MY1

Horizontal Vertical (downward) Vertical (upward) 100 10 20 30 40 50 100 200 500 Load weight kg m s m s Type of impact MY1HT63 Horizontal impact: P = 0.5MPa s 2000 1500 1000 m Impact speed mm/s L unit 1 m 2 Kinetic energy E 500 400 300 200 Thrust energy E Fs Fs + mgs Fs mgs Absorbed energy E E + E 100 10 20 30 40 50 100 200 300 5001000 Symbols : Speed of impacting object (m/s) m: Weight

MGP

200st 75st 200st 24 28 34 54 70 78 25 30 38 M5 X 0.8 10 12 12 44 44 44 62 81 91 5 17 17 110 120 120 200 200 46 54 64 27 39 39 56 72 82 60 77 77 117 117 38 44 50 25, 50, 75, 100 3 3 4 16 20 25 3.5 3.5 4.5 M6 X 1.0 25, 50, 75, 100, 125, 150, 175, 200 M6 X 1.0 MGPM (Slide Bearing)/Dimensions A, DB, E MGPL (Ball Bushing Bearing)/Dimensions A, DB, E Bore (mm) Bore (mm) A E DB A E DB 25st 125st

5 Port Solenoid Valve Series SY3000/5000/7000/9000

rate: 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

SY

(D Side Mount Type) SUP/EXH Block Assembly e Part Nos.

Table of Contents

D E ZPY02U 2 4 6 8 Applicable tube O.D.

1

st E HT Bore size (mm) 20 25 Over 100 st to 200 st 30 st or less Over 200 st Over 30 st to 100 st 10 16 27 32 51 51 69 68.5 80 93 Over 100 st to 200 st 73 79.5 90 95.5 114 114.5 132 132 50 st or less Over 200 st Over 50 st to 100 st E HT A Bore size (mm) 32 40 50 63 Over 100 st to 200 st 128 128 144 144 50 st or less Over 200 st Over 50 st to 100 st 21.5 15 21 16 Over 100 st to 200 st 91

Series SV

With external pilot specification (Pitch) P = 24 65.8 24 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 B 2 B 2 B 2 B 2 B 2 P 1 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 N11 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, N9 10, N11 12 x PE X PE Rc 3/8 [1(P), 3(E) port]

SV

(mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Speed at the end (mm/s) Applicable

Table of Contents

C D E F Dimensions Part no.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

sides) e (b) Lever D side (a) Bolt (Both sides) Replacement Parts No.

Electric Actuator with Integrated Guide

Motor output (W) Motor model Compatible driver model Power supply voltage (V AC) Motor dimension (mm) 100/115 MSD021P1E MSM021P1A Matsushita Electric Industrial Co., Ltd. 95 MSM022P1A 200 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation 89 200 HC-PQ23 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yasukawa Electric Corporation 96.5 200/230 SGDE-02AP SGME-02AF12 Refer

V

TAT I O N S 02 2 Stations 20 20 Stations H O W T O O R D E R S E R I E S V Q Z 1 0 0 / 2 0 0 / 3 0 0 B O D Y P O R T E D P L U G L E A D T Y P E V A L V E 2 VQZ P O R T S I Z E 2(A) P O R T S E R I E S C3 One Touch Fitting for 3.2 (VQZ100) C4 One Touch Fitting for 4 (VQZ100/200) C6 One Touch Fitting for 6 (VQZ100/200/300) C10 One Touch Fitting for 10 (VQZ300) M5 M5 Thread (VQZ100/200) 02

NCA1

150 150 2759 200 200 2760 250 200 2760 325 325 2761 400 325 2761 Stroke (In Inches and Hundredths of Inches) Bore 150 200 250 325 400 Note: Quantity is one piece.

CA2

7 i q r e y @2 t !8 !9 !6 !1 !2 !4 !5 !0 !

Vacuum System Peripherals:

e Valve Model SX340 is for internal pilot.

VFS

EZ VFS1320-E/EZ VFS1420-E/EZ VFS1520-E/EZ Lead wire O.D.

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

NCA1

MM -X B E/2 20ST KK Data D across flats TS SU SW SW SU US XS SS + Stroke SY Bore size (in) MM KK A B C D DD E EA EE G J LF P R SB SS ST SU SW SY TS US WF XS Y ZB 150 (1.5) 5/8 7/16-20 3/4 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.1 3.63 2.36 1.43 3/8 2.88 5/8 0.94 3/8 0.94 2.75 3.50 1 1.38 1.71 5.19 200 (2) 5/8 7/16-20 3/4 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 3/8 1.26 1.06 3.63 2.4 1.84 3/8 2.88

NCA1

2 4-NT WF G J TN Depth ND E XT SN + Stroke A ZB + Stroke EA E/2 E DD D Bore size (in) MM KK NT TN WF XT Y LF P SN ZB C BA B AA ND A J G EE R 150 (1.5") 5/8 7/16-20 1/4-20 5/8 1 1 15/16 1.71 3 5/8 2 1/4 4 3/4 0.3 1 2 1/4-28 9/16 3/8 1 1/8 1 1/8 2.02 9/32 3/4 1.1 1.26 3/8 1.43 2.36 200 (2") 5/8 7/16-20 5/16-18 7/8 1 1 15/16 1.71 3 5/8 2 1/4 4 3/4 0.3 1 1/4 2 1/2 5/16-24 9/16 3/8 1 1/8 1 1/8