High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

CNG

NT-02 NT-03 NT-G04 (15) (19.6) (21.9) M8 x 1.25 M10 x 1.25 M14 x 1.5 12.5 16.5 18 13 17 19 20 25, 32 40 5 6 8 20 C type 8 for shaft C type 8 for shaft IY-G02 0.040 0.076 8 16.2 21 7.6 0.9 1.5 20 CD-G02 0.040 0.076 8 38.6 1.5 43.4 7.6 0.9 C type 10 for shaft C type 10 for shaft IY-G03 20.2 25.6 9.6 1.15 0.040 0.076 10 1.55 25, 32 0.040 0.076 10 CD-G25 42.6 1.55 48 9.6 1.15 25 C type 10 for

CL

Part no. l Applicable snap ring t m 16.2 20.2 36.2 1.5 1.55 1.55 0.9 1.15 1.15 Type C 8 for axis Type C 10 for axis Type C 10 for axis IY-G02 IY-G03 IY-G04 CD-G02 CD-G25 CD-G03 CD-G04 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 38.6 42.6 54 65 1.5 1.55 1.55 2.05 0.9 1.15 1.15 1.15 9-2-34 33 Lock-up Cylinder Double Acting, Single Rod Series CL1 40, 50, 63, 80

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

200 100 0 B 800 700 600 500 400 300 200 100 0 C 800 700 600 500 400 300 200 100 0 D 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

Cylinder with Lock Series CNG

NT-02 NT-03 NT-G04 (15) (19.6) (21.9) M8 x 1.25 M10 x 1.25 M14 x 1.5 12.5 16.5 18 13 17 19 20 25, 32 40 5 6 8 20 C type 8 for shaft C type 8 for shaft IY-G02 0.040 0.076 8 16.2 21 7.6 0.9 1.5 20 CD-G02 0.040 0.076 8 38.6 1.5 43.4 7.6 0.9 C type 10 for shaft C type 10 for shaft IY-G03 20.2 25.6 9.6 1.15 0.040 0.076 10 1.55 25, 32 0.040 0.076 10 CD-G25 42.6 1.55 48 9.6 1.15 25 C type 10 for

Electric Rotary Table

Connector C Actuator side (8) (Terminal no.) 1 2 5 6 (14) (18) A1 B1 (13.5) (17.7) (17.7) Cable length (L) [m] 1 3 5 8 A B C 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side 10 (14.2) Connector C (Terminal no.) 1 2 5 6 (5.5) (6.3) 15 Actuator side (14) (18) (Terminal

Cylinder with Lock Series CLS

600 140 400 500 125 400 MLGP 300 300 ML1C 200 200 [Example] 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5 MPa P 0.5 MPa P 250 4000 3000 3000 200 2000 180 250 2000 160 140 200 1000 125 180 700 800 900 Load mass: m (kg) Load mass: m (kg) 1000 700 800 900 160 600 140 600 500 500 125 400 400 300 300 D200 200 -X Individual

1

(C) (C) (C) (C) (C) (C) CA2 6 Cushion valve CA2Q Double acting, Single rod Low friction type NCM CBA1 Double acting, Single rod Cylinder with end lock 1.

Table of Contents

2 U seal Retaining ring for hole type C HNBR Tool steel y !

C76

rod boot (mm) AM C e f K KK Item h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Stroke Bore 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401

C76

Rod Boot (mm) AM C e f K KK Item h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401

CNS

3000 3000 CLQ 2000 2000 MLGP 160 140 RLQ 1000 1000 Load weight: m (kg) Load weight: m (kg) 700 800 900 700 800 900 125 MLU 600 600 160 500 500 ML1C 400 400 140 320 125 300 300 D200 200 -X 280 20100 100 100 500 400 300 200 100 500 400 300 200 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 3000 3000 2000 2000 160 140 125 1000 1000 Load weight:

Basic Type/Direct Mount Type

Description Body End cover A End cover C End cover B End cover D Cylinder tube No.

VFR

400 300 200 100 0 VF B VFR VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VZS C VFS VS4 800 700 600 500 400 300 200 100 0 VQ7 D EVS VFN 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out

LG1H

LG1H21PA-100-F LG1H21PA-200-F LG1H21PA-300-F LG1H21PA-400-F 100 200 300 400 60 80 160 260 180 280 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.) A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4 sec.)

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

8 1 6.2 x 3 x 1.6 O-ring NBR C-14 10.5 x 8.5 x 1 C-5 @3 4 8-14-16 16 Mechanically Jointed Rodless Cylinder Series MY3A/3B Construction MY3B w e t u i @1 @6 @9 !3 !5 !6 !7 !8 MX MTS y q MY !0 @8 @7 !4 !9 r CY !

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note 2) ( ): Denotes without sub-plate. 10-SV3000 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Weight (g) Note 2) Flow rate characteristics Note 1) Port Valve model Actuation type M12 waterproof connector (Cable length 300 mm) size C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv Single 250 (121) 4.1 0.41 1.1 4.1 0.29 1.0 2 position Double 253 (124) 10-SV300--02 Closed center 3.0 0.43 0.80 2.6 0.41 0.72

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

C DH7 EN 0 0.1 ER (Max.)

Table of Contents

D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto-drain (N.C.)

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

C DH7 EN 0 0.1 ER (Max.)