SMC Corporation of America
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C Celsius Sets unit of temperature display. 2 Temperature unit. Unit F Fahrenheit 2-wire RTD 2-wire RTD Sets the number of wires in resistance temperature detector (sensor). 3 Number of wires Channel 3-wire RTD 3-wire RTD 4-wire RTD 4-wire RTD None None 2AVG 2 value average 4 Average filter time. Sets average filtering time.

01 02 01 02 DIN terminal (D) VZ54-DVFN Applicable cable O.D.: 3.5 to 7 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor 4-6-33 34 Series VZ500 Manifold Specifications Flow Characteristics Flow characteristics Port size 1 2 (P A) 2 3 (A R) C [dm3/(sbar)] C [dm3/(sbar)] b Cv b Cv Manifold 1(P), 3(R) port 2(A) port VV3Z5-20-1 VV3Z5-21-1 VV3Z5-40-2 VV3Z5

Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2"), 250 (2-1/2") 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2

mountable number 3 port valve mountable number 00 02 04 00 02 04 No 2 port valves used 2 pcs.

C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model Model Model ZP2-3507W ZP2-4010W ZP2-5010W ZP2-6010W ZP2-4020W ZP2-5020W ZP2-6020W ZP2-8020W ZP2-4030W ZP2-5030W ZP2-6030W ZP2-8030W 2 x 1.5 0.5 0.5 0.5 10 2 x 2.5 11 2.5 0.8 0.8 Adapter Mounting Dimensions If an adapter

External pilot LOCK FREE LOCK FREE Valve stations F: D-sub connector P: Flat ribbon cable connector (26 pins) Note Note Symbol 02 Stations Symbol 02 Stations 2 stations 2 stations Connector mounting position Double wiring specifications Double wiring specifications (1) 12 02 12 02 12 stations 12 stations Symbol D Mounting position 2 stations 2 stations D side Specified layout (2) (Up to 24

Note 2) C and b values are for controlled flow with the needle fully open and free flow with the needle fully closed. 16 Series AS-FSG Stainless steel Universal Elbow 1 How to Order Applicable tubing O.D. Note 1) Metric size 02 2 23 3.2 Note 2) 04 4 06 6 Inch size 01 1/8" 03 5/32" 07 1/4" Note 1) For selecting applicable tubing O.D., refer to the Model on page 16.

SS Hastelloy C-22 PCTFE (Option: Vespel) Flow Characteristics 2.

15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 port 12, 14 port 1/8-2 port 2, 4 port 1/8 1 port 1/8-2 port 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light Indicator

Note) VQZ100 VQZ100-S-01(R) Note 1) Option Note 2) When two or more symbols are specified, indicate them alphabetically. (2) 01 [Rc 1/8] 02 [Rc 1/4] 02 [Rc 1/4] 03 [Rc 3/8] VQZ200 VQZ200-S(2) VQZ300 VQZ300-S(2) Note) Symbol R indicates an external pilot.

2-3.2 through 4-6 depth 5 counterbore 7 + Stroke 36 + Stroke 70 + 2 x Stroke Port size 2-M5 x 0.8 [32: 2-Rc 1/8] 16 to 32 2-P through Use series ZP pad Vacuum port size Socket (Only 16) d Through d Through d through M5 x 0.8 Hexagon width across flats 8 Width across flats L 2-P through HA + Stroke 4-T counterbore S + Stroke Z + 2 x Stroke A Stroke range (mm) 5 to 30 Port size A B C d D E

Kit Manifold C Connector 2 Body ported Stations 2 stations 02 20 stations 20 How to Order Valve C6 VQZ 1 2 1 1 5 M Port size {4(A), 2(B) port} VQZ2000 VQZ1000 Symbol Port size VQZ3000 Series v v v v v v v C3 C4 C6 C8 C10 M5 02 One-touch fitting for 3.2 v v v v VQZ1000 Body width 10mm VQZ2000 Body width 15mm VQZ3000 Body width 18mm 1 2 3 One-touch fitting for 4 One-touch fitting for

ON AE6 ON 1 2 64 3. () 5 10 5 (2) b # # CC-Link CC-LinkOFFON CC-Link (1) d # # ON(2) (1) C # # (2) $ $ $ ON(RYn1)2 (3) * * A (10.4) 8 8 8 CPU CPU (4) 0 0. b JOGDO1 (4) (1) # #. d # #. C 1. ##0064 ## 00 01 1 02 2 03 3 62 62 63 63 64 64 2. $$$0255 3. ** 4.

Manifold 2 Body ported Stations Kit type 2 stations 02 C Connector 20 stations 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com How to Order Valves: VQZ200/300 VQZ 1 2 2 5 M Port size {2(A) port} Series VQZ200 VQZ300 Port size Symbol 2 3 VQZ200 Body width 15 mm

Pilot pressure range 0.4 0.3 0.2 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure range MPa 5-2-26 Series SYJA7000 4/5 Port Air Operated Valve Flow Characteristics/Weight Flow characteristics Note 2) Note 3) Weight (g) Pilot port size Valve model Type of actuation Port size 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) b Cv C [dm3/ (s bar)] b Cv C [dm3/ (s bar)] 90 Single 2.2 0.58 0.34 0.63 2.4 0.36 2

NPTF Side 2 1 2 MBA40r r -02 %" NPTF Sid; 7." Bottom 1 4 MBA4210-02 %" NPTF Side (2); 7." Bottom(s] 7 1 6 DIRECTIONAL AIR VALVE DIMENSIONS/PARTS LIST SERIES NVS 4$14 NVS 4l14.{!0 "XX" D Erd phrs sl lincrd dot 5 & (2)del6) ECO101 xTo11.t5 3 sl46asst ddste olsp@l a de@ (rEi.+Ed seQ 5 1 0 solonokl *!. -e.ca!6uretd-a.c. 11t120 v.60 Hr 2301210V.@H.

PG: Flat cable (20 pins) PH: Flat cable (10 pins) Valve stations F: D-sub connector P: Flat cable connector (26 pins) Symbol 02 Note Note Symbol 02 Stations Stations 2 stations 2 stations Double wiring Note 1) ... ... ... ...

Q CE-compliant Nil 02 2 stations Nil Rc P R Pilot valve is on the A port side.

threads R Note 1) Weight g M L2 D2 L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 8 15.3 22 26 15.8 23.2

'-02 ~2 06 6 (Application: Refer to ListO) i 08 ~8 U Flat type Material a With buffer 04 4 Pad type.