Series VQ Metal Seal/Rubber Seal Body Ported

Plug for cylinder port Silencer for EXH port Double check block Individual SUP/EXH DIN rail mounting SY Built-in silencer SYJ Blank plate Name plate SX VK VZ VF Except for S kit Except for L kit Except for C kit Except for C kit Except for C kit Except for C kit VFR VP7 P.1.10-26 P.1.10-21 VP4 VQ Except for S kit Except for S kit Except for S kit Except for S kit VQ4 VQZ P.1.10-66 P.1.10-

Modular Type Air Filter Series AF

Note 3) Bowl assembly for AF30 to 60 models comes with a bowl guard (steel band material). 26 AF10 to 60 Dimensions L AF10, 20 AF50, 60 A G D Bracket (Option) L Bracket (Option) F D M G K K F M J J B E E B H OUT IN C OUT IN H C Port size OUT OUT Port size o s AF10: 25 AF20: 40 Drain A P Min. clearance for maintenance AF30, 40, 40-06 L Bracket (Option) A D G F M K J B E Drain Min. clearance

Lightweight and Compact

[C] 5 10 15 20 25 30 35 Circulating fluid temperature [C] HRS090-W-20/40 (50 Hz) HRS090-W-20/40 (60 Hz) 14 12 12 10 Facility water temperature 32C Facility water temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 8 8 6 Facility water temperature 40C Facility water temperature 40C 6 4 4 2 2 0 0 5 10 15 20 25 30 35 Circulating fluid temperature [C] 5 10 15 20 25 30 35 Circulating

7ND9071en

T100 C IP66, AEx tb IIIC T100 C IP66 Ambient temperature ranges T6 T5 T4 ND9_E2 -40 to +60 C -40 to +75 C -40 to +85 C ND9_E2/I02 -40 to +60 C -40 to +75 C -40 to +85 C ND9_E2/I09 -25 to +60 C -25 to +75 C -25 to +85 C ND9_E2/I32 -25 to +60 C -25 to +70 C -25 to +70 C ND9_E2/D33 -40 to +60 C -40 to +75 C -40 to +82 C ND9_E2/D44 -40 to +60 C -40 to +75 C -40 to +82 C ND9_E2/I45 -25 to +60

VCW

6 to 12 LVA 27.5 F Q S F (Q) 34 LVH LVD LVQ 25 U LQ R C R C LVN (44) G1/2 TI/ TIL E B A H D E (S) G1/2 2-P Port size PA B A H D 2-M Thread depth N 2-P Port size PAX 2-M Thread depth N L PB L K K N.C.

KJ

M5 x 0.8 M-5ALHN-6 M-5ALHU-6 Width across flats 7 M5 x 0.8 Hose Nipple: M-5H-4/-6 Effective area (mm2) Weight (g) A B C D E H Model M-5H-4 M-5H-6 7 8 2.1 4.0 2.7 3.9 15.5 16.5 8.5 9.5 7 8 1.8 2.5 6.5 8.5 M5 x 0.8 Width across flats 7 15-2-57 5 Series M Series M5 Hose Elbow: M-5HL-4/-6 Weight (g) 4.4 5.2 Effective area (mm2) 1.4 2.4 Model F E D C B A M-5HL-4 M-5HL-6 6.5 8.5 1.8 2.5 7 8 8.5

MXS

Model H G A B C J* K E D F 16.5 MXS-AT6 5 MXS 6 7 21 19 8 5 10.5 2.5 M2.5 X 8 M5 X 0.8 * MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 25 9 6 12.5 3 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 32 13 8 18.5 4 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 40 15 10 23 5

240

Dimensions [mm] Model L1 L2 L3 A B C D E F G J LEPS6-25 127.1 138.6 11.5 16.5 21 24.5 28 16.5 28 36 76.4 LEPS6-50 156.6 169.6 13 22 45 30 52 22 52 60 107.4 393 LEPS Series Step Motor (Servo/24 VDC) Dimensions LEPS10 D E C B 4 10 22 ( ) +0.025 0 ( ) +0.025 0 3H9 depth 3 3H9 depth 3 2 x M5 x 0.8 thread depth 10 4 x M4 x 0.7 thread depth 6 28 24 16 K 25 14 Table operating range Note 1) [1] 1

SZ3000

Co., Ltd. 1-3-12 13 Cassette Type Manifold Plug-in Type Series SZ3000 Manifold Electrical Wiring Type 60F D-sub Connector Type (25 pins) Without Power Supply Terminal With Power Supply Terminal Positive common Negative common 13 13 13 Common Positive pin (Common) Positive pin SOL.B Station 12 12 25 12 25 12 25 SV SOL.A Light/Surge voltage suppressor Negative pin Negative pin (Common) 24

70astamb1

to 500 Up to 600 Up to 600 Up to 800 Up to 800 10 14 18 18 22 26 M14 x 1.5 10.5 M18 x 1.5 M18 x 1.5 12 14 15 11.5 17 M22 x 1.5 M26 x 1.5 With Rod Boot 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150

mb1

to 500 Up to 600 Up to 600 Up to 800 Up to 800 10 14 18 18 22 26 M14 x 1.5 10.5 M18 x 1.5 M18 x 1.5 12 14 15 11.5 17 M22 x 1.5 M26 x 1.5 With Rod Boot 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150

LEY-OM007

INP 1 INP ON 0.50 2 INP ON a bINP ON < / [mm/sec] [mm/sec] 1 4 30% 1 4 40% 5 20 35% 5 20 60% LEY*16** 21 50 60% 85% LEY*16*A* 21 50 80% 95% 1 4 20% 1 4 40% 5 20 35% 5 20 60% LEY*25** 21 35 50% 65% LEY*25*A* 21 35 80% 95% 1 4 20% 5 20 35% LEY*32** 21 30 60% 85% -41- LEY*16** LEY*25** LEY*32** LEY*16*A* LEY*25*A* A B C A B C A B C A B C A B C [kg] 1 1.5

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

6 RMA-63 RMY-63 RMA-40 RMY-40 RMA-25 RMY-25 Special resin MYA16-15-R6656 Scraper MYA40-15-R6658 MYA25-15-R6657 MYA63-15-R6659 !8 1 6.2 x 3 x 1.6 O-ring NBR C-14 10.5 x 8.5 x 1 C-5 @3 4 8-14-16 16 Mechanically Jointed Rodless Cylinder Series MY3A/3B Construction MY3B w e t u i @1 @6 @9 !3 !5 !6 !7 !8 MX MTS y q MY !0 @8 @7 !4 !9 r CY !

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,

Title not found

Connector C (Terminal no.)

CJ2

A1 L1 MM NX NDH10 R1 U1 Dd9 d L m t l 3 15.2 12.2 CD-J010 10 1.2 0.3 Type C 3.2 3.3 0.030 0.060 CM2 10 4.8 22.7 18.3 CD-Z015 16 I-J010B 10 CD-J010 1.5 0.7 Type C 5 8 21 M4 x 0.7 3 15.2 12.2 1.2 0.3 Type C 3.2 5.3 3.3 3.3 +0.048 0 0.030 0.060 0.030 0.060 3.1 8 9 CD-JA010 16 3 18.2 15.2 10 I-J016B 16 IY-J015 1.2 0.3 Type C 3.2 8 25 M5 x 0.8 4.8 16.6 12.2 1.5 0.7 Type C 5 3.3 5.3 5.3 +0.048

RQ

Mounting bolt C D Mounting bolt Mounting bolt Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

WA WB View E NN F GB GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Piping port 2 x M5 x 0.8 Cover surface D LY LB LH LT LZ LX LT S + Stroke H NA A NB Y X Y X 4 x LC Mounting hole LS + Stroke Z + Stroke WW C B 0 0.3 B 0 0.3 Drawing of view E (mm) Z S WW WB WA NB NA NN MM H GB GA F D C B A Y X 91.5 92.5 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 LT 14 14 LH 5.5 5.5 LC

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2

ZR

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vacuum switch unit 20 ZR1 S 1 5 M Z E C K1 Ejector unit Supply valve self-holding Vacuum switch unit 5 M Z E C K2 1 20 L ZR1 Supply valve N.C.