ZR ZR1D1 D2 D3 10.2 SMC PRESURRE SWITCH RESET SET Attachment D Digital pressure switch Suction filter 71.3 (73.3 for D2, D3 types) 81 SMC 61 PV PD Filter block D 78.8 3 Note) 1 Dimensions for mounting bracket A 2 Dimensions for mounting spacer A Bracket A part no. : P3270153 (Standard accessory) Spacer A part no. : P3270156 13-3-19 19 Series ZR Suction Filter: ZR1-FX Specifications ZR1-FX
The condition of the generation of micromist can be checked from the oil filler port. 2 2 Fluid Air 1.5 MPa Proof pressure Operating pressure range 0.15 to 1.0 MPa 0.1 to 1.0 MPa 0.03 to 0.1 MPa 0.05 MPa 102 L/min (ANR) Operating pressure differential range Recommended press. differential Note 3) Press. differential setting min. flow 2000 5000 2000 5000 Bowl capacity between levels (cm 3)
mounting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J M D U 75 Regulator AR10-A Series Regulator AR20-B to AR60-B Series Regulator with
Solid state switch Model D-F8 Series Variations Bore size (mm) Rod end configuration Stroke (mm) Clean room series 4 6 8 10 15 20 Action Series Auto switch Double acting Male thread Without thread Nil 4 Single acting (spring return) Double acting 6 Single acting (spring return) CUJ Solid state switch D-F8 D-F9 Female thread Double acting 8 Male thread Single acting (spring return) Double
Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2000 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing June, 2000 D-SMC.L.A. P-80 (D)
Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.
nut (for panel mount) Note 3) V V V V V + Option Note 1) Nr Nil Without pressure gauge V V V V V G Round type pressure gauge (without limit indicator) V Round type pressure gauge (with limit indicator) V V V V M Round type pressure gauge (with color zone) V V V V + b Pressure gauge Note 4) c Set pressure Note 5) Nil 0.05 to 0.7 MPa setting V V V V V 1 0.02 to 0.2 MPa setting V V V V V + d
Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R016 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.
Box 26640, Indianapolis, IN 46226 Tel: (317) 899-4440 FAX: (317) 899-3102 1978-2000 SMC Pneumatics, Inc. All Rights Reserved. April 2000
Box 26640, Indianapolis, IN 46226 Tel: (317) 899-4440 FAX: (317) 899-3102 1978-2000 SMC Pneumatics, Inc. All Rights Reserved. April 2000
(Value in the initial state) Vibration resistance: No malfunction occurred in one sweep test between 45 and 2000 Hz. Test was performed to axis and right angle directions of the main valve when pilot signal is ON and OFF.
(Value in the initial state) Vibration resistance: No malfunction occurred in one sweep test between 45 and 2000 Hz. Test was performed to axis and right angle directions of the main valve when pilot signal is ON and OFF.
VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.
A B C D E F G H Composition of assembly Set nut (1349172) ARM2500 136314 30 34 70 5.4 15.4 55 2.3 M33 x 1.5 Bracket (B220) Set nut (131532) ARM3000 136414 41 40 75.5 6.5 8 53 2.3 M42 x 1.5 Bracket (B320) Note) Tighten the set nut securely and fix it.
J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel fitting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J M D U 73 Regulator Series
d. == 1 / ,/ ([F20](47 )) e. ( (53 )) f. -46No.PF-OMS0001CN-A [F20] [---] =00 = ON EEPROM 100 +100 OFF <> [F20] [iNP][] [iNP][-] [inP] [] [F20] GND 30 msec.
Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.
Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-14 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.
Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2000 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing November, 2000 D-SMC.L.A. P-80 (D)