Sor 1 LCD ON ON OFF OFF [] 2(SorSoG) LCD OUT2 OUT1

PFxx-OMJ0005CN

50 NPN(1 ) PFM7--GDC(+) OUT1 DC(-) Max.28 V80 mA 1 V ()30 ms -18No.PF-OMJ0005CN-I PNP(2 ) PFM7--BDC(+) OUT1 OUT2 DC(-) Max.80 mA 1.5 V PNP(1 )(15 V) PFM7--EPNP(1 )(420 mA) PFM7--FDC(+) OUT1 DC(-) Max.80 mA 1.5 V E15 V 1 k F420 mA 600 50 PNP(1 ) PFM7--HDC(+) OUT1 DC(-) Max.80 mA 1.5 V ()30 ms -19No.PF-OMJ0005CN-I 1 3 OFF 1 1 ON OFF P_1 H_1 [L/min] ON OFF [] -20No.PF-OMJ0005CN-I

PFxx-OMO0004CN

IN(70) IN OUT IN OUT 8cm () Rc1/4NPT1/4 1214 Nm Rc1/4NPT1/4 17 mm G1/4 21 mm -19No.PF-OMO0004CN-E -20No.PF-OMO0004CN-E FG 1 DC(+) 2 OUT2// 3 OUT1 4 DC(-) -21No.PF-OMO0004CN-E NPN(2 ) PFMB7--ADC(+) OUT1 OUT2 DC(-) 28V 80 mA 1 V NPN(1 )(15 V) PFMB7--CNPN(1 )(420 mA) PFMB7--DDC(+) OUT1 DC(-) 28V 80 mA 1 V C15 V 1 k D420 mA 600 NPN(1 ) PFMB7--GDC(+) OUT1 DC(-) 28V 80 mA 1 V 0.4V ()

PFxx-OMP0001CN

. -16No.PF-OMP0001CN-F FG 1 DC(+) 2 OUT2// 3 OUT1 4 DC(-) -17No.PF-OMP0001CN-F NPN(2 ) PFMB7--ADC(+) OUT1 OUT2 DC(-) 28 V 80 mA 1 V NPN(1 )(15 V) PFMB7--CNPN(1 )(420 mA) PFMB7--DDC(+) OUT1 DC(-) 28 V 80 mA 1 V C15 V 1 k D420 mA 600 NPN(1 ) PFMB7--GDC(+) OUT1 DC(-) 28 V 80 mA 1 V 0.4V ()30 msec. -18No.PF-OMP0001CN-F PNP(2 ) PFMB7--BDC(+) OUT1 OUT2 DC(-) 80 mA 1.5 V PNP(1 )(15 V)

PFxx-OMS0001CN

. -17No.PF-OMS0001CN-A FG 1 DC(+) 2 OUT2// 3 DC(-) 4 OUT1 -18No.PF-OMS0001CN-A NPN(2 ) PFMC7--ADC(+) OUT1 OUT2 DC(-) 28V 80 mA 1 V NPN(1 )(15 V) PFMC7--CNPN(1 )(420 mA) PFMC7--DDC(+) OUT1 DC(-) 28V 80 mA 1 V C15 V 1 k D420 mA 600 50 NPN(1 ) PFMC7--GDC(+) OUT1 DC(-) 28V 80 mA 1 V 0.4V ()30msec. -19No.PF-OMS0001CN-A PNP(2 ) PFMC7--BDC(+) OUT1 OUT2 DC(-) 80 mA 1.5 V PNP(1 )(15 V)