Table of Contents

D D D D D CRA1 C C C CRQ2 MSQ MRQ C D D DKey 20(mm) Nominal size C D 50 63 80 100 19.5 39.5 21 45 23.5 53.5 30 65 Note) Dimensions and tolerance of the shaft and keyway are the same as the standard.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

steel 3/8 15 18 0.35 5.0 3.9 4.5 JSXD41-C Sm03 720 1/2 20 5.5 4.6 5.5 JSXD41-C Sm04 720 50 Brass/Stainless steel 3/4 20 38 0.30 9.5 8.2 9.5 JSXD51-C Sm06 880 60 Brass/Stainless steel 1 25 225 11.0 13.0 JSXD61-C Sm10 1460 70 Bronze 1 1/4, 32A 35 415 19.6 23.0 0.03 1.0 JSXD71-Bm(12, 32) 5500/3000 80 Bronze 1 1/2, 40A 40 560 26.4 31.0 JSXD81-Bm(14, 40) 6900/4100 90 Bronze 2, 50A 50 880 42.8

IDU/IDF

Grommet with waist Power cord outlet Grommet with waist 6 to 12 B A B C C A A 240 240 65 65 30 30 30 30 C 70 70 40 40 50 50 50 50 A 240 240 30 30 50 50 50 50 B 38 38 32 32 45 45 45 45 Model IDU6D IDU8D IDU11C IDU15C IDU22C1 IDU37C1 IDU55C IDU75C B 38 38 50 50 45 45 45 45 C 70 70 49 49 50 50 50 50 Model IDF6D IDF8D IDF11C IDF15C IDF22C1 IDF37C1 IDF55C IDF75C Transformer box (1795) Power cord

MGP

50 63 MGPA -150 50 63 MGPA -100 50 63 MGPA -200 0.2 MGPA16-75 MGPA16-75 50 63 MGPA -150 0.3 0.15 50 63 MGPA -100 MGPA16-50 MGPA16-50 0.2 0.1 MGPA16-10 MGPA16-10 0.1 0.05 50 63 MGPA -50 50 63 MGPA -50 0 0 0 10 20 30 0 20 40 60 80 100 Horizontal load N Horizontal load N MGPA20 MGPA80 0.45 0.7 MGPA80-400 MGPA80-400 MGPA20-400 MGPA20-400 0.4 0.6 Plate displacement mm Plate displacement mm 0.35

15

8 50 36* 4.5* 40.1 69.8 61.4 M4 x 12 M5 x 25 10 LZ 32 LC3F2 NZ M5 x 0.8 9 70 50 5 47.5 89.8 66.9 M3 x 12 M5 x 40 14 NY M4 x 0.7 8 70 50 5 47.5 89.8 66.9 M3 x 12 M5 x 40 14 NX M5 x 0.8 9 63 50 5 51 89.8 66.9 M4 x 12 M5 x 40 9 NW M5 x 0.8 9 70 50 5 48.8 89.8 66.9 M4 x 12 M5 x 40 9 NV M4 x 0.7 8 63 50 5 51 89.8 66.9 M4 x 12 M5 x 40 9 NU M5 x 0.8 9 70 50 5 48.8 89.8 66.9 M4 x 12

7

DC Specification DC Specification Class B Class B Temperature rise (C) Note 2) Temperature rise (C) Note 2) Model Model Power consumption (W) Note 1) Power consumption (W) Note 1) VXD23 to 25 VXD26, 27 VXD28, 29 VXD2A to 2C VXD2D, 2E VXD2F, 2G 4.5 50 7.5 60 7 55 8.5 70 10.5 65 12.5 70 Class H Class H Temperature rise (C) Note 2) Temperature rise (C) Note 2) Model Model Power consumption (

•

/>B ' C . 0 E . F.

Cylinder with Lock

Improved ease of maintenance Lock unit Cylinder Holding force improved by 15% Stopping accuracy within 1 mm (With 50 and 30 kg of load) (C(P)95N, 50: 1370 N C(P)96N: 1570 N) Lock Unit Overall length reduced by 27.5 mm max.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Nominal size C D 50 63 80 100 19.5 39.5 21 45 23.5 53.5 30 65 Note) Dimensions and tolerance of the shaft and keyway are the same as the standard.

REA/REB

16 92 11 M6 x 1.0 x 10 21 46 19 M32 x 2.0 S W X ZZ R T Model REA25 REA32 REA40 111 50 30 137 8 17 124 50 40 156 8 17 150 60 40 182 10 19 REA50/63 14 2 -Rc 1/4 L 0 0.2 NA 33 14 E (h8) E (h8) I X D 4-TC Effective thread depth R 14 8-Q Effective thread depth R 14 22 23 25 K W 23 25 4-M8 x 1.25 Effective thread depth 12 B C 0.1 14.5 2 S + Stroke 2 ZZ + Stroke (mm) Model B C D E (h8) I K L NA

REA/REB

16 92 11 M6 x 1.0 x 10 21 46 19 M32 x 2.0 S W X ZZ R T Model REA25 REA32 REA40 111 50 30 137 8 17 124 50 40 156 8 17 150 60 40 182 10 19 REA50/63 14 2 -Rc 1/4 L 0 0.2 NA 33 14 E (h8) E (h8) I X D 4-TC Effective thread depth R 14 8-Q Effective thread depth R 14 22 23 25 K W 23 25 4-M8 x 1.25 Effective thread depth 12 B C 0.1 14.5 2 S + Stroke 2 ZZ + Stroke (mm) Model B C D E (h8) I K L NA

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

ZP 40HB ZP HB ZP HB 40 50 63 80 100 125 F F 4 x 9.5 F 4 x 8 4 x 6 3 x 6.5 4 x 5 G 3 x 4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions (mm) Dimensions (mm) Dimensions (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41 28 43 20.5 30 13 63 65 46 68 31.5 50 4.5 21.5 100 103 69 107 47.5 80 35.5 ZP125HB ZP50HB ZP80HB 50 52 36 54

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

D D D D D CRA1 C C C CRQ2 MSQ MRQ C D D DKey 20(mm) Nominal size C D 50 63 80 100 19.5 39.5 21 45 23.5 53.5 30 65 Note) Dimensions and tolerance of the shaft and keyway are the same as the standard.

Series IDG

Inlet air pressure [MPa] Inlet air temperature [C] Allowable pressure drop P [MPa] Compressed air supply capacity Q [l/min (ANR)] Note: F = (C x 1.8) + 32 1MPa = 145psi 1l/min = 0.0353SCFM Dew point temperature conversion chart 60 0.5MPa 0.7MPa 0.9MPa 50 0.3MPa 40 Atmospheric pressure 0.1MPa Pressurized dew point temperature C 30 20 10 0 10 20 30 40 50 60 50 60 20 10 0 10 20 30 40 30 Atmospheric

CQS

Model C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting bolt Mounting bolt CQSKB12-5D -10D -15D -20D -25D -30D CQSKB16-5D -10D -15D -20D -25D -30D CQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSKB25-5D -10D -15D -20D -

CHKD/CHKG

CHKGL--XC64 A C C B 293

7ND9071en

Table 17 Ambient temperatures, ND9_Z Inmetro Variant type Ex ia IIC T4/T5/T6 Ga Ex ia IIC T4/T5/T6 Gb Ambient temperature ranges T6 T5 T4 ND91_Z -40 to +50 C -40 to +65 C -40 to +80 C ND91_Z/I02 -40 to +50 C -40 to +64 C -40 to +80 C ND91_Z/I09 -25 to +50 C -25 to +65 C -25 to +80 C ND91_Z/I45 -25 to +50 C -25 to +64 C -25 to +80 C Table 18 Ambient temperatures, ND9_Z Inmetro Variant type

A

Y P E B R A C K E T Spacer with L-type bracket A B C D E F G R L Y10L 20 12 4.5 3 25 5 8 2.25 27 Y20L 24 15 5.5 3 30 5 10 2.75 33 Y30L 35 16 7 4 41 7 11 3.5 45 Y40L 40 22 9 4 50 7 14 4.5 50 Y50L 40 22 9 4 50 7 14 4.5 50 Y60L 50 24 12 4 70 10 15 6 62.5 T TYPE BRACKET H O W T O O R D E R T T Y P E B R A C K E T Spacer with Bracket Bracket Only 1000 S E R I E S Y10T .B110T 2000 S E R I E S Y20T

Single Axis Electric Actuator Series LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Brake 50W 100W 200W 1 2 3 None With brake Nil K Power supply voltage Stroke 100/110VAC 50/60Hz 100/115VAC 50/60Hz 200/220VAC 50/60Hz 200/230VAC 50/60Hz Without motor Lead screw lead 1 H B C F A D E 8mm 12mm 20mm 5mm 10mm 25mm 40mm 2 0 Lead screw type The tables above show the definition for each symbol only and cannot

HRS100/150

Note 1) C 5 to 35 Cooling capacity 50/60 Hz Note 3) kW 9.0/9.5 13.0/14.5 Heating capacity 50/60 Hz Note 4) kW 1.7/2.2 2.5/3.0 Temperature stability Note 5) C 1.0 Circulating fluid system Rated flow 50/60 Hz (Outlet) Note 6) L/min 42/56 Maximum flow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating flow rate 50/60 Hz Note 7) L/min 28/42 Tank capacity L 18 Circulating fluid