Table of Contents

(g) Model Min.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

20 20 2-2.6 (For mounting) (2.3) (2.3) 20 (2.3) 23 23 23 23 27 Refer to page 563 for dimensions with connector cable. 519 10-SYJ5000 5 port solenoid valve Series 2 position double [ ]: AC G H Grommet (G), (H): 10-SYJ5223-M5 Built-in One-touch fitting 10-SYJ5223G H C4,N3 C6,N7 G: Approx. 300 H: Approx. 600 (Lead wire length) 87.2[91.6] 43 3.5 11 5 B A B A 19 10 10.6 Manual override M5 x

New

Add 10 g for conduit type, 30 g for DIN terminal type, 60 g for conduit terminal type respectively.

JIS Standard Hydraulic Cylinder

25 to 1500 80 M16 x 1.5 110 118 80 17 40 22 16 44 44 3/4 65 184 18 18 72 12 87 50 50 20 269 284 65 17 20 80 25 to 1800 1/4 stroke 100 M18 x 1.5 135 150 102 19 42 22 18 44 44 3/4 75 192 20 22 85 12 109 55 55 23 287 302 80 19 15 100 25 to 1800 Tolerance B-series rod Rod series (mm) Bore size (mm) C-series rod Bore size (mm) LH LX E E MM A MA D K G H ZZ MM A MA D K G H ZZ 32 32 34

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Magnet The seal kit includes a grease pack (10 g for 32 to 50, 20 g for 63 and 80, 30 g for 100 and 125). Order with the following part number when only the grease pack is needed.

ZX

Operation stop Combination Symbol: D1 Combination Symbol: D4 An N.C. solenoid valve is used for the vacuum release valve. An external supply valve must be provided. An external valve must be provided to serve as the supply valve. An air operated N.C. valve is used for the vacuum release valve.

Air Fittings & Tubing

SKQ20, #14 to #20 Bulkhead male elbow: KQ2LE Tube O.D. (mm) Part No. Nylon Urethane Mounting hole Effective area (mm2) Weight (g) (1) H1 (Hex.) H2 (Hex.)

MK

MK2-F020 MK2-F025 MK2-F032 MK2-F040 MK2-F050 MK2-F063 Accessory Bore size (mm) 20 25 32 40 50 63 20 25 32 40 50 63 Bore size (mm) 20With boss in head side 2 3 5 7 13 25 Centering location ring Set pin Bolt for cylinder body With arm 100 100 200 200 350 350 Data Rear flange style (including mounting bolt) 133 153 166 198 345 531 260 g 133 g 2 g 100 g 495 g Calculation: (Example) MK2G20-10RFN

CQS

Foot or Flange style: Body mounting bolt 7-4-21 22 Series CQSW Weight/Without Auto Switch (g) Calculation: (Example) CQSWF12-10DM Cylinder weight: CQSWB12-10D46 g Option weight: Rod end male thread5 g : Rod side flange style 58 g Cylinder stroke (mm) Bore size (mm) 5 10 15 20 25 30 35 40 45 50 12 38 46 54 62 69 77 109 g 16 50 61 71 81 92 102 20 89 104 120 136 152 167 183 199 215 231 25

SMC Pneumatic Clean Series

WH E-0.05 E-0.05 I 0 0 KA AL G port 8-J F K C-0.1 A NA F H S + Stroke ZZ + Stroke (mm) A AL Bore size Standard stroke range B1 C D E F GA GB H H1 I J K KA MM NA P RA S WA WB WH 20 20 20 W ZZ 40 30 27 Up to 300 50 35 32 Up to 300 63 35 32 Up to 300 19 27 27 6 7 7 44 55 69 139 162 162 26 32 38 14 18 18 1/8 1/4 1/4 16 20 20 8 9 9 25 30 32 87 102 102 2 2 2 25 30 30 22<19> 26<24> 26<24> 15 17

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

HRX-OM-X084

Model number: HRR010-AN/WN-10/20 The transition connector from Rc to NPT is enclosed as an accessory. For NPT piping, be sure to use this connector. Model number: HRR010-AF/WF-10/20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

PF2A/PF2W

(Add 20 g for the types of analog output whether voltage or current output selected.)

MB1

Never use in an atmosphere of explosive gases. The structure of auto switches is not intended to prevent explosion. Never use in an atmosphere with an explosive gas since this may cause a serious explosion. 2. Do not use in an area where a magnetic field is generated. 1.

Fieldbus System

0.6 lbs (275 g) Weight 0.75 lbs (340 g) Note 1) M12 (4-pin) connector can be connected.

Series VQ Metal Seal/Rubber Seal Body Ported

Place an order for the cable assembly separately. Kit (D-sub connector) 15 pin F Kit (Flat cable connector) 10 pin, 16 pin, 20 pin P How to Order Manifold How to Order Manifold 06 FSA D VV5Q14 06 P SC VV5Q14 D Ex.) Ex.)

REA/REB

25 REAH15, 20, 25 REAH15, 20, 25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25 High Precision Guide Type REAH 0.08 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.03 REAH25 0.02 0.06 0.02 0.04 0.01 0.01 0.02 Max.

Rotary Table/

of angle adjustment screw an ro en Size ta t r ti n r o n an e n d tio ge 95 ta 10.2 10 20 30 50 70 100 200 ro m mu 7.2 xi Ma 6.5 8.2 7.0 Note) The drawing shows the rotation range of the positioning pin hole.

15

LEC Y Motorless Motorless Grease pack order number: GR-S-010 (10 g)/GR-S-020 (20 g) LAT LZ LC3F2 885

Nozzle Type Ionizer

Bar length [mm] IZN10-G-100-X205 100 IZN10-G-200-X205 200 IZN10-G-300-X205 300 IZN10-G-400-X205 400 IZN10-G-500-X205 500 IZN10-G-600-X205 600 Supply pressure specifications: 0.05 to 0.15 MPa If the tubing is bent for use, maintain a minimum bending radius of 20 mm.