New

Port size 2 P Port size A B1 B1 B B Vacuum For Oil Construction Dimensions Construction Dimensions DIN terminal Conduit terminal F Q Cable 6 to 12 D D S G1/2 Qp2 F 34 (44) 31.5 25 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp2 B B1 B Conduit Faston type D G1/2 Q F D Q F 11 z 280 VX2 23 R C C R E E 2 x P Port size A 2 x P Port size B1 A B1 B B Terminal part (mm) Faston connector

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

) 112 93 12 Y 25 (14 port) PE port 5 3 37 25 22 14 1 25 25 9 1/8 12 port 3/8-2 port 3, 5 port 1/4, 3/8 1 port 14 port 1/8 1/4, 3/8-2 port 2, 4 port EVS7-6-FG-D-M0 EVS7-6-F G-D-M0 H J I 186 196 89 89 13 (4 port) 50 50 13 (2 port) 13 (4 port) 50 50 13 (2 port) B A B A 50 62 50 62 38 14 38 12 14 12 Manual override Manual override P R1 R2 P R1 R2 Indicator light 2-6.5 mounting hole 42.5 42.5

Slider Type/Ball Bushing Bearing

P P HTB Specifications Bore size (mm) Applicable Series CY1L 15 to 40 (mm) HTA 20 HTB 23 P Throttle dia. Model Construction/Dimensions 1 8 Rc CY1L25 CY1L32 CY1L40 8.2 1 8 Rc 24 26.5 8.2 1 4 Rc 25 30.5 11 CY1L (Slider type) Dimensions other than the above are the same as the standard type.

CLA

lor 9~re lock- tAB ~ 01 9xhaust lockU>l: blank plug .H:h bre&li'lerj with Rod Boot p p p BN Z+ t+Stroke ZZ .. t f S f(Q/(e Stroke ra ~ (mmt ,-.ow "",.f I Bore size (mm) A DB BN BP BO DC 00 oE F GA GB GC GO GL GR J K LZ MM Without boot With boot 40 500 25-500 27 30 60 96 '/. y. 44 16 32 10 85 15 26 54 10 10 M8Xl.25 6 71 M14X1 .S 50 600 25-600 32 35 70 108 'I, 'I< 52 20 40 10

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

. . p. 19 Made to Order. p. 26 Function Details. . p. 27 Safety Instructions.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

222 CC-Link p. 223 DeviceNet p. 224 PROFIBUS DP p. 225 Communication Cable p. 226 Field-wireable Communication Connector p. 228 Terminating Resistor p. 228 Fieldbus Related Accessories M8/M12 Connector PCA/EX9/EX500 Series Power Supply Cable/Connector EX600 Series p. 229 EX500 Series p. 231 EX260 Series p. 233 EX250 Series p. 235 Accessory Between the Sensor/Switch and the Input

ARM10/11

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

ARM10/11

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

Compact Manifold Regulator

0.5 56 28 SMC MPa SMC SMC K K P P C C U U O O S S H H L L 11.5 8 3 5 L2 dimension DIN rail part no.

LEC-OM07605CN

(1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

Thermo-chiller/Rack Mount Type

24 Dimensions Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 9 Air-cooled Refrigeration pp. 25, 26, 28 Water-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 9 Water-cooled Refrigeration pp. 25, 27, 28 Specifications Operation Display Panel p. 29 Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 10 Alarm p. 29 Water-cooled Refrigeration (Single-phase 200

MY1

(Refer to P. 1365.)

Refrigerated Air Dryers

Refer to pages 22 and 25.

LEC-OM02904

P-D P P C C G3 D (2) G4 5m 5m (1) 1.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

size 15 Symbol 40mm Nil 20, 25, 32, 40 TN TF Standard Stroke Note 1) Bore size (mm) Standard stroke (mm) Maximum stroke availabe (mm) 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact P/A if the maximum stroke

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

size (mm) LH LS LT LX LZ MM NA NB P S T V W X Y ZZ LD 20 25 121 5.5 40 55 M8 x 1.25 17 15 1/8 81 9.5 4.5 6.5 20 9 151 7 25 28 121 5.5 40 55 M10 x 1.25 17 15 1/8 81 11 3.5 5.5 20 9 156 7 32 30 133 6 45 60 M14 x 1.5 18 15 1/8 87 13 3 4 23 9 172 7 40 35 158 6 55 75 M16 x 1.5 22 21 1/4 108 16 5 0 25 11 198 9 6 Series CHN Dimensions Front flange type: CHNF Width across flats B2 Rc P Rc P GA2

One-touch Fittings

A M P Q O N Applicable tubing O.D.

7

P p p 2-wire 12 V M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NA p p P p p IC circuit 3-wire (PNP) M9PA p p P p p 2-wire 12 V M9BA p p P p p Water resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 P P IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 P P P P Relay, PLC No 5 V, 12 V 100

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Rod End Lock: -R Bore size (mm) WH W P WA WB 20 30 M5 x 0.8 16 15(16) 23 25 30 M5 x 0.8 16 15(16) 25 32 25 Rc 1/8 16 15(16) 28.5 40 20 Rc 1/8 16 15(16) 33 50 20 Rc 1/4 18 17(18) 40.5 63 20 Rc 1/4 18 17(18) 47.5 80 20 Rc 3/8 22 22 60.5 100 20 Rc 1/2 22 22 71 ( ): Denotes the dimensions for long strokes.