ZP Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-T2A(J/K)6-B5 ZP3B-T2A(J/K)10-B5 ZP3B-T2A(JB/K)15-B5 ZP3B-T2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.
Model Model ZPR20B-0-A10 ZPR40B-0-A14 23.5 38.5 49.3 67.1 12.4 47.5 58.3 76.1 24.4 20 25 40 48 16 22 43 34 10.5 25 ZPR25B-0-A10 19 ZPR50B-0-A14 50 24 39 49.8 67.6 15.6 51.5 62.3 80.1 32.4 28 57 27 53 38 14 ZPR32B-0-A10 32 29 44 54.8 72.6 18.9 37 34 Dimensions by Stroke Dimensions by Stroke 40 50 J K: 6 K: 8 Model 20 25 32 J K: 4 K: 6 K: 8 G H G H L M L M Model G H G H G H L M L M L M ZPRB10
Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.
3.2 14.5 VP4 36 (45) S0700 (4.9) (37) (For mounting) 2 x 3.2 (Light/surge voltage suppressor) VQ VQ4 (40.2) 12.7 40.4 (36.7) 28.1 [35.1] 20.5 + VQ5 VQC 15 0.8 (20) 1.6 VQZ For manifold gasket positioning 2 x 2.2 die-cast hole (P, EA, EB port) 1/8 27.2 SQ VFS VFR M plug connector (M): DIN terminal (D, Y): M8 connector (WO): L plug connector (L): SY5 20-L(-F2) 3 4 5 SY5 20-M(-F2) 3 4 5 SY5
: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 20 40 60 Transfer load m (kg) 600 L2 400 Mer m 200 L2 Mer 0 20 40 60 m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145 for deflection data. 20 Standard Motor/Horizontal
50 100 1 2 3 4 5 10 20 30 30 100 200 0.5 m, m, m max. m, m, m max.
M L M L M N N Grommet Conduit DIN terminal Conduit terminal Electrical entry Port size P Rc , , , B Mounting A C D E F Model 22.5 B1 B2 38.5 47 54 47 48 50 92 95 97 38.5 47 55 59 62 64 14.5 17 17 6 7.5 7.5 23 25.5 28 46.5 55 62 39 41.5 44.2 38.5 47 55 59 60 62 18 21 21 20 20 20 74.5 90 98 30 35 40 19 25 25 20 23 25.5 29 32 32 VX31 VX32 VX33 1 4 1 8 3 8 1 4 27.5 27.5 3 8 1 4 17-3-85 6 The
plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.
CX 10-20-47 CY Direct Grommet 10-20-48 D-Y7NWV/Y7PWV/Y7BWV MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-M5NW/M5PW/M5BW D-H7NF D-G59F D-F79F D-F59F The output signal can be detected in an unsteady detecting area. 10-20-49 10-20-50 RHC Solid state switch
K M MM N P S W Without gaiter with gaiter 40 ~ 800 20 ~ 800 27 30 60 44 16 32 15 15 M 8 x 1.25 6 11 M 14 x 1.5 27 1/4 84 8 50 ~ 1000 20 ~ 1000 32 35 70 52 20 40 17 17 M 8 x 1.25 7 11 M 18 x 1.5 30 3/8 90 0 63 ~ 1000 20 ~ 1000 32 35 85 64 20 40 17 17 M 10 x 1.25 7 14 M 18 x 1.5 31 3/8 98 0 80 ~ 1000 20 ~ 1000 37 40 102 78 25 52 21 21 M 12 x 1.75 11 17 M 22 x 1.5 37 1/2 116 0 100 ~ 1000 20
Fig. a 50 40 30 20 m Work load m [kg] m LEYG25M 10 5 4 3 2 Fig. b 1 50 40 20 30 10 5 Transfer speed [m/min] 747 LEYG Series AC Servo Motor * These graphs show the work load when the external guide is used together. When using the LEYG alone, refer to pages 746 and 747.
Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.
D C Clevis Pin (For CM2E) H B (mm) C D d H B Applicable bore size (mm) 20 25, 32 40 Part no. SN-020B SN-032B SN-040B Material: Carbon steel 26 30 25.5 M20 x 1.5 8 Dd9 d 32 37 31.5 M26 x 1.5 8 41 47.3 40.5 M32 x 2.0 10 m m t t L L1 (mm) Trunnion Nut Applicable bore size (mm) 20, 25 32, 40 Applicable retaining ring part no. Dd9 d L L1 m t Part no.
4 8 12 16 20 0 1 2 3 6 4 5 L8 Work load m [kg] Work load m [kg] Work load m [kg] Calculation of Guide Load Factor Mounting orientation 1.
K 20 m roll 100 m reel TUS1208 TUS0425 TUS0604 TUS0805 TUS1065 Model M Tubing O.D.
: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 20 40 60 Transfer load m (kg) 600 L2 400 Mer m 200 L2 0 20 40 60 Mer m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145 for deflection data. 20 21 Courtesy of Steven
Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-T2A(J/K)6-B5 ZP3B-T2A(J/K)10-B5 ZP3B-T2A(JB/K)15-B5 ZP3B-T2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.
With Air Cushion Horizontal Mounting Ball Bushing 19 l = 50mm V = 200m/s 20 l =100mm V = 200m/s MGPL16 to 25 MGPL16 to 25 10 10 25 25 20 25 20 25 5 5 20 Load weight m (kg) Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 16 16 16 16 1 20 50 76 75 100 200 1 20 50 76 75 100 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 30 30 50, 63 20 20 50, 63 50, 63 Load weight m (kg)
D-P5DWL BQP1-050 40 to 100 7-6-7 8 Series CQ2 Clean Series Copper-free (For CRT manufacturing process) 20 CQ2B Bore size Stroke D(C)(M) 10 CQ2B Bore size Stroke D(M) 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 12, 16, 20, 25, 32, 40, 50, 63 Copper-free Clean Series 10-Relief type 11-Vacuum type The type which is applicable for using inside the clean room graded Class 100 by making an actuators
(An additionally machined port will have an aluminum surface since it will be left unfinished.) 2-d Body (B) (mm) (mm) Size d Size Q M N 10 3.4 10 M3 8.5 9.5 15 3.4 15 M3 11 10 Body (A) 20 4.5 20 M5 14 13 Q N A port B port (Standard) (Altered) A port 30 30 B port 5.5 M5 15.5 14 40 40 M5 21 20 5.5 M 63 Series CRBU2 Symbol: C3 Symbol: C4 Change the position of the screws for tightening the