, 5V, 10V, 20V IDG3HV, 5HV, 10HV, 20HV L (K) A C B (G) D OUT IN M (H) (J) F E (K) L IDG30V, 50V IDG30HV, 50HV IDG30LV, 50LV, 60LV, 75LV, 100LV IDG60SV, 75SV, 100SV A B C (G) D IN OUT M (H) E (J) F Drain discharge With differential pressure type auto drain With float type auto drain With drain guide (Q) (N) (P) N.O.: Black N.C.: Gray Thread size: 1/4 Applicable tube O.D.: 10 (NPT threads:
differ according to the workpiece shape and the coefficient of friction between the attachments and the workpiece, select a model that can provide a gripping force of 10 to 20 times the workpiece weight, or more.
Shock absorber External shock absorber With adjustment bolt 0.007[J] 0.025[J] 0.048[J] 0.081[J] 0.240[J] 0.320[J] 0.560[J] With internal shock absorber 0.039[J] 0.116[J] 0.116[J] 0.294[J] 1.100[J] 1.600[J] 2.900[J] Allowable Kinetic Energy (J) With external shock absorber (For low energy) 0.161[J] 0.574[J] 0.805[J] 1.310[J] With external shock absorber (For high energy) 0.231[J] 1.060[J
, 0.17 in. (4.4 mm) TJ 0.08 in. i2 0 mm) 0.25 in (6.4 mm) '75 PSIG (5 Kgt/cm2) '75 PSIG (5 Kgf/cm2) @ll -=hl'o Panel Mounting A B c E F u H J K M N o 6 1 9 1 5 7 r ) 532 135 1 1 5 7 t40) o87 t22l 0 0 6 {t 5I o 1 2 {31 0 8 0 20 4\ 1 5 7 (40) 0 9 6 1 2 6 (32) 1 4 2 (36) 1 2 0 (6) A B o E F H J K M N o 6 0 1 152 6l 5,32 1 3 5 ' t 1 5 7 a40l 0 6 9 1 7 5 006 {1 5l o 1 2 f3l 0 8 0 20 1l 1 5 7 440
, 0.17 in. (4.4 mm) TJ 0.08 in. i2 0 mm) 0.25 in (6.4 mm) '75 PSIG (5 Kgt/cm2) '75 PSIG (5 Kgf/cm2) @ll -=hl'o Panel Mounting A B c E F u H J K M N o 6 1 9 1 5 7 r ) 532 135 1 1 5 7 t40) o87 t22l 0 0 6 {t 5I o 1 2 {31 0 8 0 20 4\ 1 5 7 (40) 0 9 6 1 2 6 (32) 1 4 2 (36) 1 2 0 (6) A B o E F H J K M N o 6 0 1 152 6l 5,32 1 3 5 ' t 1 5 7 a40l 0 6 9 1 7 5 006 {1 5l o 1 2 f3l 0 8 0 20 1l 1 5 7 440
A tree stop of a rotating mass without cushioning or overloading risks breaking the pinion or vane, The allowable energy published by the manutacturer musl be caretully respected. a J=m.r 6 J = m . V c J = m . r l 2 + 1 2 2 T I v I + I I ri J' r 2 4 d = m . ,#,*, a J = m . I a 'ilE' d !-::-!. mb= n, t r a+b l l ta2+c2 i a ' Ti+l 2 . ^ 2 12 ho'oo#" ' 1 J = n y r = m " . * * ' o .
A tree stop of a rotating mass without cushioning or overloading risks breaking the pinion or vane, The allowable energy published by the manutacturer musl be caretully respected. a J=m.r 6 J = m . V c J = m . r l 2 + 1 2 2 T I v I + I I ri J' r 2 4 d = m . ,#,*, a J = m . I a 'ilE' d !-::-!. mb= n, t r a+b l l ta2+c2 i a ' Ti+l 2 . ^ 2 12 ho'oo#" ' 1 J = n y r = m " . * * ' o .
DCVX2 (2 )VX2 -37No.PS-OMR0001CN-J 3 ISA-19ISA-12ZS-31-B ISA-16ZS-31-C ISA-15 ISA-20 2.6 ISA-14 -38No.PS-OMR0001CN-J 3 () ISA-19ISA-12ZS-31-B ISA-16ZS-31-C ISA-15 ISA-20 ISA-20 E210-U01 2 ISA-17 2.6 2.6 Y200T-A -39No.PS-OMR0001CN-J 3 () 2 2 E210-U01 ZS-31-C ZS-31-C ZS-31-B Y200T-A Y200T-A ISA-18 2.6 ISA-15 ISA-16ISA-17 ISA-12-40No.PS-OMR0001CN-J 4 80 kPa220 kPa
M1 = F x L A M2 = F x L M3 = F x L Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL Note) Deflection: Displacement of section A when force acts on section F REBH15, 25 REBH15, 25 REBH15, 25 REBH15 REBH15 REBH25 REBH15 REBH25 0.08 0.03 REBH25 0.02 Deflection (mm) Deflection (mm) Deflection (mm) 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 25 25 5 10 15 20 0 5 10 15 20 0 25 Moment
(Resin, Carbon steel) J 20 14 32 20 50 32 63 40 63 40 80 Bore size (mm) Easy maintenance is possible with a shock absorber that can be removed simply by loosening the bolts and shock absorber fixing screw from the stopper.
1 Heavy Duty Stopper Cylinder Series RSH/RS1H 20, 32 50, 63, 80 RE A B REC To stop pallets gently To stop pallets gently CX CY MQQ M RHC MK(2) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J DStopper cylinder with built-in shock absorber -X 20Data 10-9-1 2 Heavy Duty Stopper Cylinder Series RSH/RS1H The roller lever direction can be changed in 90 steps. 3 20, 32 50, 63
x J K B C CM3 CG1 CG3 Positional relationship between port and cushion valve JMB Port MB MB MB1 CA2 Cushion valve CS1 CS2 [mm] Bore size [mm] A AL B B1 C D E F G H H1 J K KA KB 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 12.2 10 40 30 27 52 22 38 16 35 13 14 51 8 M6 x 1 6 14.2 14 50 35 32 65 27 46.5 20 40 14 15.5 58 11 M8 x 1.25 7 19 18 63 35 32 75 27 56.5 20 45 14 16.5 58 11 M8 x 1.25
IDG5H (Type A products group) IDG3H (Type A products group) P1 = 0.3 MPa 0 P1 = 0.3 MPa 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa P1 = 0.5 MPa P1 = 0.7 MPa 10 10 P1 = 0.7 MPa 20 20 30 30 40 40 0 40 30 20 10 20 40 60 80 0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650)
www.stevenengineering.com I 6.11 VACUUM VACUUM PADS SERIES ZP H O W T O O R D E R ZPT P A D V E R T I C A L T Y P E W I T H O U T B U F F E R ZPT V A C U U M E N T R Y ( A L S O M O U N T I N G T H R E A D D I A) P A D D I A M E T E R S Y M B O L T H R E A D D I A M E T E R 2~ 8 10~ 16 20~ 32 40 50 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 P A D M AT E R I A L Male
steel 25, 32 only 55 19 Steel ball A Carbon steel Cushion seal A Urethane 56 20 Same as cushion seal A except for 20, 25 standard strokes Steel ball B Carbon steel 21 Cushion seal B Urethane 57 Tooth ring Stainless steel 22 Damper Urethane Cushion ring gasket A NBR 58 23 Same as cushion ring gasket A except for 20, 25 standard strokes C type snap ring for taper ring Carbon steel 24 Cushion
Use a single knuckle joint or a double knuckle joint individually.
steel 25, 32 only 55 19 Steel ball A Carbon steel Cushion seal A Urethane 56 20 Same as cushion seal A except for 20, 25 standard strokes Steel ball B Carbon steel 21 Cushion seal B Urethane 57 Tooth ring Stainless steel 22 Damper Urethane Cushion ring gasket A NBR 58 23 Same as cushion ring gasket A except for 20, 25 standard strokes C type snap ring for taper ring Carbon steel 24 Cushion
3 -X 20#1 Data Slide bearing Long stroke View A-A @9 Component Parts Material Material Note Note No. Description No.
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
Circulating fluid temperature [C] 21 Circulating fluid return port When a load is stable 0.1C 20 Solenoid valve for control 19 Circulating fluid outlet 9.5 kW load Heat load fluctuation (0 kW 9.5 kW) DI filter 0 kW load 0 10 20 30 40 50 Time [Minute] Circulating fluid can be heated without a heater.