C76

SW CJ1 D 45 Eh8 CJP NB NB C CJ2 TD H9 TD H9 KK CM2 TW KW 1.5 2-TC TW N FA AM N CG1 KV S + Stroke H MB Band mounting type (B) or non-magnet Rail mounting type (A) ZZ + Stroke MB1 CA2 CS1 C76KF Non-rotating, Piston rod (Rubber cushion only) With rod boot C76 C85 Wh K KK C95 KA CP95 C e NCM Rod cross section NCA AM 9 9 f I Dh -X 20Data (mm) AM 20 24 C 12 14 FA G H HR K KA KK KV 38 50 TDH9 TW

C76

Bore Stroke C XC + Stroke G XB MB1 BE WH G HR EE EE BE Cushion valve CA2 8 SW K 45 CS1 2-Eh8 NB C C76 KK C85 1.5 KW 1.5 4-TC TW N AM N FA C95 KV S + Stroke FB H Rail mounting type (A) Band mounting type (B) or non-magnet CP95 ZZ + Stroke NCM C76KE Non-rotating, Piston rod (Rubber cushion only) Bore Stroke C With rod boot Wh NCA K KK DC e -X KA 20AM 9 9 Rod cross section f I Data h (mm) AM

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

C in the case of 15.

Tie-rod Type Hydraulic Cylinder

TR d d W D E E D TY W TDe8 MA a MA a C NA F K A A K F NA B H S + Stroke H + Stroke TX 0 0.5 ZZ + 2 strokes TZ (mm) Bore size (mm) A B C TR a E D TDe8 d F G GA J K M MA MM NA P R S T H 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 0.032 0.059 0.032 0.059 0.032 0.059 0.040 0.073 0.050 0.089 0.050 0.089 0.050 0.089 40 17 45 R0.5

2/3 Port Valve

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 A J Q B T K R C U S D V E W F X H Y N.O.

SQ1000/2000

Also, indicate the option symbol "-K" for mixed wiring. w How to order applicable valves A B C A B C A B C A B C A B C SQ 1 1 4 1 C6 5 L A B C D E F G H I Series SQ1000 Switching type Electrical entry A E 1 2 3 4 5 A B C L type plug connector with lead wire L 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure

Possible to transfer a workpiece at low-speed.

10, 15, 20, 30, 40 MRQ K J XA39 XA40 XA41 XA45 K K K XA46 Y Y Y Y Y 20, 30, 40 Y J K K, T K, T K 10, 15, 20, 30, 40 K K K K, T K Z X X, Z J J J, Z Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 T J Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft length Combination Chart of Made to Order Chart 4.

CL

D C B H d Tube I.D.

Modular F.R.L. Unit

Unit AC10A to 40A Dimensions AC10A, 20A A N F E P K C G G IN OUT Q B Pressure gauge (Option) K H OUT Pressure gauge port size Square embedded type pressure gauge (Option) J L Port size Lubricator M Drain Min. clearance for maintenance Filter regulator D A N F AC30A, 40A E P K C G G OUT IN Q B Pressure gauge (Option) K OUT Pressure gauge port size J L Square embedded type pressure gauge (

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

of short shaft length Change of double shaft length Change of short shaft length Change of double shaft length XA45 CRA1 XA46 XA47 XA48 CRQ2 Y Y Y Y Y XA49 XA50 MSQ K K, T K K J K K K J K, T K K XA51 K K J J J K K J J J K K K J J J J XA52 MSZ XA53 J J J J J J J XA55 CRQ2X MSQX J XA57 J Reversed shaft, Change of double shaft length A combination

energy saving effect

T1 : 293 [K] (20 [C]) Circulating fluid return temperature T2 : 297 [K] (24 [C]) Circulating fluid temperature difference iT : 4 [K] (= T2 T1) Conversion factor: minutes to seconds (SI units) : 60 [s/min] Heat generation amount by users equipment Q : Unknown [cal/h] [W] Circulating fluid : Tap water* Circulating fluid weight flow rate qm : (= x qv x 60) [kgf/h] Circulating fluid weight

ZP

ZPY25D10--A10 59 93 23 Flat with ribs U C ZPY25D20--A10 ZPY20 -A10 69 131 20 23 28 14 24 1.7 1.8 4 42 51 ZPY25 -A10 U C ZPY25D30--A10 79 141 25 ZPY32 -A10 U C 77 ZPY25D40--A10 89 177 42.5 32 35 14.5 24.5 2.3 4.5 99 187 ZPY25D50--A10 Dimensions by Stroke Dimensions by Tubing 20, 25 32 H Model F G F G Model J K L U C U C U C U C ZPY-4-A10 ZPY 10--A10 5 1.8 14.5 87 53.5 53 87.5 23 ZPY-6-A10

XM, XY

) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6 x 6.6 8 x 8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type XLA G Fd XL C XLQ (K flange) XM XY XM XY J K H B

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K

MY1

Rod seal NBR 1 DYR-4 DYR-4 DYR8K DYR8K DYR8K i Piston seal NBR 1 DYP-12 DYP-12 DYP-20 DYP-20 DYP-20 o O-ring NBR 1 C-9 C-9 C-18 C-18 C-18 !2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !

Compact Manifold Regulator

K P P C C U U O O S S H H L L 11.5 8 3 5 L2 dimension DIN rail part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Combination of [B] and [K] is not possible.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Combination of [B] and [K] is not possible.

MXQ

Retraction End E1 D E H H F G B J C A K MXQ-BT20(L) MXQ-BT25(L) MXQ-BT8(L) MXQ-BT12(L) MXQ-BT16(L) (mm) Stroke adjustment range (mm) Applicable size A B C E1 G H J K 1) E D F Model MXQ8(L) MXQ-BT8(L) M8 x 1 M3 x 8 5 40.8 14 12.5 1.4 24.5 12 20 23 8 MXQ12(L) MXQ-BT12(L) M8 x 1 M4 x 10 6 40.8 16 16 1.4 29 12 18 28 10 MXQ16(L) MXQ-BT16(L) M10 x 1 M5 x 12 7 46.7 17 20 1.4 35.5 14 22 33.5 12 MXQ20