Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto

Title not found

Additionally multiple components maybe added at D. (Example: Timer and Push Button combination for an automatic return or manual return.)

Title not found

Additionally multiple components maybe added at D. (Example: Timer and Push Button combination for an automatic return or manual return.)

Microspeed Cylinder: Double Acting/Single Rod Series CJ2X ø 10, ø 16 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Note 16 CJ-L016B CJ-F016B CJ-T016B 10 16 Foot bracket Flange bracket T-bracket Common for models D-C7, D-C8, and D-H7 BJ2-010 BJ2-016 Caution 1. For Series CJ2X, up to 0.1Nl/min (ANR) of internal leakage is anticipated due to cylinder structure. T-bracket is applicable to double clevis type (D). 2

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Solid state auto switch: D-M9B, D-M9N B E Model Auto switch operating range Stroke Stroke A 40 50 150 100 75 100 10 20 30 125 75 20 30 125 150 10 40 50 13-/22-MXS6 0.4 0.4 0.4 11.6 17.5 9.6 9.6 9.6 21.6 27.6 1.5 10 13-/22-MXS8 4.9 0.1 0.9 8.9 16.9 41.9 14.9 9.9 10.9 18.9 26.9 51.9 1.5 11.6 13-/22-MXS12 74.4 32.4 22.4 12.4 14.4 24.4 22.4 12.4 2.4 4.4 14.4 35.4 64.4 2.5 45.4 15.6 13-/22

Electric Actuators

Two mounting styles Table traveling accuracy C D Bottom mount Top mount Model Traveling accuracy C side against A side D side against B side LG1H 0.1 or less 0.1 or less A B Variations Mounting orientation Lead screw type Motor type Guide type Motor/Screw connection Series Standard motor [Tamagawa Seiki Co., Ltd.]

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

, D-M9N Stroke B Stroke E Auto switch operating range Model A 40 50 150 75 100 10 20 30 125 75 100 150 20 30 125 10 40 50 13-/22-MXQ6(L) 0.5 0.5 0.5 7.5 7.5 9.5 9.5 9.5 17.5 17.5 1.5 10 13-/22-MXQ8(L) 2 2 6 10 25 26 36 12 12 16 20 35 1.5 11.5 13-/22-MXQ12(L) 18.5 8.5 8.5 15.5 15.5 34.5 34.5 44.5 44.5 28.5 18.5 18.5 25.5 25.5 2.5 15.5 13-/22-MXQ16(L) 24.5 14.5 14.5 14.5 20.5 27.5 45.5

70pvpump

D (for PA3000 automatically operated type) Discharge rate 5 0.040 125 (cycles/min) = = Cycles per minute Discharge per cycle Reference life cycles 1 1 = x x Service life Cycles per minute 8 (Daily operating time) 60 1 1 100,000,000 = x x 60 8 125 1666 days = 17-5-145 6 Series PA/PAX/PB Precautions 5 Be sure to read before handling.

Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 300, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: [Included] Presence, Valves: No

Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 300, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: [Included] Presence, Valves: No

Magnet: None, Mounting: Double Clevis, Tube Material: Aluminum Tube, Bore Size: 80mm, Thread: Rc, Stroke: 200mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Made to Order: w/Coil Scrapper

Magnet: None, Mounting: D (Double Clevis), Tube Material: Aluminum Tube, Bore Size: 80mm, Thread: Rc, Stroke: 200mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Made to Order: XC35 (w/Coil Scrapper)

Magnet: None, Mounting: D (Double Clevis), Tube Material: Aluminum Tube, Bore Size: 80mm, Thread: Rc, Stroke: 300mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Made to Order: XC35 (w/Coil Scrapper)

25

Avoid using in a place where condensation occurs due to a drastic temperature change. d. Avoid using in a place in the presence of corrosive or explosive gas or where there is a volatile combustible. e. Avoid using in an atmosphere where there are particles, conductive iron powders, oil mist, salt, solvent, blown dust, cutting oil (water, liquid), etc. f.

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

Printed in Japan 1st printing September, 2000 D-SMC.L.A. P-80 (YG) This catalog is printed on recycled paper with concern for the global environment.

Table of Contents

D-C73/D-C76/D-C80 Band Mounting Style. D-B53/D-B54/D-B64 Band Mounting Style . D-C73C/D-C80C Band Mounting Style. D-A72/D-A73/D-A80 Band Mounting Style . D-A7xH/D-A80H Rail Mounting Style. D-A73C/D-A80C Rail Mounting Style . D-A90(V)/D-A93(V)/D-A96(V) Direct Mounting Style . D-Z73/D-Z76/D-Z80 Direct Mounting Style. D-E73A/D-E76A/D-E80A Direct Mounting Style. 2-color Indication Type .

REA/REB

/J79 D-J79C D-F7V D-F7NTL D-F7W/J79W D-F7WV D-F7BAL D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7LF D-F79F Bore size (mm) B A 10 6 3 4.5 (mm) 15 6 4 4.5 Dimension A Dimension B 20 6 3 4.5 Auto switch model D-A72 D-A72 25 6 3 4.5 D-F7W/J79W D-F7WV D-F7LF Note 1) D-F7W/J79W D-F7WV D-F7LF Note 1) D-F79F D-F7BAL D-A7H/A80H D-A73C/A80C D-F7/J79 D-J79C D-F7V D-A7H/A80H D-A73C/A80C D-F7/J79 D-J79C D-F7V

ZP

C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB-B8 ZPX40HB-B10 ZPX50HB-B8 ZPX50HB-B10 ZPX63HB-B10 ZPX63HB-B12 ZPX80HB-B10 ZPX80HB-B12 ZPX100HB-B10 ZPX100HB-B12 ZPX125HB-B10 ZPX125HB-B12 01 01 01 40 41 28 43 20.5 32 63 65 46 68 31.5 43 100 103 69 107 47.5 60.5 01 01 01 01 01 01 50 52 36 54 24 35.5 80 83 58 85 37 48.5 125 129 89

ISO Standard Hydraulic Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height D-A5/A6 D-F5(W)/J59(W)/F5BA D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-Z7/Z80 Hs Hs A A Ht Ht Ht Ht B B Auto Switch Mounting Height Auto Switch Proper Mounting Position D-F5/J59 D-F5W/J59W D-F59F D-F5BA D-F5/J59 D-F5W/J59W D-F59F/F5BA D-F5NT D-A59W D-F5NT D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-M9V/M9WV D-M9A V D-A5/A6