Rotary Actuator/Vane Type

E E CRQ2X MSQX L L MRQ K K D B C G G D B C N N 1 M T T M 25.5 (34.5: Connector type) 2 x R Auto switch 2 x R Y Y Auto switch W W1 Size: 20, 30 Size: 40 W W 2 67 8 8 15 32.5 When D-M9m is used 65 4 *1.

MK

Applicable Auto Switch Style Auto Switch Model Page Electrical entry (Function) Bore size D-A7, A8 D-A7lH, A80H D-A73C, A80C D-A79W D-A9l D-A9lV D-F7l, J79 D-F7lV D-J79C D-F7lW, J79W D-F7lWV D-F7BAL D-F7lF D-F7NTL D-F9l D-F9lV D-F9lW D-F9lWV D-F9BAL D-F5DWL 5.3-14 Grommet (Perpendicular) 5.3-15 Grommet (In-line) 20 to 63 Reed switch Solid state switch 5.3-16 Connector Grommet (2 color indication

energy saving effect

HRS 100/150 Applicable model Dimension [mm] A B C HRSH250/300-A--A 916 536 1838 HRSH100/150/200-A--A 830 401 1538 HRSH100/150/200/250-W--A 570 1353 HRSH 090 HRSH HRSH HRSE HRZ HRZD HRW C HECR HEC 118 HEB A B HED HEA Option symbol With Earth Leakage Breaker B IDH HRSH 20 B With earth leakage breaker A leakage breaker is built in to automatically stop the supply power when it has short-circuit

HRL

Circulating fluid temperature [C] HRL300-Am-20 (CH1)1 HRL100/200/300-Am-20 (CH2) 3.0 35 Ambient temperature 32C 30 2.5 Cooling capacity [kW] Cooling capacity [kW] Ambient temperature 45C or less 25 2.0 (Max. 1.5 kW)2 20 1.5 15 Ambient temperature 45C Rated 1.0 kW 1.0 10 0.5 5 0 0.0 20 30 40 15 20 25 Circulating fluid temperature [C] Circulating fluid temperature [C] Pump Capacity HRL200-

Sine Rodless Cylinder Series REBR Direct Mount Type

C D 15 (mm) Auto switch model A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 Bore size (mm) 17.5 15 D-A9 21.5 76.5 72.5 56.5 60.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 (mm) A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 101 103 47 47 78 78 22 32 30.5

LEC-OM02904

P-D P P C C G3 D (2) G4 5m 5m (1) 1.

VQ5000

Combination of [C ] and [S ] is not possible. Specify the wiring specifications on the manifold specification sheet. 12 12 stations Note 1) U D U D Note 2) Note 3) 2-6-10 11 Base Mounted Series VQ5000 Plug-in Unit Electrical wiring specifications Standard wiring D-sub connector assembly (AXT100-DS25) Wire colors 015 030 050 D-sub connector Terminal no.

CG5-S

Applicable bore size (mm) D B1 C d H1 (mm) Part no.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

C11.2 1218 MY1H Series Mechanically Jointed Rodless Cylinder Linear Guide Type Side Support Side support A MY-SA 2 x G F 2 x H E C D A B Side support B MY-SB MY1B 2 x J MY1H MY1H MY1B E A B C D MY1M MY1C (mm) MY1H Part no.

Turntable Cylinder Series MGT

c Proper mounting positions (mm) A B Bore size (mm) 63 80 100 10 13 17.5 14 18.5 23.5 Proper mounting positions (mm) a b 14 18 17 c 20 24 23 d D-A9 type D-F9 type D-F9 W type 2 6 5 8 12 11 In order that adjacent switches do not misoperate, they should be set within 1mm of the proper mounting positions indicated in the table above.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

connector: D-sub connector (25P) (Conforming to MIL-C-24308) e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n 10 One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 For top ported R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 39.4 (58.1) 62.1 41.7 25.7 20.9 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 P=17.5 63.3 44.5 7.5 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4 : 6 : 8 L n Formula

17

D A B Side support B MY-SB 2 x J MY1B MY1B MY1H E A B MY1B C D MY1M (mm) MY1C A 61 70 87 B C D E F G H J Part no.

CP95

2 pcs. 25 15 D-Z80L 1 pcs.

CP95

2 pcs. 25 15 D-Z80L 1 pcs.

CE

mm) Applicable bore size (mm) D C d D C Part No.

Adsorption Plate

hole) A B C D E F G N Part no.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

type D-Z7 type Note 1) Note 1) D-Z8 type D-A9 type D-F9 type D-Y6 type D-Y7 type Note 1) Vertical outlet types cannot be mounted.

LEH_C

a b c d e f g h i j k a ABS INC ABS() / / INC()// b c ) 0.5mm ()/ P.53 8.3 d e f )LEHZ(J)LEHFLEHS 40100% LEHZJ10L, LEHZJ16L 50100% g INP ON P.51 8.3 INP INP ON h 16 - )LEHZ(J)LEHS 550mm/secLEHF10 520mm/sec LEHF203240 530mm/sec /P.50,51 8.3 , i )150% P.52 8.3 j 2 AREA ON INC ABS() k () INP ON() )No.1 5 4 1( ) 17 - (1) a b c d e f g h i j k No.0 0 1<2 INP

MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

ZP

C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37 64 5 27.5 125 128.5 88.6 135 56 44 105 13-11-95 Series ZPT/ZPX How to