Clean Room Rodless Cylinder Series CYP ø15, ø32 1

(port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP

33

Power consumption P: 1000 [W] Q = P = 1000 [W] Cooling capacity = Considering a safety factor of 20%, 1000 [W] x 1.2 = 1200 [W] V: Power supply voltage HRSH 090 P HRSH Power consumption HRSE HRSE e Derive the heat generation amount from the output. Output (shaft power etc.) W: 800 [W] w Derive the heat generation amount from the power supply output.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

40 80 50 50 20 20 Load mass m (kg) Load mass m (kg) Load mass m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

LEH_C

/LEHZJ /P.17 3.1 /LEHF /P.20 4.1 /LEHS /P.10 2.1.1 /LEHZ /P.13 2.2.1 /LEHZJ /P.17 3.1 /LEHF /P.20 4.1 /LEHS 3) 4) /P.50 8.3 5) () /P.53 8.3 6) /P.39 6. 7) 8) () 0 /P.28,30 9) () /P.28,30 () 10) /P.28,30 INC/ () 29 - No. 2 / 1)() () () 2)IN* 15ms( No.

Air Cylinder NCA1 Series

X B 5 S T D.R O D T H R E A D S T D.R O D B O R E S I Z E 3/4-16 1-14 1-14 1 1-3/8 1-3/8 500 5 600 6 800 8 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please contact P/A Customer Service for larger sizes R E F E R TO PAG E 22 F O R O P T I O N A L RO D T H R E A D S 3 Dimensional Drawings Expanded Series NCA1 MF1 1.5 ~ 6 WITH FRONT RECTANGULAR FLANGE BORE ROD KK A B V W Y ADD STROKE MM SM

7

P p p 2-wire 12 V M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NA p p P p p IC circuit 3-wire (PNP) M9PA p p P p p 2-wire 12 V M9BA p p P p p Water resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 P P IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 P P P P Relay, PLC No 5 V, 12 V 100

C76

77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89 102 127 152 177 32 12.5 25 37.5 50 75 100 125 40 12.5 25 37.5 50 75

C76

77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89 102 127 152 177 32 12.5 25 37.5 50 75 100 125 40 12.5 25 37.5 50 75

MGP

) P5DW P. 63 Note 1) Lead wire symbols 0.5m .

NCA1

1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 Only necessary for Item No 13, 15 and 26A S T Y L E Single Rod W Double Rod O P T I O N S ( I F A P P L I C A B L E ) XB5 _ For information on Bore Size, Rod and Rod Thread , please see How To Order Series NCA1 Replacement Parts.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Real-time switch output Unit switching Hysteresis mode ON YES Accumulated flow l Display Real-time flow rate l/min OFF P-1 P-2 Real-time flow rate GPM gal (US) "P" Window comparator mode H : Hysteresis GPM = gal (US)/min H H Note) Fixed SI unit (l/min, l, m3 or m3x10) will be set for the type without the unit switching function.

air-filter-e

Pressure Control Equipment Industrial Filters P.245 AMG Water Separator P.246 AFF Main Line Filter P.247 AM Mist Separator P.248 AMD Micro Mist Separator P.249 AMH Micro Mist Separator with Pre-filter P.250 AME Super Mist Separator P.251 AMF Odor Removal Filter Industrial Filters 1 Indication of replacement of elements, inspection items P.253 2 How to arrange replacement element kit number

Air Preparation Equipment

Pressure Control Equipment Industrial Filters P.245 AMG Water Separator P.246 AFF Main Line Filter P.247 AM Mist Separator P.248 AMD Micro Mist Separator P.249 AMH Micro Mist Separator with Pre-filter P.250 AME Super Mist Separator P.251 AMF Odor Removal Filter Industrial Filters 1 Indication of replacement of elements, inspection items P.253 2 How to arrange replacement element kit number

70astamb1

The kinetic energy of load can be found using the following formula. 20 10 5 V M M 2 V 2 100 300 1000 2000 500 Ek = Ek: Kinetic energy (J) M: Weight of load (kg) V: Piston speed (m/s) Maximum drive speed (mm/s) Example) Load limit at rod end when air cylinder 63 is actuated with max. actuating speed 500 mm/s. at a maximum drive speed of 500 mm/s.

mb1

The kinetic energy of load can be found using the following formula. 20 10 5 V M M 2 V 2 100 300 1000 2000 500 Ek = Ek: Kinetic energy (J) M: Weight of load (kg) V: Piston speed (m/s) Maximum drive speed (mm/s) Example) Load limit at rod end when air cylinder 63 is actuated with max. actuating speed 500 mm/s. at a maximum drive speed of 500 mm/s.

Table of Contents

(No protrusion from the rod end) P . 43 Low speed: Series CUX 2 Series CU Precautions on Free Mount 1.

RSH/RS1H

900 0.3 MK(2) 63 80 Load weight m [kg] Load weight m [kg] Load weight m [kg] Load weight m [kg] 0.2 800 800 50 0.1 700 700 RS Q G 600 600 0 500 100 200 300 400 RS H A 63 Lateral load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] =

HRX-OM-X071

500 0 0 0 10 20 30 40 0 10 20 30 40 Circullating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR050-A/W-20-) 9.5.2 HRR050-A/W-402000 2000 Ambient temp Ambient temp 1500 1500 Heating capacity[W] Heating capacity[W] 40 40 32 32 25 25 1000 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature[] Circulating fluid temperature

PSxx-OMM0006CN

kPa 500 kPa 1.5 MPa 0.1 kPa 0.1 kPa 0.001 MPa DC1224 V 10 (p-p)10() 45 mA NPN PNP 2 80 mA 28 V(NPN ) 1 V (80 mA ) 2.5 ms(20,100,500,1000,2000 ms ) 0.2F.S. 1 digit 0 1 () 15 V2.5F.S. 0.65 V2.5F.S. 1F.S. 2 1 k () 420 mA2.5F.S. 2.420 mA2.5F.S. 1F.S. 3 12 V 300 24 V 600 50 ()Low 0.4 V 5 ms 3 1/2 7 LCD 2 (/) 2 F.S.1 digit(253 ) ON OUT1OUT2 IP65 -550 -1060 () 3585RH