Modular Type Regulator Series AR

A y OUT 2 I N 1 SMC A t e IN OUT r q w Parts list Material Note Description No.

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

are equipped with a lock).

ZFC Series

A counter clockwise until it stops (approx. 45). 4) Install a new element on cover A and insert it into the case.

PF-OMN0009_C

[ % ] ( ) -32No.PF-OMN0009CN-F () PF3W504 PF3W520 [ M P a ] [ M P a ] PF3W540 PF3W511() [ M P a ] [ M P a ] PF3W521() [ M P a ] -33No.PF-OMN0009CN-F PF3W511(PVC ) PF3W521(PVC ) [ M P a ] [ M P a ] -34No.PF-OMN0009CN-F PF3W504/520/540 PF3W504S/520S/540S [MPa] [MPa] [ M P a ] [ M P a ] a] [MP a] [MP PF3W511() PF3W521() PF3W511/521(PVC ) [MPa] [ M P a ] [ M P a ] a] [MP [MPa

Modular Type Air Filter Series AF

Note 5) Without a valve function.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

VHS400-02 VHS401-02 VHS400-03 VHS401-03 VHS400-04 VHS401-04 VHS500-06 VHS501-06 Pipipng direction Port size 3 4 1 2 3 8 1 4 1(P) 2(A) 21 105 76 54 35 35 57 93 Effective area (mm2) Mass (kg) 2(A) 3(R) 0.25 0.34 The front face of the handle is the reference position. Easy to Operate The direction of air flow can be verified at a glance by the orientation of the handle.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

As a guide, tighten it by hand, then turn it two or three turns with a wrench. Check the dimensions of each product for the hexagon width across flats.

VP4

A spring washer will be required separately for VP470.

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8 2 Speed Controller with One-touch Fitting Elbow Type (Metal Body) Series AS Flow Rate and Effective Area AS321-03 AS421-04 AS221-01 AS221-02 AS121-M5 Model Tubing O.D. 12 10 10 8 6 8 4, 6 6, 8 Controlled

Hand Valve Series VH 1

106(113) M33 x 1.5 8 45 1.5 M8 x 1.25 88.5 92 73 56 1 (P) 3 (R) 1 (P) 27 23 13.5 3 (R) 12 4-Rc 1/4, 3/8 12 4-Rc 1/4 VH33-02/03 (Bottom ported) 2 (A) 44 Panel cut dimension 2-A +0.3 0 1 (P) 3 (R) C +0.5 0 4-Rc 1/4, 3/8 4 (B) B 0.1 Max. panel thickness D (mm) A 3.2 3.2 3.2 B 40 51 64 C 35 41 51 D 3.5 6 8 VH200 VH300 VH400 5-8-13 8 Series VH Dimensions: Panel Mounted VH41-02 to 04 VH41-06

Hand Valve Series VH

/4, 3/8, 1/2 4-Rc3/4 VH43l-02 to 04 (Bottom piping) VH43l-06 (Bottom piping) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc3/4 4-Rc1/4, 3/8, 1/2 3.6-13 Hand Valve Series VH Precautions Be sure to read before handling.

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

Turn cover A counterclockwise until it stops (approx. 45). 4. Install a new element on cover A and insert it into the case. Cover A Case Cover A Case O L L Element O-ring Window 5.

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

A counter clockwise until it stops (approx. 45). 4) Install a new element on cover A and insert it into the case.

AC

Size 21 31, 41 NPT Threads Port Size Accessories Applicable Body Size 20 30 40 Symbol 02 03 04 Description None Mounting Bracket Float Auto Drain (N.C.)

Series AC Epoxy Coated F.R.L.

Size 21 31, 41 NPT Threads Port Size Accessories Applicable Body Size 20 30 40 Symbol 02 03 04 Description None Mounting Bracket Float Auto Drain (N.C.)

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Universal Type/Metric Size Applicable tubing O.D. d H D1 (Hexagon width across flats) M L3 A L4 L5 D3 D2 L1 Connecting thread T L2 Uni thread H D1 D2 L1 L2 L5 A Max. Min. Max. Min.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

Model B C D E F G H J K L M N P U T S R VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 VFN 1 4, 3 8, 1 2 64 64 65 70 1 136 35 9 64 54 19 32 50 50 118 96 120 60 7 1 2, 3 4 82 68 88 92 1 181 53 12 81 70 35 36 66 52 133 96 140 66 9 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 64 50.8 163 196 68 60.5 1 2, 3 4 4-16-7

Air Suction Filter With One-touch Fittings ZFB Series

ZFB100, ZFB101 ZFB200, ZFB201 ZFB300, ZFB301 ZFB401 16 x 14 x L60 rZFB200-08 tZFB300-08, -10 ZFB301-11, ZFB401-13 I-34S-A 10 x 6 x L33 12 x 8 x L42 14 x 10 x L45 I-35S-A I-36S-A I-39S-A 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. yZFB401-13 Note) Elements and O-rings for the cover are sold in sets of 10 pieces each. 10 pcs.

FGD-C

FGDCA/B FGDEA/B FGDTA/B FGDFA/B (Rc) 3/81/23/4 (MPa) 1) 0.7 1.0 ( oC) 80 FGD*A:1 FGD*B:2 2) (mm ) FGD*A:6570250 FGD*B:6570500(2 :6570250) (MPa) 0.1 SCS14 SPCE SUS316 /O NBR () () 4) (kg) FGDCA/FGDEA:1.3 FGDCB/FGDEB:2.2 FGDTA/FGDFA:2.3 FGDTB/FGDFB:3.8 (L) FGD*A:1.7 FGD*B:3.4 1) 0.5MPa 2) (65500mm) 3) 4) 3. 001 -B FGD C A 03 B N 1 * -B * * A L250 B L500(L2502 ) 03 3/8 04